2/10/2012	8:54:58 AM	Main Vac valve closed
2/10/2012	8:56:06 AM	Main Vac valve opened
2/10/2012	9:04:39 AM	Recipe started at 9:04 AM
2/10/2012	9:04:39 AM	Helium valve closed
2/10/2012	9:04:39 AM	H2 valve closed
2/10/2012	9:04:39 AM	BCl3 valve closed
2/10/2012	9:04:39 AM	PH3 valve closed
2/10/2012	9:04:39 AM	SiCl4 pre valve closed
2/10/2012	9:04:39 AM	SiCl4 post valve closed
2/10/2012	9:04:39 AM	Bypass valve closed
2/10/2012	9:04:39 AM	Bubbler valve closed
2/10/2012	9:04:39 AM	Main Vac valve opened
2/10/2012	9:04:39 AM	Helium MFC set to  0.000000
2/10/2012	9:04:39 AM	H2 MFC set to  0.000000
2/10/2012	9:04:39 AM	BCl3 MFC set to  0.000000
2/10/2012	9:04:39 AM	PH3 MFC set to  0.000000
2/10/2012	9:04:39 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:04:39 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:04:39 AM	Tube furnace set to 0
2/10/2012	9:04:42 AM	Helium valve closed
2/10/2012	9:04:42 AM	H2 valve closed
2/10/2012	9:04:42 AM	BCl3 valve closed
2/10/2012	9:04:42 AM	PH3 valve closed
2/10/2012	9:04:42 AM	SiCl4 pre valve closed
2/10/2012	9:04:42 AM	SiCl4 post valve closed
2/10/2012	9:04:42 AM	Main Vac valve closed
2/10/2012	9:04:42 AM	Bypass valve closed
2/10/2012	9:04:42 AM	Bubbler valve closed
2/10/2012	9:04:42 AM	Helium MFC set to  0.000000
2/10/2012	9:04:42 AM	H2 MFC set to  0.000000
2/10/2012	9:04:42 AM	BCl3 MFC set to  0.000000
2/10/2012	9:04:42 AM	PH3 MFC set to  0.000000
2/10/2012	9:04:42 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:04:42 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:04:42 AM	Tube furnace set to 0
2/10/2012	9:04:45 AM	Helium valve closed
2/10/2012	9:04:45 AM	BCl3 valve closed
2/10/2012	9:04:45 AM	PH3 valve closed
2/10/2012	9:04:45 AM	SiCl4 pre valve closed
2/10/2012	9:04:45 AM	SiCl4 post valve closed
2/10/2012	9:04:45 AM	Main Vac valve closed
2/10/2012	9:04:45 AM	Bypass valve closed
2/10/2012	9:04:45 AM	Bubbler valve closed
2/10/2012	9:04:45 AM	H2 valve opened
2/10/2012	9:04:45 AM	Helium MFC set to  0.000000
2/10/2012	9:04:45 AM	H2 MFC set to  500.000000
2/10/2012	9:04:45 AM	BCl3 MFC set to  0.000000
2/10/2012	9:04:45 AM	PH3 MFC set to  0.000000
2/10/2012	9:04:45 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:04:45 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:04:45 AM	Tube furnace set to 0
2/10/2012	9:05:55 AM	Helium valve closed
2/10/2012	9:05:55 AM	BCl3 valve closed
2/10/2012	9:05:55 AM	PH3 valve closed
2/10/2012	9:05:55 AM	SiCl4 pre valve closed
2/10/2012	9:05:55 AM	SiCl4 post valve closed
2/10/2012	9:05:55 AM	Main Vac valve closed
2/10/2012	9:05:55 AM	Bypass valve closed
2/10/2012	9:05:55 AM	H2 valve opened
2/10/2012	9:05:55 AM	Bubbler valve opened
2/10/2012	9:05:55 AM	Helium MFC set to  0.000000
2/10/2012	9:05:55 AM	H2 MFC set to  500.000000
2/10/2012	9:05:55 AM	BCl3 MFC set to  0.000000
2/10/2012	9:05:55 AM	PH3 MFC set to  0.000000
2/10/2012	9:05:55 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:05:55 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:05:55 AM	Tube furnace set to 0
2/10/2012	9:05:56 AM	Helium valve closed
2/10/2012	9:05:56 AM	BCl3 valve closed
2/10/2012	9:05:56 AM	PH3 valve closed
2/10/2012	9:05:56 AM	SiCl4 pre valve closed
2/10/2012	9:05:56 AM	SiCl4 post valve closed
2/10/2012	9:05:56 AM	Main Vac valve closed
2/10/2012	9:05:56 AM	Bypass valve closed
2/10/2012	9:05:56 AM	H2 valve opened
2/10/2012	9:05:56 AM	Bubbler valve opened
2/10/2012	9:05:56 AM	Helium MFC set to  0.000000
2/10/2012	9:05:56 AM	H2 MFC set to  500.000000
2/10/2012	9:05:56 AM	BCl3 MFC set to  0.000000
2/10/2012	9:05:56 AM	PH3 MFC set to  0.000000
2/10/2012	9:05:56 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:05:56 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:05:56 AM	Tube furnace set to 1000
2/10/2012	9:24:57 AM	Helium valve closed
2/10/2012	9:24:57 AM	PH3 valve closed
2/10/2012	9:24:57 AM	Main Vac valve closed
2/10/2012	9:24:57 AM	Bypass valve closed
2/10/2012	9:24:57 AM	H2 valve opened
2/10/2012	9:24:57 AM	BCl3 valve opened
2/10/2012	9:24:57 AM	SiCl4 pre valve opened
2/10/2012	9:24:57 AM	SiCl4 post valve opened
2/10/2012	9:24:57 AM	Bubbler valve opened
2/10/2012	9:24:57 AM	Helium MFC set to  0.000000
2/10/2012	9:24:57 AM	H2 MFC set to  450.000000
2/10/2012	9:24:57 AM	BCl3 MFC set to  1.500000
2/10/2012	9:24:57 AM	PH3 MFC set to  0.000000
2/10/2012	9:24:57 AM	SiCl4 MFC set to  50.000000
2/10/2012	9:24:57 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:24:57 AM	Tube furnace set to 1000
2/10/2012	9:27:30 AM	Helium valve closed
2/10/2012	9:27:31 AM	H2 valve closed
2/10/2012	9:27:31 AM	BCl3 valve closed
2/10/2012	9:27:31 AM	PH3 valve closed
2/10/2012	9:27:31 AM	SiCl4 pre valve closed
2/10/2012	9:27:31 AM	SiCl4 post valve closed
2/10/2012	9:27:31 AM	Main Vac valve closed
2/10/2012	9:27:31 AM	Bubbler valve closed
2/10/2012	9:27:31 AM	Bypass valve closed
2/10/2012	9:27:31 AM	Helium MFC set to  0.000000
2/10/2012	9:27:31 AM	H2 MFC set to  0.000000
2/10/2012	9:27:31 AM	BCl3 MFC set to  0.000000
2/10/2012	9:27:31 AM	PH3 MFC set to  0.000000
2/10/2012	9:27:31 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:27:31 AM	Bypass solenoid MFC set to  760.000000
2/10/2012	9:27:31 AM	Tube furnace set to 0
2/10/2012	9:27:31 AM	Baratron reads 900.567492 Torr.  Emergency exit.
2/10/2012	9:28:36 AM	Run aborted at 9:28 AM
2/10/2012	9:28:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	9:28:43 AM	Recipe started at 9:28 AM
2/10/2012	9:28:43 AM	Helium valve closed
2/10/2012	9:28:43 AM	H2 valve closed
2/10/2012	9:28:43 AM	BCl3 valve closed
2/10/2012	9:28:43 AM	PH3 valve closed
2/10/2012	9:28:43 AM	SiCl4 pre valve closed
2/10/2012	9:28:43 AM	SiCl4 post valve closed
2/10/2012	9:28:43 AM	Main Vac valve closed
2/10/2012	9:28:43 AM	Bubbler valve closed
2/10/2012	9:28:43 AM	Bypass valve opened
2/10/2012	9:28:43 AM	Helium MFC set to  0.000000
2/10/2012	9:28:43 AM	H2 MFC set to  0.000000
2/10/2012	9:28:43 AM	BCl3 MFC set to  0.000000
2/10/2012	9:28:43 AM	PH3 MFC set to  0.000000
2/10/2012	9:28:43 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:28:43 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:28:43 AM	Tube furnace set to 0
2/10/2012	9:29:14 AM	Helium valve closed
2/10/2012	9:29:14 AM	H2 valve closed
2/10/2012	9:29:14 AM	BCl3 valve closed
2/10/2012	9:29:14 AM	PH3 valve closed
2/10/2012	9:29:14 AM	SiCl4 pre valve closed
2/10/2012	9:29:14 AM	SiCl4 post valve closed
2/10/2012	9:29:14 AM	Main Vac valve closed
2/10/2012	9:29:14 AM	Bubbler valve closed
2/10/2012	9:29:14 AM	Bypass valve opened
2/10/2012	9:29:14 AM	Helium MFC set to  0.000000
2/10/2012	9:29:14 AM	H2 MFC set to  0.000000
2/10/2012	9:29:14 AM	BCl3 MFC set to  0.000000
2/10/2012	9:29:14 AM	PH3 MFC set to  0.000000
2/10/2012	9:29:14 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:29:14 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:29:14 AM	Tube furnace set to 0
2/10/2012	9:30:14 AM	Helium valve closed
2/10/2012	9:30:14 AM	H2 valve closed
2/10/2012	9:30:14 AM	BCl3 valve closed
2/10/2012	9:30:14 AM	PH3 valve closed
2/10/2012	9:30:14 AM	SiCl4 pre valve closed
2/10/2012	9:30:14 AM	SiCl4 post valve closed
2/10/2012	9:30:14 AM	Bypass valve closed
2/10/2012	9:30:14 AM	Bubbler valve closed
2/10/2012	9:30:14 AM	Main Vac valve opened
2/10/2012	9:30:14 AM	Helium MFC set to  0.000000
2/10/2012	9:30:14 AM	H2 MFC set to  0.000000
2/10/2012	9:30:14 AM	BCl3 MFC set to  0.000000
2/10/2012	9:30:14 AM	PH3 MFC set to  0.000000
2/10/2012	9:30:14 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:30:14 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:30:15 AM	Tube furnace set to 0
2/10/2012	9:30:16 AM	Run finished at 9:30 AM
2/10/2012	9:30:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	9:33:00 AM	Recipe started at 9:32 AM
2/10/2012	9:33:00 AM	Helium valve closed
2/10/2012	9:33:00 AM	H2 valve closed
2/10/2012	9:33:00 AM	BCl3 valve closed
2/10/2012	9:33:00 AM	PH3 valve closed
2/10/2012	9:33:00 AM	SiCl4 pre valve closed
2/10/2012	9:33:00 AM	SiCl4 post valve closed
2/10/2012	9:33:00 AM	Bypass valve closed
2/10/2012	9:33:00 AM	Bubbler valve closed
2/10/2012	9:33:00 AM	Main Vac valve opened
2/10/2012	9:33:00 AM	Helium MFC set to  0.000000
2/10/2012	9:33:00 AM	H2 MFC set to  0.000000
2/10/2012	9:33:00 AM	BCl3 MFC set to  0.000000
2/10/2012	9:33:00 AM	PH3 MFC set to  0.000000
2/10/2012	9:33:00 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:33:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:33:00 AM	Tube furnace set to 0
2/10/2012	9:33:09 AM	Helium valve closed
2/10/2012	9:33:10 AM	H2 valve closed
2/10/2012	9:33:10 AM	BCl3 valve closed
2/10/2012	9:33:10 AM	PH3 valve closed
2/10/2012	9:33:10 AM	SiCl4 pre valve closed
2/10/2012	9:33:10 AM	SiCl4 post valve closed
2/10/2012	9:33:10 AM	Main Vac valve closed
2/10/2012	9:33:10 AM	Bypass valve closed
2/10/2012	9:33:10 AM	Bubbler valve closed
2/10/2012	9:33:10 AM	Helium MFC set to  0.000000
2/10/2012	9:33:10 AM	H2 MFC set to  0.000000
2/10/2012	9:33:10 AM	BCl3 MFC set to  0.000000
2/10/2012	9:33:10 AM	PH3 MFC set to  0.000000
2/10/2012	9:33:10 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:33:10 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:33:10 AM	Tube furnace set to 0
2/10/2012	9:33:13 AM	Helium valve closed
2/10/2012	9:33:13 AM	BCl3 valve closed
2/10/2012	9:33:13 AM	PH3 valve closed
2/10/2012	9:33:13 AM	SiCl4 pre valve closed
2/10/2012	9:33:13 AM	SiCl4 post valve closed
2/10/2012	9:33:13 AM	Main Vac valve closed
2/10/2012	9:33:13 AM	Bypass valve closed
2/10/2012	9:33:13 AM	Bubbler valve closed
2/10/2012	9:33:13 AM	H2 valve opened
2/10/2012	9:33:13 AM	Helium MFC set to  0.000000
2/10/2012	9:33:13 AM	H2 MFC set to  500.000000
2/10/2012	9:33:13 AM	BCl3 MFC set to  0.000000
2/10/2012	9:33:13 AM	PH3 MFC set to  0.000000
2/10/2012	9:33:13 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:33:13 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:33:13 AM	Tube furnace set to 0
2/10/2012	9:34:11 AM	Helium valve closed
2/10/2012	9:34:11 AM	BCl3 valve closed
2/10/2012	9:34:11 AM	PH3 valve closed
2/10/2012	9:34:11 AM	SiCl4 pre valve closed
2/10/2012	9:34:11 AM	SiCl4 post valve closed
2/10/2012	9:34:11 AM	Main Vac valve closed
2/10/2012	9:34:11 AM	Bypass valve closed
2/10/2012	9:34:11 AM	H2 valve opened
2/10/2012	9:34:11 AM	Bubbler valve opened
2/10/2012	9:34:11 AM	Helium MFC set to  0.000000
2/10/2012	9:34:11 AM	H2 MFC set to  500.000000
2/10/2012	9:34:11 AM	BCl3 MFC set to  0.000000
2/10/2012	9:34:11 AM	PH3 MFC set to  0.000000
2/10/2012	9:34:11 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:34:11 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:34:11 AM	Tube furnace set to 0
2/10/2012	9:34:12 AM	Helium valve closed
2/10/2012	9:34:12 AM	BCl3 valve closed
2/10/2012	9:34:12 AM	PH3 valve closed
2/10/2012	9:34:12 AM	SiCl4 pre valve closed
2/10/2012	9:34:12 AM	SiCl4 post valve closed
2/10/2012	9:34:12 AM	Main Vac valve closed
2/10/2012	9:34:12 AM	Bypass valve closed
2/10/2012	9:34:12 AM	H2 valve opened
2/10/2012	9:34:12 AM	Bubbler valve opened
2/10/2012	9:34:12 AM	Helium MFC set to  0.000000
2/10/2012	9:34:12 AM	H2 MFC set to  500.000000
2/10/2012	9:34:12 AM	BCl3 MFC set to  0.000000
2/10/2012	9:34:12 AM	PH3 MFC set to  0.000000
2/10/2012	9:34:12 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:34:12 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:34:12 AM	Tube furnace set to 1000
2/10/2012	9:39:57 AM	Helium valve closed
2/10/2012	9:39:57 AM	PH3 valve closed
2/10/2012	9:39:57 AM	Main Vac valve closed
2/10/2012	9:39:57 AM	Bypass valve closed
2/10/2012	9:39:57 AM	H2 valve opened
2/10/2012	9:39:57 AM	BCl3 valve opened
2/10/2012	9:39:57 AM	SiCl4 pre valve opened
2/10/2012	9:39:57 AM	SiCl4 post valve opened
2/10/2012	9:39:57 AM	Bubbler valve opened
2/10/2012	9:39:57 AM	Helium MFC set to  0.000000
2/10/2012	9:39:57 AM	H2 MFC set to  450.000000
2/10/2012	9:39:57 AM	BCl3 MFC set to  1.500000
2/10/2012	9:39:57 AM	PH3 MFC set to  0.000000
2/10/2012	9:39:57 AM	SiCl4 MFC set to  50.000000
2/10/2012	9:39:57 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:39:57 AM	Tube furnace set to 1000
2/10/2012	9:42:26 AM	Helium valve closed
2/10/2012	9:42:26 AM	H2 valve closed
2/10/2012	9:42:26 AM	BCl3 valve closed
2/10/2012	9:42:26 AM	PH3 valve closed
2/10/2012	9:42:26 AM	SiCl4 pre valve closed
2/10/2012	9:42:26 AM	SiCl4 post valve closed
2/10/2012	9:42:26 AM	Main Vac valve closed
2/10/2012	9:42:26 AM	Bubbler valve closed
2/10/2012	9:42:26 AM	Bypass valve closed
2/10/2012	9:42:26 AM	Helium MFC set to  0.000000
2/10/2012	9:42:26 AM	H2 MFC set to  0.000000
2/10/2012	9:42:26 AM	BCl3 MFC set to  0.000000
2/10/2012	9:42:26 AM	PH3 MFC set to  0.000000
2/10/2012	9:42:26 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:42:26 AM	Bypass solenoid MFC set to  760.000000
2/10/2012	9:42:26 AM	Tube furnace set to 0
2/10/2012	9:42:26 AM	Baratron reads 900.567492 Torr.  Emergency exit.
2/10/2012	9:42:34 AM	Run aborted at 9:42 AM
2/10/2012	9:42:34 AM	Helium valve closed
2/10/2012	9:42:34 AM	H2 valve closed
2/10/2012	9:42:34 AM	BCl3 valve closed
2/10/2012	9:42:34 AM	PH3 valve closed
2/10/2012	9:42:34 AM	SiCl4 pre valve closed
2/10/2012	9:42:34 AM	SiCl4 post valve closed
2/10/2012	9:42:34 AM	Main Vac valve closed
2/10/2012	9:42:34 AM	Bubbler valve closed
2/10/2012	9:42:34 AM	Bypass valve closed
2/10/2012	9:42:34 AM	Helium MFC set to  0.000000
2/10/2012	9:42:34 AM	H2 MFC set to  0.000000
2/10/2012	9:42:34 AM	BCl3 MFC set to  0.000000
2/10/2012	9:42:34 AM	PH3 MFC set to  0.000000
2/10/2012	9:42:34 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:42:34 AM	Bypass solenoid MFC set to  760.000000
2/10/2012	9:42:34 AM	Tube furnace set to 0
2/10/2012	9:42:34 AM	Baratron reads 900.567492 Torr.  Emergency exit.
2/10/2012	9:42:38 AM	Program exited cleanly
2/10/2012	9:43:12 AM	Helium valve closed
2/10/2012	9:43:12 AM	H2 valve closed
2/10/2012	9:43:12 AM	BCl3 valve closed
2/10/2012	9:43:12 AM	PH3 valve closed
2/10/2012	9:43:12 AM	SiCl4 pre valve closed
2/10/2012	9:43:12 AM	SiCl4 post valve closed
2/10/2012	9:43:12 AM	Main Vac valve closed
2/10/2012	9:43:12 AM	Bypass valve closed
2/10/2012	9:43:12 AM	Bubbler valve closed
2/10/2012	9:43:12 AM	Helium MFC set to  0.000000
2/10/2012	9:43:12 AM	H2 MFC set to  0.000000
2/10/2012	9:43:12 AM	BCl3 MFC set to  0.000000
2/10/2012	9:43:12 AM	PH3 MFC set to  0.000000
2/10/2012	9:43:12 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:43:12 AM	Bypass solenoid MFC set to  760.000000
2/10/2012	9:43:12 AM	Tube furnace set to 0
2/10/2012	9:43:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	9:43:15 AM	Recipe started at 9:43 AM
2/10/2012	9:43:15 AM	Helium valve closed
2/10/2012	9:43:15 AM	H2 valve closed
2/10/2012	9:43:15 AM	BCl3 valve closed
2/10/2012	9:43:15 AM	PH3 valve closed
2/10/2012	9:43:15 AM	SiCl4 pre valve closed
2/10/2012	9:43:15 AM	SiCl4 post valve closed
2/10/2012	9:43:15 AM	Main Vac valve closed
2/10/2012	9:43:15 AM	Bubbler valve closed
2/10/2012	9:43:15 AM	Bypass valve opened
2/10/2012	9:43:15 AM	Helium MFC set to  0.000000
2/10/2012	9:43:15 AM	H2 MFC set to  0.000000
2/10/2012	9:43:15 AM	BCl3 MFC set to  0.000000
2/10/2012	9:43:15 AM	PH3 MFC set to  0.000000
2/10/2012	9:43:15 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:43:15 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:43:15 AM	Tube furnace set to 0
2/10/2012	9:43:47 AM	Helium valve closed
2/10/2012	9:43:47 AM	H2 valve closed
2/10/2012	9:43:47 AM	BCl3 valve closed
2/10/2012	9:43:47 AM	PH3 valve closed
2/10/2012	9:43:47 AM	SiCl4 pre valve closed
2/10/2012	9:43:47 AM	SiCl4 post valve closed
2/10/2012	9:43:47 AM	Main Vac valve closed
2/10/2012	9:43:47 AM	Bubbler valve closed
2/10/2012	9:43:47 AM	Bypass valve opened
2/10/2012	9:43:47 AM	Helium MFC set to  0.000000
2/10/2012	9:43:47 AM	H2 MFC set to  0.000000
2/10/2012	9:43:47 AM	BCl3 MFC set to  0.000000
2/10/2012	9:43:47 AM	PH3 MFC set to  0.000000
2/10/2012	9:43:47 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:43:47 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:43:47 AM	Tube furnace set to 0
2/10/2012	9:44:47 AM	Helium valve closed
2/10/2012	9:44:47 AM	H2 valve closed
2/10/2012	9:44:47 AM	BCl3 valve closed
2/10/2012	9:44:47 AM	PH3 valve closed
2/10/2012	9:44:47 AM	SiCl4 pre valve closed
2/10/2012	9:44:47 AM	SiCl4 post valve closed
2/10/2012	9:44:47 AM	Bypass valve closed
2/10/2012	9:44:47 AM	Bubbler valve closed
2/10/2012	9:44:47 AM	Main Vac valve opened
2/10/2012	9:44:47 AM	Helium MFC set to  0.000000
2/10/2012	9:44:47 AM	H2 MFC set to  0.000000
2/10/2012	9:44:47 AM	BCl3 MFC set to  0.000000
2/10/2012	9:44:47 AM	PH3 MFC set to  0.000000
2/10/2012	9:44:47 AM	SiCl4 MFC set to  0.000000
2/10/2012	9:44:47 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:44:47 AM	Tube furnace set to 0
2/10/2012	9:44:48 AM	Run finished at 9:44 AM
2/10/2012	9:44:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	11:58:27 AM	Recipe started at 11:58 AM
2/10/2012	11:58:27 AM	Helium valve closed
2/10/2012	11:58:27 AM	H2 valve closed
2/10/2012	11:58:27 AM	BCl3 valve closed
2/10/2012	11:58:27 AM	PH3 valve closed
2/10/2012	11:58:27 AM	SiCl4 pre valve closed
2/10/2012	11:58:27 AM	SiCl4 post valve closed
2/10/2012	11:58:27 AM	Bypass valve closed
2/10/2012	11:58:27 AM	Bubbler valve closed
2/10/2012	11:58:27 AM	Main Vac valve opened
2/10/2012	11:58:27 AM	Helium MFC set to  0.000000
2/10/2012	11:58:27 AM	H2 MFC set to  0.000000
2/10/2012	11:58:27 AM	BCl3 MFC set to  0.000000
2/10/2012	11:58:27 AM	PH3 MFC set to  0.000000
2/10/2012	11:58:27 AM	SiCl4 MFC set to  0.000000
2/10/2012	11:58:27 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	11:58:27 AM	Tube furnace set to 0
2/10/2012	11:58:28 AM	Run finished at 11:58 AM
2/10/2012	11:58:41 AM	Recipe started at 11:58 AM
2/10/2012	11:58:41 AM	Helium valve closed
2/10/2012	11:58:41 AM	H2 valve closed
2/10/2012	11:58:41 AM	BCl3 valve closed
2/10/2012	11:58:41 AM	PH3 valve closed
2/10/2012	11:58:41 AM	SiCl4 pre valve closed
2/10/2012	11:58:41 AM	SiCl4 post valve closed
2/10/2012	11:58:41 AM	Main Vac valve closed
2/10/2012	11:58:41 AM	Bypass valve closed
2/10/2012	11:58:41 AM	Bubbler valve closed
2/10/2012	11:58:41 AM	Helium MFC set to  0.000000
2/10/2012	11:58:41 AM	H2 MFC set to  0.000000
2/10/2012	11:58:41 AM	BCl3 MFC set to  0.000000
2/10/2012	11:58:41 AM	PH3 MFC set to  0.000000
2/10/2012	11:58:41 AM	SiCl4 MFC set to  0.000000
2/10/2012	11:58:41 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	11:58:41 AM	Tube furnace set to 0
2/10/2012	11:58:44 AM	Helium valve closed
2/10/2012	11:58:44 AM	BCl3 valve closed
2/10/2012	11:58:44 AM	PH3 valve closed
2/10/2012	11:58:44 AM	SiCl4 pre valve closed
2/10/2012	11:58:44 AM	SiCl4 post valve closed
2/10/2012	11:58:44 AM	Main Vac valve closed
2/10/2012	11:58:44 AM	Bypass valve closed
2/10/2012	11:58:44 AM	Bubbler valve closed
2/10/2012	11:58:44 AM	H2 valve opened
2/10/2012	11:58:44 AM	Helium MFC set to  0.000000
2/10/2012	11:58:44 AM	H2 MFC set to  500.000000
2/10/2012	11:58:44 AM	BCl3 MFC set to  0.000000
2/10/2012	11:58:44 AM	PH3 MFC set to  0.000000
2/10/2012	11:58:44 AM	SiCl4 MFC set to  0.000000
2/10/2012	11:58:44 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	11:58:44 AM	Tube furnace set to 0
2/10/2012	11:59:55 AM	Helium valve closed
2/10/2012	11:59:55 AM	BCl3 valve closed
2/10/2012	11:59:55 AM	PH3 valve closed
2/10/2012	11:59:55 AM	SiCl4 pre valve closed
2/10/2012	11:59:55 AM	SiCl4 post valve closed
2/10/2012	11:59:55 AM	Main Vac valve closed
2/10/2012	11:59:55 AM	Bypass valve closed
2/10/2012	11:59:55 AM	H2 valve opened
2/10/2012	11:59:55 AM	Bubbler valve opened
2/10/2012	11:59:55 AM	Helium MFC set to  0.000000
2/10/2012	11:59:55 AM	H2 MFC set to  500.000000
2/10/2012	11:59:55 AM	BCl3 MFC set to  0.000000
2/10/2012	11:59:55 AM	PH3 MFC set to  0.000000
2/10/2012	11:59:55 AM	SiCl4 MFC set to  0.000000
2/10/2012	11:59:55 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	11:59:55 AM	Tube furnace set to 0
2/10/2012	11:59:56 AM	Helium valve closed
2/10/2012	11:59:56 AM	BCl3 valve closed
2/10/2012	11:59:56 AM	PH3 valve closed
2/10/2012	11:59:56 AM	SiCl4 pre valve closed
2/10/2012	11:59:56 AM	SiCl4 post valve closed
2/10/2012	11:59:56 AM	Main Vac valve closed
2/10/2012	11:59:56 AM	Bypass valve closed
2/10/2012	11:59:56 AM	H2 valve opened
2/10/2012	11:59:56 AM	Bubbler valve opened
2/10/2012	11:59:56 AM	Helium MFC set to  0.000000
2/10/2012	11:59:56 AM	H2 MFC set to  500.000000
2/10/2012	11:59:56 AM	BCl3 MFC set to  0.000000
2/10/2012	11:59:56 AM	PH3 MFC set to  0.000000
2/10/2012	11:59:56 AM	SiCl4 MFC set to  0.000000
2/10/2012	11:59:56 AM	Bypass solenoid MFC set to  0.000000
2/10/2012	11:59:56 AM	Tube furnace set to 1000
2/10/2012	12:18:52 PM	Helium valve closed
2/10/2012	12:18:52 PM	PH3 valve closed
2/10/2012	12:18:52 PM	Main Vac valve closed
2/10/2012	12:18:52 PM	Bypass valve closed
2/10/2012	12:18:52 PM	H2 valve opened
2/10/2012	12:18:52 PM	BCl3 valve opened
2/10/2012	12:18:52 PM	SiCl4 pre valve opened
2/10/2012	12:18:52 PM	SiCl4 post valve opened
2/10/2012	12:18:52 PM	Bubbler valve opened
2/10/2012	12:18:52 PM	Helium MFC set to  0.000000
2/10/2012	12:18:52 PM	H2 MFC set to  500.000000
2/10/2012	12:18:52 PM	BCl3 MFC set to  1.000000
2/10/2012	12:18:52 PM	PH3 MFC set to  0.000000
2/10/2012	12:18:52 PM	SiCl4 MFC set to  50.000000
2/10/2012	12:18:52 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	12:18:52 PM	Tube furnace set to 1000
2/10/2012	12:38:52 PM	Helium valve closed
2/10/2012	12:38:52 PM	BCl3 valve closed
2/10/2012	12:38:52 PM	PH3 valve closed
2/10/2012	12:38:52 PM	SiCl4 pre valve closed
2/10/2012	12:38:52 PM	SiCl4 post valve closed
2/10/2012	12:38:52 PM	Main Vac valve closed
2/10/2012	12:38:52 PM	Bypass valve closed
2/10/2012	12:38:52 PM	H2 valve opened
2/10/2012	12:38:52 PM	Bubbler valve opened
2/10/2012	12:38:52 PM	Helium MFC set to  0.000000
2/10/2012	12:38:52 PM	H2 MFC set to  500.000000
2/10/2012	12:38:52 PM	BCl3 MFC set to  0.000000
2/10/2012	12:38:52 PM	PH3 MFC set to  0.000000
2/10/2012	12:38:52 PM	SiCl4 MFC set to  0.000000
2/10/2012	12:38:52 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	12:38:53 PM	Tube furnace set to 750
2/10/2012	12:43:53 PM	H2 valve closed
2/10/2012	12:43:53 PM	BCl3 valve closed
2/10/2012	12:43:53 PM	PH3 valve closed
2/10/2012	12:43:53 PM	SiCl4 pre valve closed
2/10/2012	12:43:53 PM	SiCl4 post valve closed
2/10/2012	12:43:53 PM	Main Vac valve closed
2/10/2012	12:43:53 PM	Bypass valve closed
2/10/2012	12:43:53 PM	Helium valve opened
2/10/2012	12:43:53 PM	Bubbler valve opened
2/10/2012	12:43:53 PM	Helium MFC set to  500.000000
2/10/2012	12:43:53 PM	H2 MFC set to  0.000000
2/10/2012	12:43:53 PM	BCl3 MFC set to  0.000000
2/10/2012	12:43:53 PM	PH3 MFC set to  0.000000
2/10/2012	12:43:53 PM	SiCl4 MFC set to  0.000000
2/10/2012	12:43:53 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	12:43:53 PM	Tube furnace set to 0
2/10/2012	1:03:53 PM	Helium valve closed
2/10/2012	1:03:53 PM	H2 valve closed
2/10/2012	1:03:53 PM	BCl3 valve closed
2/10/2012	1:03:53 PM	PH3 valve closed
2/10/2012	1:03:53 PM	SiCl4 pre valve closed
2/10/2012	1:03:53 PM	SiCl4 post valve closed
2/10/2012	1:03:53 PM	Main Vac valve closed
2/10/2012	1:03:53 PM	Bypass valve closed
2/10/2012	1:03:53 PM	Bubbler valve closed
2/10/2012	1:03:53 PM	Helium MFC set to  0.000000
2/10/2012	1:03:53 PM	H2 MFC set to  0.000000
2/10/2012	1:03:53 PM	BCl3 MFC set to  0.000000
2/10/2012	1:03:53 PM	PH3 MFC set to  0.000000
2/10/2012	1:03:53 PM	SiCl4 MFC set to  0.000000
2/10/2012	1:03:53 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	1:03:53 PM	Tube furnace set to 0
2/10/2012	1:03:54 PM	Run finished at 1:03 PM
2/10/2012	2:46:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2012	2:46:47 PM	Recipe started at 2:46 PM
2/10/2012	2:46:47 PM	Helium valve closed
2/10/2012	2:46:47 PM	H2 valve closed
2/10/2012	2:46:47 PM	BCl3 valve closed
2/10/2012	2:46:47 PM	PH3 valve closed
2/10/2012	2:46:47 PM	SiCl4 pre valve closed
2/10/2012	2:46:47 PM	SiCl4 post valve closed
2/10/2012	2:46:47 PM	Main Vac valve closed
2/10/2012	2:46:47 PM	Bypass valve closed
2/10/2012	2:46:47 PM	Bubbler valve closed
2/10/2012	2:46:47 PM	Helium MFC set to  0.000000
2/10/2012	2:46:47 PM	H2 MFC set to  0.000000
2/10/2012	2:46:47 PM	BCl3 MFC set to  0.000000
2/10/2012	2:46:47 PM	PH3 MFC set to  0.000000
2/10/2012	2:46:47 PM	SiCl4 MFC set to  0.000000
2/10/2012	2:46:47 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	2:46:47 PM	Tube furnace set to 0
2/10/2012	2:46:50 PM	H2 valve closed
2/10/2012	2:46:50 PM	BCl3 valve closed
2/10/2012	2:46:50 PM	PH3 valve closed
2/10/2012	2:46:50 PM	SiCl4 pre valve closed
2/10/2012	2:46:50 PM	SiCl4 post valve closed
2/10/2012	2:46:50 PM	Main Vac valve closed
2/10/2012	2:46:50 PM	Bypass valve closed
2/10/2012	2:46:50 PM	Bubbler valve closed
2/10/2012	2:46:50 PM	Helium valve opened
2/10/2012	2:46:50 PM	Helium MFC set to  500.000000
2/10/2012	2:46:50 PM	H2 MFC set to  0.000000
2/10/2012	2:46:50 PM	BCl3 MFC set to  0.000000
2/10/2012	2:46:50 PM	PH3 MFC set to  0.000000
2/10/2012	2:46:50 PM	SiCl4 MFC set to  0.000000
2/10/2012	2:46:50 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	2:46:50 PM	Tube furnace set to 0
2/10/2012	2:46:54 PM	Helium valve closed
2/10/2012	2:46:54 PM	H2 valve closed
2/10/2012	2:46:54 PM	BCl3 valve closed
2/10/2012	2:46:54 PM	PH3 valve closed
2/10/2012	2:46:54 PM	SiCl4 pre valve closed
2/10/2012	2:46:54 PM	SiCl4 post valve closed
2/10/2012	2:46:54 PM	Main Vac valve closed
2/10/2012	2:46:54 PM	Bypass valve closed
2/10/2012	2:46:54 PM	Bubbler valve closed
2/10/2012	2:46:54 PM	Helium MFC set to  0.000000
2/10/2012	2:46:54 PM	H2 MFC set to  0.000000
2/10/2012	2:46:54 PM	BCl3 MFC set to  0.000000
2/10/2012	2:46:54 PM	PH3 MFC set to  0.000000
2/10/2012	2:46:54 PM	SiCl4 MFC set to  0.000000
2/10/2012	2:46:54 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	2:46:54 PM	Tube furnace set to 0
2/10/2012	2:46:55 PM	Run finished at 2:46 PM
2/10/2012	2:46:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2012	3:17:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2012	3:17:54 PM	Recipe started at 3:17 PM
2/10/2012	3:17:54 PM	Helium valve closed
2/10/2012	3:17:54 PM	H2 valve closed
2/10/2012	3:17:54 PM	BCl3 valve closed
2/10/2012	3:17:54 PM	PH3 valve closed
2/10/2012	3:17:54 PM	SiCl4 pre valve closed
2/10/2012	3:17:54 PM	SiCl4 post valve closed
2/10/2012	3:17:54 PM	Main Vac valve closed
2/10/2012	3:17:54 PM	Bypass valve closed
2/10/2012	3:17:54 PM	Bubbler valve closed
2/10/2012	3:17:54 PM	Helium MFC set to  0.000000
2/10/2012	3:17:54 PM	H2 MFC set to  0.000000
2/10/2012	3:17:54 PM	BCl3 MFC set to  0.000000
2/10/2012	3:17:54 PM	PH3 MFC set to  0.000000
2/10/2012	3:17:54 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:17:54 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:17:54 PM	Tube furnace set to 0
2/10/2012	3:17:57 PM	H2 valve closed
2/10/2012	3:17:57 PM	BCl3 valve closed
2/10/2012	3:17:57 PM	PH3 valve closed
2/10/2012	3:17:57 PM	SiCl4 pre valve closed
2/10/2012	3:17:57 PM	SiCl4 post valve closed
2/10/2012	3:17:57 PM	Main Vac valve closed
2/10/2012	3:17:57 PM	Bypass valve closed
2/10/2012	3:17:57 PM	Bubbler valve closed
2/10/2012	3:17:57 PM	Helium valve opened
2/10/2012	3:17:57 PM	Helium MFC set to  500.000000
2/10/2012	3:17:57 PM	H2 MFC set to  0.000000
2/10/2012	3:17:57 PM	BCl3 MFC set to  0.000000
2/10/2012	3:17:57 PM	PH3 MFC set to  0.000000
2/10/2012	3:17:57 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:17:57 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:17:57 PM	Tube furnace set to 0
2/10/2012	3:18:01 PM	Helium valve closed
2/10/2012	3:18:01 PM	H2 valve closed
2/10/2012	3:18:01 PM	BCl3 valve closed
2/10/2012	3:18:01 PM	PH3 valve closed
2/10/2012	3:18:01 PM	SiCl4 pre valve closed
2/10/2012	3:18:01 PM	SiCl4 post valve closed
2/10/2012	3:18:01 PM	Main Vac valve closed
2/10/2012	3:18:01 PM	Bypass valve closed
2/10/2012	3:18:01 PM	Bubbler valve closed
2/10/2012	3:18:01 PM	Helium MFC set to  0.000000
2/10/2012	3:18:01 PM	H2 MFC set to  0.000000
2/10/2012	3:18:01 PM	BCl3 MFC set to  0.000000
2/10/2012	3:18:01 PM	PH3 MFC set to  0.000000
2/10/2012	3:18:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:18:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:18:01 PM	Tube furnace set to 0
2/10/2012	3:18:02 PM	Run finished at 3:18 PM
2/10/2012	3:18:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2012	3:22:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	3:22:50 PM	Recipe started at 3:22 PM
2/10/2012	3:22:50 PM	Helium valve closed
2/10/2012	3:22:50 PM	H2 valve closed
2/10/2012	3:22:50 PM	BCl3 valve closed
2/10/2012	3:22:50 PM	PH3 valve closed
2/10/2012	3:22:50 PM	SiCl4 pre valve closed
2/10/2012	3:22:50 PM	SiCl4 post valve closed
2/10/2012	3:22:50 PM	Main Vac valve closed
2/10/2012	3:22:50 PM	Bubbler valve closed
2/10/2012	3:22:50 PM	Bypass valve opened
2/10/2012	3:22:50 PM	Helium MFC set to  0.000000
2/10/2012	3:22:50 PM	H2 MFC set to  0.000000
2/10/2012	3:22:50 PM	BCl3 MFC set to  0.000000
2/10/2012	3:22:50 PM	PH3 MFC set to  0.000000
2/10/2012	3:22:50 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:22:50 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:22:50 PM	Tube furnace set to 0
2/10/2012	3:23:54 PM	Helium valve closed
2/10/2012	3:23:54 PM	H2 valve closed
2/10/2012	3:23:54 PM	BCl3 valve closed
2/10/2012	3:23:54 PM	PH3 valve closed
2/10/2012	3:23:54 PM	SiCl4 pre valve closed
2/10/2012	3:23:54 PM	SiCl4 post valve closed
2/10/2012	3:23:54 PM	Main Vac valve closed
2/10/2012	3:23:54 PM	Bubbler valve closed
2/10/2012	3:23:54 PM	Bypass valve opened
2/10/2012	3:23:54 PM	Helium MFC set to  0.000000
2/10/2012	3:23:54 PM	H2 MFC set to  0.000000
2/10/2012	3:23:54 PM	BCl3 MFC set to  0.000000
2/10/2012	3:23:54 PM	PH3 MFC set to  0.000000
2/10/2012	3:23:54 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:23:54 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:23:55 PM	Tube furnace set to 0
2/10/2012	3:24:55 PM	Helium valve closed
2/10/2012	3:24:55 PM	H2 valve closed
2/10/2012	3:24:55 PM	BCl3 valve closed
2/10/2012	3:24:55 PM	PH3 valve closed
2/10/2012	3:24:55 PM	SiCl4 pre valve closed
2/10/2012	3:24:55 PM	SiCl4 post valve closed
2/10/2012	3:24:55 PM	Bypass valve closed
2/10/2012	3:24:55 PM	Bubbler valve closed
2/10/2012	3:24:55 PM	Main Vac valve opened
2/10/2012	3:24:55 PM	Helium MFC set to  0.000000
2/10/2012	3:24:55 PM	H2 MFC set to  0.000000
2/10/2012	3:24:55 PM	BCl3 MFC set to  0.000000
2/10/2012	3:24:55 PM	PH3 MFC set to  0.000000
2/10/2012	3:24:55 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:24:55 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:24:55 PM	Tube furnace set to 0
2/10/2012	3:24:56 PM	Run finished at 3:24 PM
2/10/2012	3:24:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	3:25:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/10/2012	3:26:00 PM	Recipe started at 3:25 PM
2/10/2012	3:26:00 PM	Helium valve closed
2/10/2012	3:26:00 PM	H2 valve closed
2/10/2012	3:26:00 PM	BCl3 valve closed
2/10/2012	3:26:00 PM	PH3 valve closed
2/10/2012	3:26:00 PM	SiCl4 pre valve closed
2/10/2012	3:26:00 PM	SiCl4 post valve closed
2/10/2012	3:26:00 PM	Main Vac valve closed
2/10/2012	3:26:00 PM	Bubbler valve closed
2/10/2012	3:26:00 PM	Bypass valve opened
2/10/2012	3:26:00 PM	Helium MFC set to  0.000000
2/10/2012	3:26:00 PM	H2 MFC set to  0.000000
2/10/2012	3:26:00 PM	BCl3 MFC set to  0.000000
2/10/2012	3:26:00 PM	PH3 MFC set to  0.000000
2/10/2012	3:26:00 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:26:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:26:01 PM	Tube furnace set to 0
2/10/2012	3:26:01 PM	Helium valve closed
2/10/2012	3:26:01 PM	H2 valve closed
2/10/2012	3:26:01 PM	BCl3 valve closed
2/10/2012	3:26:01 PM	PH3 valve closed
2/10/2012	3:26:01 PM	SiCl4 pre valve closed
2/10/2012	3:26:01 PM	SiCl4 post valve closed
2/10/2012	3:26:01 PM	Main Vac valve closed
2/10/2012	3:26:01 PM	Bubbler valve closed
2/10/2012	3:26:01 PM	Bypass valve opened
2/10/2012	3:26:01 PM	Helium MFC set to  0.000000
2/10/2012	3:26:01 PM	H2 MFC set to  0.000000
2/10/2012	3:26:01 PM	BCl3 MFC set to  0.000000
2/10/2012	3:26:01 PM	PH3 MFC set to  0.000000
2/10/2012	3:26:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:26:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:26:01 PM	Tube furnace set to 0
2/10/2012	3:26:16 PM	Helium valve closed
2/10/2012	3:26:16 PM	H2 valve closed
2/10/2012	3:26:16 PM	BCl3 valve closed
2/10/2012	3:26:16 PM	PH3 valve closed
2/10/2012	3:26:16 PM	SiCl4 pre valve closed
2/10/2012	3:26:16 PM	SiCl4 post valve closed
2/10/2012	3:26:16 PM	Bypass valve closed
2/10/2012	3:26:16 PM	Bubbler valve closed
2/10/2012	3:26:16 PM	Main Vac valve opened
2/10/2012	3:26:16 PM	Helium MFC set to  0.000000
2/10/2012	3:26:16 PM	H2 MFC set to  0.000000
2/10/2012	3:26:16 PM	BCl3 MFC set to  0.000000
2/10/2012	3:26:16 PM	PH3 MFC set to  0.000000
2/10/2012	3:26:16 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:26:16 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:26:16 PM	Tube furnace set to 0
2/10/2012	3:26:17 PM	H2 valve closed
2/10/2012	3:26:17 PM	BCl3 valve closed
2/10/2012	3:26:17 PM	PH3 valve closed
2/10/2012	3:26:17 PM	SiCl4 pre valve closed
2/10/2012	3:26:17 PM	SiCl4 post valve closed
2/10/2012	3:26:17 PM	Bypass valve closed
2/10/2012	3:26:17 PM	Bubbler valve closed
2/10/2012	3:26:17 PM	Helium valve opened
2/10/2012	3:26:17 PM	Main Vac valve opened
2/10/2012	3:26:17 PM	Helium MFC set to  20.000000
2/10/2012	3:26:17 PM	H2 MFC set to  0.000000
2/10/2012	3:26:17 PM	BCl3 MFC set to  0.000000
2/10/2012	3:26:17 PM	PH3 MFC set to  0.000000
2/10/2012	3:26:17 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:26:17 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:26:17 PM	Tube furnace set to 0
2/10/2012	3:26:17 PM	Helium valve closed
2/10/2012	3:26:17 PM	H2 valve closed
2/10/2012	3:26:17 PM	BCl3 valve closed
2/10/2012	3:26:17 PM	PH3 valve closed
2/10/2012	3:26:17 PM	SiCl4 pre valve closed
2/10/2012	3:26:17 PM	SiCl4 post valve closed
2/10/2012	3:26:17 PM	Bypass valve closed
2/10/2012	3:26:17 PM	Bubbler valve closed
2/10/2012	3:26:17 PM	Main Vac valve opened
2/10/2012	3:26:17 PM	Helium MFC set to  0.000000
2/10/2012	3:26:17 PM	H2 MFC set to  0.000000
2/10/2012	3:26:17 PM	BCl3 MFC set to  0.000000
2/10/2012	3:26:17 PM	PH3 MFC set to  0.000000
2/10/2012	3:26:17 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:26:18 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:26:18 PM	Tube furnace set to 0
2/10/2012	3:26:45 PM	H2 valve closed
2/10/2012	3:26:45 PM	BCl3 valve closed
2/10/2012	3:26:45 PM	PH3 valve closed
2/10/2012	3:26:45 PM	SiCl4 pre valve closed
2/10/2012	3:26:45 PM	SiCl4 post valve closed
2/10/2012	3:26:45 PM	Bypass valve closed
2/10/2012	3:26:45 PM	Bubbler valve closed
2/10/2012	3:26:45 PM	Helium valve opened
2/10/2012	3:26:45 PM	Main Vac valve opened
2/10/2012	3:26:45 PM	Helium MFC set to  20.000000
2/10/2012	3:26:45 PM	H2 MFC set to  0.000000
2/10/2012	3:26:45 PM	BCl3 MFC set to  0.000000
2/10/2012	3:26:45 PM	PH3 MFC set to  0.000000
2/10/2012	3:26:45 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:26:45 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:26:45 PM	Tube furnace set to 0
2/10/2012	3:26:45 PM	Helium valve closed
2/10/2012	3:26:45 PM	H2 valve closed
2/10/2012	3:26:45 PM	BCl3 valve closed
2/10/2012	3:26:45 PM	PH3 valve closed
2/10/2012	3:26:45 PM	SiCl4 pre valve closed
2/10/2012	3:26:45 PM	SiCl4 post valve closed
2/10/2012	3:26:45 PM	Bypass valve closed
2/10/2012	3:26:45 PM	Bubbler valve closed
2/10/2012	3:26:45 PM	Main Vac valve opened
2/10/2012	3:26:45 PM	Helium MFC set to  0.000000
2/10/2012	3:26:45 PM	H2 MFC set to  0.000000
2/10/2012	3:26:45 PM	BCl3 MFC set to  0.000000
2/10/2012	3:26:45 PM	PH3 MFC set to  0.000000
2/10/2012	3:26:45 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:26:45 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:26:45 PM	Tube furnace set to 0
2/10/2012	3:27:07 PM	H2 valve closed
2/10/2012	3:27:07 PM	BCl3 valve closed
2/10/2012	3:27:07 PM	PH3 valve closed
2/10/2012	3:27:07 PM	SiCl4 pre valve closed
2/10/2012	3:27:07 PM	SiCl4 post valve closed
2/10/2012	3:27:07 PM	Bypass valve closed
2/10/2012	3:27:07 PM	Bubbler valve closed
2/10/2012	3:27:07 PM	Helium valve opened
2/10/2012	3:27:07 PM	Main Vac valve opened
2/10/2012	3:27:07 PM	Helium MFC set to  20.000000
2/10/2012	3:27:07 PM	H2 MFC set to  0.000000
2/10/2012	3:27:07 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:07 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:07 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:07 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:07 PM	Tube furnace set to 0
2/10/2012	3:27:08 PM	Helium valve closed
2/10/2012	3:27:08 PM	H2 valve closed
2/10/2012	3:27:08 PM	BCl3 valve closed
2/10/2012	3:27:08 PM	PH3 valve closed
2/10/2012	3:27:08 PM	SiCl4 pre valve closed
2/10/2012	3:27:08 PM	SiCl4 post valve closed
2/10/2012	3:27:08 PM	Bypass valve closed
2/10/2012	3:27:08 PM	Bubbler valve closed
2/10/2012	3:27:08 PM	Main Vac valve opened
2/10/2012	3:27:08 PM	Helium MFC set to  0.000000
2/10/2012	3:27:08 PM	H2 MFC set to  0.000000
2/10/2012	3:27:08 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:08 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:08 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:08 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:08 PM	Tube furnace set to 0
2/10/2012	3:27:28 PM	H2 valve closed
2/10/2012	3:27:28 PM	BCl3 valve closed
2/10/2012	3:27:28 PM	PH3 valve closed
2/10/2012	3:27:28 PM	SiCl4 pre valve closed
2/10/2012	3:27:28 PM	SiCl4 post valve closed
2/10/2012	3:27:28 PM	Bypass valve closed
2/10/2012	3:27:28 PM	Bubbler valve closed
2/10/2012	3:27:28 PM	Helium valve opened
2/10/2012	3:27:28 PM	Main Vac valve opened
2/10/2012	3:27:28 PM	Helium MFC set to  20.000000
2/10/2012	3:27:28 PM	H2 MFC set to  0.000000
2/10/2012	3:27:28 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:28 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:28 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:28 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:28 PM	Tube furnace set to 0
2/10/2012	3:27:29 PM	Helium valve closed
2/10/2012	3:27:29 PM	H2 valve closed
2/10/2012	3:27:29 PM	BCl3 valve closed
2/10/2012	3:27:29 PM	PH3 valve closed
2/10/2012	3:27:29 PM	SiCl4 pre valve closed
2/10/2012	3:27:29 PM	SiCl4 post valve closed
2/10/2012	3:27:29 PM	Bypass valve closed
2/10/2012	3:27:29 PM	Bubbler valve closed
2/10/2012	3:27:29 PM	Main Vac valve opened
2/10/2012	3:27:29 PM	Helium MFC set to  0.000000
2/10/2012	3:27:29 PM	H2 MFC set to  0.000000
2/10/2012	3:27:29 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:29 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:29 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:29 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:29 PM	Tube furnace set to 0
2/10/2012	3:27:30 PM	H2 valve closed
2/10/2012	3:27:30 PM	BCl3 valve closed
2/10/2012	3:27:30 PM	PH3 valve closed
2/10/2012	3:27:30 PM	SiCl4 pre valve closed
2/10/2012	3:27:30 PM	SiCl4 post valve closed
2/10/2012	3:27:30 PM	Bypass valve closed
2/10/2012	3:27:30 PM	Bubbler valve closed
2/10/2012	3:27:30 PM	Helium valve opened
2/10/2012	3:27:30 PM	Main Vac valve opened
2/10/2012	3:27:30 PM	Helium MFC set to  20.000000
2/10/2012	3:27:30 PM	H2 MFC set to  0.000000
2/10/2012	3:27:30 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:30 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:30 PM	Tube furnace set to 0
2/10/2012	3:27:31 PM	Helium valve closed
2/10/2012	3:27:31 PM	H2 valve closed
2/10/2012	3:27:31 PM	BCl3 valve closed
2/10/2012	3:27:31 PM	PH3 valve closed
2/10/2012	3:27:31 PM	SiCl4 pre valve closed
2/10/2012	3:27:31 PM	SiCl4 post valve closed
2/10/2012	3:27:31 PM	Bypass valve closed
2/10/2012	3:27:31 PM	Bubbler valve closed
2/10/2012	3:27:31 PM	Main Vac valve opened
2/10/2012	3:27:31 PM	Helium MFC set to  0.000000
2/10/2012	3:27:31 PM	H2 MFC set to  0.000000
2/10/2012	3:27:31 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:31 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:31 PM	Tube furnace set to 0
2/10/2012	3:27:33 PM	H2 valve closed
2/10/2012	3:27:33 PM	BCl3 valve closed
2/10/2012	3:27:33 PM	PH3 valve closed
2/10/2012	3:27:33 PM	SiCl4 pre valve closed
2/10/2012	3:27:33 PM	SiCl4 post valve closed
2/10/2012	3:27:33 PM	Bypass valve closed
2/10/2012	3:27:33 PM	Bubbler valve closed
2/10/2012	3:27:33 PM	Helium valve opened
2/10/2012	3:27:33 PM	Main Vac valve opened
2/10/2012	3:27:33 PM	Helium MFC set to  20.000000
2/10/2012	3:27:33 PM	H2 MFC set to  0.000000
2/10/2012	3:27:33 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:33 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:34 PM	Tube furnace set to 0
2/10/2012	3:27:34 PM	Helium valve closed
2/10/2012	3:27:34 PM	H2 valve closed
2/10/2012	3:27:34 PM	BCl3 valve closed
2/10/2012	3:27:34 PM	PH3 valve closed
2/10/2012	3:27:34 PM	SiCl4 pre valve closed
2/10/2012	3:27:34 PM	SiCl4 post valve closed
2/10/2012	3:27:34 PM	Bypass valve closed
2/10/2012	3:27:34 PM	Bubbler valve closed
2/10/2012	3:27:34 PM	Main Vac valve opened
2/10/2012	3:27:34 PM	Helium MFC set to  0.000000
2/10/2012	3:27:34 PM	H2 MFC set to  0.000000
2/10/2012	3:27:34 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:34 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:34 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:34 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:34 PM	Tube furnace set to 0
2/10/2012	3:27:35 PM	H2 valve closed
2/10/2012	3:27:35 PM	BCl3 valve closed
2/10/2012	3:27:35 PM	PH3 valve closed
2/10/2012	3:27:35 PM	SiCl4 pre valve closed
2/10/2012	3:27:35 PM	SiCl4 post valve closed
2/10/2012	3:27:35 PM	Bypass valve closed
2/10/2012	3:27:35 PM	Bubbler valve closed
2/10/2012	3:27:35 PM	Helium valve opened
2/10/2012	3:27:35 PM	Main Vac valve opened
2/10/2012	3:27:35 PM	Helium MFC set to  20.000000
2/10/2012	3:27:35 PM	H2 MFC set to  0.000000
2/10/2012	3:27:35 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:35 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:35 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:35 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:35 PM	Tube furnace set to 0
2/10/2012	3:27:36 PM	Helium valve closed
2/10/2012	3:27:36 PM	H2 valve closed
2/10/2012	3:27:36 PM	BCl3 valve closed
2/10/2012	3:27:36 PM	PH3 valve closed
2/10/2012	3:27:36 PM	SiCl4 pre valve closed
2/10/2012	3:27:36 PM	SiCl4 post valve closed
2/10/2012	3:27:36 PM	Bypass valve closed
2/10/2012	3:27:36 PM	Bubbler valve closed
2/10/2012	3:27:36 PM	Main Vac valve opened
2/10/2012	3:27:36 PM	Helium MFC set to  0.000000
2/10/2012	3:27:36 PM	H2 MFC set to  0.000000
2/10/2012	3:27:36 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:36 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:36 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:36 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:36 PM	Tube furnace set to 0
2/10/2012	3:27:50 PM	H2 valve closed
2/10/2012	3:27:50 PM	BCl3 valve closed
2/10/2012	3:27:50 PM	PH3 valve closed
2/10/2012	3:27:50 PM	SiCl4 pre valve closed
2/10/2012	3:27:50 PM	SiCl4 post valve closed
2/10/2012	3:27:50 PM	Bypass valve closed
2/10/2012	3:27:50 PM	Bubbler valve closed
2/10/2012	3:27:50 PM	Helium valve opened
2/10/2012	3:27:50 PM	Main Vac valve opened
2/10/2012	3:27:50 PM	Helium MFC set to  20.000000
2/10/2012	3:27:50 PM	H2 MFC set to  0.000000
2/10/2012	3:27:50 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:50 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:50 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:50 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:51 PM	Tube furnace set to 0
2/10/2012	3:27:51 PM	Helium valve closed
2/10/2012	3:27:51 PM	H2 valve closed
2/10/2012	3:27:51 PM	BCl3 valve closed
2/10/2012	3:27:51 PM	PH3 valve closed
2/10/2012	3:27:51 PM	SiCl4 pre valve closed
2/10/2012	3:27:51 PM	SiCl4 post valve closed
2/10/2012	3:27:51 PM	Bypass valve closed
2/10/2012	3:27:51 PM	Bubbler valve closed
2/10/2012	3:27:51 PM	Main Vac valve opened
2/10/2012	3:27:51 PM	Helium MFC set to  0.000000
2/10/2012	3:27:51 PM	H2 MFC set to  0.000000
2/10/2012	3:27:51 PM	BCl3 MFC set to  0.000000
2/10/2012	3:27:51 PM	PH3 MFC set to  0.000000
2/10/2012	3:27:51 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:27:51 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:27:51 PM	Tube furnace set to 0
2/10/2012	3:28:01 PM	H2 valve closed
2/10/2012	3:28:01 PM	BCl3 valve closed
2/10/2012	3:28:01 PM	PH3 valve closed
2/10/2012	3:28:01 PM	SiCl4 pre valve closed
2/10/2012	3:28:01 PM	SiCl4 post valve closed
2/10/2012	3:28:01 PM	Bypass valve closed
2/10/2012	3:28:01 PM	Bubbler valve closed
2/10/2012	3:28:01 PM	Helium valve opened
2/10/2012	3:28:01 PM	Main Vac valve opened
2/10/2012	3:28:01 PM	Helium MFC set to  20.000000
2/10/2012	3:28:01 PM	H2 MFC set to  0.000000
2/10/2012	3:28:01 PM	BCl3 MFC set to  0.000000
2/10/2012	3:28:01 PM	PH3 MFC set to  0.000000
2/10/2012	3:28:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:28:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:28:01 PM	Tube furnace set to 0
2/10/2012	3:28:03 PM	Helium valve closed
2/10/2012	3:28:03 PM	H2 valve closed
2/10/2012	3:28:03 PM	BCl3 valve closed
2/10/2012	3:28:03 PM	PH3 valve closed
2/10/2012	3:28:03 PM	SiCl4 pre valve closed
2/10/2012	3:28:03 PM	SiCl4 post valve closed
2/10/2012	3:28:03 PM	Bypass valve closed
2/10/2012	3:28:03 PM	Bubbler valve closed
2/10/2012	3:28:03 PM	Main Vac valve opened
2/10/2012	3:28:03 PM	Helium MFC set to  0.000000
2/10/2012	3:28:03 PM	H2 MFC set to  0.000000
2/10/2012	3:28:03 PM	BCl3 MFC set to  0.000000
2/10/2012	3:28:03 PM	PH3 MFC set to  0.000000
2/10/2012	3:28:03 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:28:03 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:28:03 PM	Tube furnace set to 0
2/10/2012	3:28:33 PM	H2 valve closed
2/10/2012	3:28:33 PM	BCl3 valve closed
2/10/2012	3:28:33 PM	PH3 valve closed
2/10/2012	3:28:33 PM	SiCl4 pre valve closed
2/10/2012	3:28:33 PM	SiCl4 post valve closed
2/10/2012	3:28:33 PM	Bypass valve closed
2/10/2012	3:28:33 PM	Bubbler valve closed
2/10/2012	3:28:33 PM	Helium valve opened
2/10/2012	3:28:33 PM	Main Vac valve opened
2/10/2012	3:28:33 PM	Helium MFC set to  20.000000
2/10/2012	3:28:33 PM	H2 MFC set to  0.000000
2/10/2012	3:28:33 PM	BCl3 MFC set to  0.000000
2/10/2012	3:28:33 PM	PH3 MFC set to  0.000000
2/10/2012	3:28:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:28:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:28:33 PM	Tube furnace set to 0
2/10/2012	3:29:04 PM	Helium valve closed
2/10/2012	3:29:04 PM	H2 valve closed
2/10/2012	3:29:04 PM	BCl3 valve closed
2/10/2012	3:29:04 PM	PH3 valve closed
2/10/2012	3:29:04 PM	SiCl4 pre valve closed
2/10/2012	3:29:04 PM	SiCl4 post valve closed
2/10/2012	3:29:04 PM	Bypass valve closed
2/10/2012	3:29:04 PM	Bubbler valve closed
2/10/2012	3:29:04 PM	Main Vac valve opened
2/10/2012	3:29:04 PM	Helium MFC set to  0.000000
2/10/2012	3:29:04 PM	H2 MFC set to  0.000000
2/10/2012	3:29:04 PM	BCl3 MFC set to  0.000000
2/10/2012	3:29:04 PM	PH3 MFC set to  0.000000
2/10/2012	3:29:04 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:29:04 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:29:04 PM	Tube furnace set to 0
2/10/2012	3:29:05 PM	Run finished at 3:29 PM
2/10/2012	3:29:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/10/2012	3:31:23 PM	Main Vac valve closed
2/10/2012	3:31:23 PM	Main Vac valve opened
2/10/2012	3:31:24 PM	Main Vac valve closed
2/10/2012	3:31:32 PM	Main Vac valve opened
2/10/2012	3:31:57 PM	Recipe started at 3:31 PM
2/10/2012	3:31:57 PM	Helium valve closed
2/10/2012	3:31:57 PM	H2 valve closed
2/10/2012	3:31:57 PM	BCl3 valve closed
2/10/2012	3:31:57 PM	PH3 valve closed
2/10/2012	3:31:57 PM	SiCl4 pre valve closed
2/10/2012	3:31:57 PM	SiCl4 post valve closed
2/10/2012	3:31:57 PM	Bypass valve closed
2/10/2012	3:31:57 PM	Bubbler valve closed
2/10/2012	3:31:57 PM	Main Vac valve opened
2/10/2012	3:31:57 PM	Helium MFC set to  0.000000
2/10/2012	3:31:57 PM	H2 MFC set to  0.000000
2/10/2012	3:31:57 PM	BCl3 MFC set to  0.000000
2/10/2012	3:31:57 PM	PH3 MFC set to  0.000000
2/10/2012	3:31:57 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:31:57 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:31:57 PM	Tube furnace set to 0
2/10/2012	3:32:27 PM	H2 valve closed
2/10/2012	3:32:27 PM	BCl3 valve closed
2/10/2012	3:32:27 PM	PH3 valve closed
2/10/2012	3:32:27 PM	SiCl4 pre valve closed
2/10/2012	3:32:27 PM	SiCl4 post valve closed
2/10/2012	3:32:27 PM	Bypass valve closed
2/10/2012	3:32:27 PM	Bubbler valve closed
2/10/2012	3:32:27 PM	Helium valve opened
2/10/2012	3:32:27 PM	Main Vac valve opened
2/10/2012	3:32:27 PM	Helium MFC set to  20.000000
2/10/2012	3:32:27 PM	H2 MFC set to  0.000000
2/10/2012	3:32:27 PM	BCl3 MFC set to  0.000000
2/10/2012	3:32:27 PM	PH3 MFC set to  0.000000
2/10/2012	3:32:27 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:32:27 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:32:28 PM	Tube furnace set to 0
2/10/2012	3:32:58 PM	Helium valve closed
2/10/2012	3:32:58 PM	H2 valve closed
2/10/2012	3:32:58 PM	BCl3 valve closed
2/10/2012	3:32:58 PM	PH3 valve closed
2/10/2012	3:32:58 PM	SiCl4 pre valve closed
2/10/2012	3:32:58 PM	SiCl4 post valve closed
2/10/2012	3:32:58 PM	Bypass valve closed
2/10/2012	3:32:58 PM	Bubbler valve closed
2/10/2012	3:32:58 PM	Main Vac valve opened
2/10/2012	3:32:58 PM	Helium MFC set to  0.000000
2/10/2012	3:32:58 PM	H2 MFC set to  0.000000
2/10/2012	3:32:58 PM	BCl3 MFC set to  0.000000
2/10/2012	3:32:58 PM	PH3 MFC set to  0.000000
2/10/2012	3:32:58 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:32:58 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:32:58 PM	Tube furnace set to 0
2/10/2012	3:33:28 PM	H2 valve closed
2/10/2012	3:33:28 PM	BCl3 valve closed
2/10/2012	3:33:28 PM	PH3 valve closed
2/10/2012	3:33:28 PM	SiCl4 pre valve closed
2/10/2012	3:33:28 PM	SiCl4 post valve closed
2/10/2012	3:33:28 PM	Bypass valve closed
2/10/2012	3:33:28 PM	Bubbler valve closed
2/10/2012	3:33:28 PM	Helium valve opened
2/10/2012	3:33:28 PM	Main Vac valve opened
2/10/2012	3:33:28 PM	Helium MFC set to  20.000000
2/10/2012	3:33:28 PM	H2 MFC set to  0.000000
2/10/2012	3:33:28 PM	BCl3 MFC set to  0.000000
2/10/2012	3:33:28 PM	PH3 MFC set to  0.000000
2/10/2012	3:33:28 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:33:28 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:33:28 PM	Tube furnace set to 0
2/10/2012	3:33:58 PM	Helium valve closed
2/10/2012	3:33:58 PM	H2 valve closed
2/10/2012	3:33:58 PM	BCl3 valve closed
2/10/2012	3:33:58 PM	PH3 valve closed
2/10/2012	3:33:58 PM	SiCl4 pre valve closed
2/10/2012	3:33:58 PM	SiCl4 post valve closed
2/10/2012	3:33:58 PM	Bypass valve closed
2/10/2012	3:33:58 PM	Bubbler valve closed
2/10/2012	3:33:58 PM	Main Vac valve opened
2/10/2012	3:33:58 PM	Helium MFC set to  0.000000
2/10/2012	3:33:58 PM	H2 MFC set to  0.000000
2/10/2012	3:33:58 PM	BCl3 MFC set to  0.000000
2/10/2012	3:33:58 PM	PH3 MFC set to  0.000000
2/10/2012	3:33:58 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:33:58 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:33:58 PM	Tube furnace set to 0
2/10/2012	3:34:28 PM	H2 valve closed
2/10/2012	3:34:28 PM	BCl3 valve closed
2/10/2012	3:34:28 PM	PH3 valve closed
2/10/2012	3:34:28 PM	SiCl4 pre valve closed
2/10/2012	3:34:28 PM	SiCl4 post valve closed
2/10/2012	3:34:28 PM	Bypass valve closed
2/10/2012	3:34:28 PM	Bubbler valve closed
2/10/2012	3:34:28 PM	Helium valve opened
2/10/2012	3:34:28 PM	Main Vac valve opened
2/10/2012	3:34:28 PM	Helium MFC set to  20.000000
2/10/2012	3:34:28 PM	H2 MFC set to  0.000000
2/10/2012	3:34:28 PM	BCl3 MFC set to  0.000000
2/10/2012	3:34:28 PM	PH3 MFC set to  0.000000
2/10/2012	3:34:28 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:34:28 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:34:28 PM	Tube furnace set to 0
2/10/2012	3:34:58 PM	Helium valve closed
2/10/2012	3:34:58 PM	H2 valve closed
2/10/2012	3:34:58 PM	BCl3 valve closed
2/10/2012	3:34:58 PM	PH3 valve closed
2/10/2012	3:34:58 PM	SiCl4 pre valve closed
2/10/2012	3:34:58 PM	SiCl4 post valve closed
2/10/2012	3:34:58 PM	Bypass valve closed
2/10/2012	3:34:58 PM	Bubbler valve closed
2/10/2012	3:34:58 PM	Main Vac valve opened
2/10/2012	3:34:58 PM	Helium MFC set to  0.000000
2/10/2012	3:34:58 PM	H2 MFC set to  0.000000
2/10/2012	3:34:58 PM	BCl3 MFC set to  0.000000
2/10/2012	3:34:58 PM	PH3 MFC set to  0.000000
2/10/2012	3:34:58 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:34:58 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:34:59 PM	Tube furnace set to 0
2/10/2012	3:35:29 PM	H2 valve closed
2/10/2012	3:35:29 PM	BCl3 valve closed
2/10/2012	3:35:29 PM	PH3 valve closed
2/10/2012	3:35:29 PM	SiCl4 pre valve closed
2/10/2012	3:35:29 PM	SiCl4 post valve closed
2/10/2012	3:35:29 PM	Bypass valve closed
2/10/2012	3:35:29 PM	Bubbler valve closed
2/10/2012	3:35:29 PM	Helium valve opened
2/10/2012	3:35:29 PM	Main Vac valve opened
2/10/2012	3:35:29 PM	Helium MFC set to  20.000000
2/10/2012	3:35:29 PM	H2 MFC set to  0.000000
2/10/2012	3:35:29 PM	BCl3 MFC set to  0.000000
2/10/2012	3:35:29 PM	PH3 MFC set to  0.000000
2/10/2012	3:35:29 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:35:29 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:35:29 PM	Tube furnace set to 0
2/10/2012	3:35:59 PM	Helium valve closed
2/10/2012	3:35:59 PM	H2 valve closed
2/10/2012	3:35:59 PM	BCl3 valve closed
2/10/2012	3:35:59 PM	PH3 valve closed
2/10/2012	3:35:59 PM	SiCl4 pre valve closed
2/10/2012	3:35:59 PM	SiCl4 post valve closed
2/10/2012	3:35:59 PM	Bypass valve closed
2/10/2012	3:35:59 PM	Bubbler valve closed
2/10/2012	3:35:59 PM	Main Vac valve opened
2/10/2012	3:35:59 PM	Helium MFC set to  0.000000
2/10/2012	3:35:59 PM	H2 MFC set to  0.000000
2/10/2012	3:35:59 PM	BCl3 MFC set to  0.000000
2/10/2012	3:35:59 PM	PH3 MFC set to  0.000000
2/10/2012	3:35:59 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:35:59 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:35:59 PM	Tube furnace set to 0
2/10/2012	3:36:29 PM	H2 valve closed
2/10/2012	3:36:29 PM	BCl3 valve closed
2/10/2012	3:36:29 PM	PH3 valve closed
2/10/2012	3:36:29 PM	SiCl4 pre valve closed
2/10/2012	3:36:29 PM	SiCl4 post valve closed
2/10/2012	3:36:29 PM	Bypass valve closed
2/10/2012	3:36:29 PM	Bubbler valve closed
2/10/2012	3:36:29 PM	Helium valve opened
2/10/2012	3:36:29 PM	Main Vac valve opened
2/10/2012	3:36:29 PM	Helium MFC set to  20.000000
2/10/2012	3:36:29 PM	H2 MFC set to  0.000000
2/10/2012	3:36:29 PM	BCl3 MFC set to  0.000000
2/10/2012	3:36:29 PM	PH3 MFC set to  0.000000
2/10/2012	3:36:29 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:36:29 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:36:29 PM	Tube furnace set to 0
2/10/2012	3:36:59 PM	Helium valve closed
2/10/2012	3:36:59 PM	H2 valve closed
2/10/2012	3:36:59 PM	BCl3 valve closed
2/10/2012	3:36:59 PM	PH3 valve closed
2/10/2012	3:36:59 PM	SiCl4 pre valve closed
2/10/2012	3:36:59 PM	SiCl4 post valve closed
2/10/2012	3:36:59 PM	Bypass valve closed
2/10/2012	3:36:59 PM	Bubbler valve closed
2/10/2012	3:36:59 PM	Main Vac valve opened
2/10/2012	3:36:59 PM	Helium MFC set to  0.000000
2/10/2012	3:36:59 PM	H2 MFC set to  0.000000
2/10/2012	3:36:59 PM	BCl3 MFC set to  0.000000
2/10/2012	3:36:59 PM	PH3 MFC set to  0.000000
2/10/2012	3:36:59 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:36:59 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:36:59 PM	Tube furnace set to 0
2/10/2012	3:37:29 PM	H2 valve closed
2/10/2012	3:37:29 PM	BCl3 valve closed
2/10/2012	3:37:29 PM	PH3 valve closed
2/10/2012	3:37:29 PM	SiCl4 pre valve closed
2/10/2012	3:37:29 PM	SiCl4 post valve closed
2/10/2012	3:37:29 PM	Bypass valve closed
2/10/2012	3:37:29 PM	Bubbler valve closed
2/10/2012	3:37:29 PM	Helium valve opened
2/10/2012	3:37:29 PM	Main Vac valve opened
2/10/2012	3:37:30 PM	Helium MFC set to  20.000000
2/10/2012	3:37:30 PM	H2 MFC set to  0.000000
2/10/2012	3:37:30 PM	BCl3 MFC set to  0.000000
2/10/2012	3:37:30 PM	PH3 MFC set to  0.000000
2/10/2012	3:37:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:37:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:37:30 PM	Tube furnace set to 0
2/10/2012	3:38:00 PM	Helium valve closed
2/10/2012	3:38:00 PM	H2 valve closed
2/10/2012	3:38:00 PM	BCl3 valve closed
2/10/2012	3:38:00 PM	PH3 valve closed
2/10/2012	3:38:00 PM	SiCl4 pre valve closed
2/10/2012	3:38:00 PM	SiCl4 post valve closed
2/10/2012	3:38:00 PM	Bypass valve closed
2/10/2012	3:38:00 PM	Bubbler valve closed
2/10/2012	3:38:00 PM	Main Vac valve opened
2/10/2012	3:38:00 PM	Helium MFC set to  0.000000
2/10/2012	3:38:00 PM	H2 MFC set to  0.000000
2/10/2012	3:38:00 PM	BCl3 MFC set to  0.000000
2/10/2012	3:38:00 PM	PH3 MFC set to  0.000000
2/10/2012	3:38:00 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:38:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:38:00 PM	Tube furnace set to 0
2/10/2012	3:38:30 PM	H2 valve closed
2/10/2012	3:38:30 PM	BCl3 valve closed
2/10/2012	3:38:30 PM	PH3 valve closed
2/10/2012	3:38:30 PM	SiCl4 pre valve closed
2/10/2012	3:38:30 PM	SiCl4 post valve closed
2/10/2012	3:38:30 PM	Bypass valve closed
2/10/2012	3:38:30 PM	Bubbler valve closed
2/10/2012	3:38:30 PM	Helium valve opened
2/10/2012	3:38:30 PM	Main Vac valve opened
2/10/2012	3:38:30 PM	Helium MFC set to  20.000000
2/10/2012	3:38:30 PM	H2 MFC set to  0.000000
2/10/2012	3:38:30 PM	BCl3 MFC set to  0.000000
2/10/2012	3:38:30 PM	PH3 MFC set to  0.000000
2/10/2012	3:38:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:38:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:38:30 PM	Tube furnace set to 0
2/10/2012	3:39:00 PM	Helium valve closed
2/10/2012	3:39:00 PM	H2 valve closed
2/10/2012	3:39:00 PM	BCl3 valve closed
2/10/2012	3:39:00 PM	PH3 valve closed
2/10/2012	3:39:00 PM	SiCl4 pre valve closed
2/10/2012	3:39:00 PM	SiCl4 post valve closed
2/10/2012	3:39:00 PM	Bypass valve closed
2/10/2012	3:39:00 PM	Bubbler valve closed
2/10/2012	3:39:00 PM	Main Vac valve opened
2/10/2012	3:39:00 PM	Helium MFC set to  0.000000
2/10/2012	3:39:00 PM	H2 MFC set to  0.000000
2/10/2012	3:39:00 PM	BCl3 MFC set to  0.000000
2/10/2012	3:39:00 PM	PH3 MFC set to  0.000000
2/10/2012	3:39:00 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:39:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:39:00 PM	Tube furnace set to 0
2/10/2012	3:39:30 PM	H2 valve closed
2/10/2012	3:39:30 PM	BCl3 valve closed
2/10/2012	3:39:30 PM	PH3 valve closed
2/10/2012	3:39:30 PM	SiCl4 pre valve closed
2/10/2012	3:39:30 PM	SiCl4 post valve closed
2/10/2012	3:39:30 PM	Bypass valve closed
2/10/2012	3:39:30 PM	Bubbler valve closed
2/10/2012	3:39:30 PM	Helium valve opened
2/10/2012	3:39:30 PM	Main Vac valve opened
2/10/2012	3:39:30 PM	Helium MFC set to  20.000000
2/10/2012	3:39:30 PM	H2 MFC set to  0.000000
2/10/2012	3:39:30 PM	BCl3 MFC set to  0.000000
2/10/2012	3:39:30 PM	PH3 MFC set to  0.000000
2/10/2012	3:39:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:39:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:39:30 PM	Tube furnace set to 0
2/10/2012	3:40:01 PM	Helium valve closed
2/10/2012	3:40:01 PM	H2 valve closed
2/10/2012	3:40:01 PM	BCl3 valve closed
2/10/2012	3:40:01 PM	PH3 valve closed
2/10/2012	3:40:01 PM	SiCl4 pre valve closed
2/10/2012	3:40:01 PM	SiCl4 post valve closed
2/10/2012	3:40:01 PM	Bypass valve closed
2/10/2012	3:40:01 PM	Bubbler valve closed
2/10/2012	3:40:01 PM	Main Vac valve opened
2/10/2012	3:40:01 PM	Helium MFC set to  0.000000
2/10/2012	3:40:01 PM	H2 MFC set to  0.000000
2/10/2012	3:40:01 PM	BCl3 MFC set to  0.000000
2/10/2012	3:40:01 PM	PH3 MFC set to  0.000000
2/10/2012	3:40:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:40:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:40:01 PM	Tube furnace set to 0
2/10/2012	3:40:31 PM	H2 valve closed
2/10/2012	3:40:31 PM	BCl3 valve closed
2/10/2012	3:40:31 PM	PH3 valve closed
2/10/2012	3:40:31 PM	SiCl4 pre valve closed
2/10/2012	3:40:31 PM	SiCl4 post valve closed
2/10/2012	3:40:31 PM	Bypass valve closed
2/10/2012	3:40:31 PM	Bubbler valve closed
2/10/2012	3:40:31 PM	Helium valve opened
2/10/2012	3:40:31 PM	Main Vac valve opened
2/10/2012	3:40:31 PM	Helium MFC set to  20.000000
2/10/2012	3:40:31 PM	H2 MFC set to  0.000000
2/10/2012	3:40:31 PM	BCl3 MFC set to  0.000000
2/10/2012	3:40:31 PM	PH3 MFC set to  0.000000
2/10/2012	3:40:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:40:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:40:31 PM	Tube furnace set to 0
2/10/2012	3:41:01 PM	Helium valve closed
2/10/2012	3:41:01 PM	H2 valve closed
2/10/2012	3:41:01 PM	BCl3 valve closed
2/10/2012	3:41:01 PM	PH3 valve closed
2/10/2012	3:41:01 PM	SiCl4 pre valve closed
2/10/2012	3:41:01 PM	SiCl4 post valve closed
2/10/2012	3:41:01 PM	Bypass valve closed
2/10/2012	3:41:01 PM	Bubbler valve closed
2/10/2012	3:41:01 PM	Main Vac valve opened
2/10/2012	3:41:01 PM	Helium MFC set to  0.000000
2/10/2012	3:41:01 PM	H2 MFC set to  0.000000
2/10/2012	3:41:01 PM	BCl3 MFC set to  0.000000
2/10/2012	3:41:01 PM	PH3 MFC set to  0.000000
2/10/2012	3:41:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:41:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:41:01 PM	Tube furnace set to 200
2/10/2012	3:41:31 PM	H2 valve closed
2/10/2012	3:41:31 PM	BCl3 valve closed
2/10/2012	3:41:31 PM	PH3 valve closed
2/10/2012	3:41:31 PM	SiCl4 pre valve closed
2/10/2012	3:41:31 PM	SiCl4 post valve closed
2/10/2012	3:41:31 PM	Bypass valve closed
2/10/2012	3:41:31 PM	Bubbler valve closed
2/10/2012	3:41:31 PM	Helium valve opened
2/10/2012	3:41:31 PM	Main Vac valve opened
2/10/2012	3:41:31 PM	Helium MFC set to  20.000000
2/10/2012	3:41:31 PM	H2 MFC set to  0.000000
2/10/2012	3:41:31 PM	BCl3 MFC set to  0.000000
2/10/2012	3:41:31 PM	PH3 MFC set to  0.000000
2/10/2012	3:41:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:41:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:41:31 PM	Tube furnace set to 200
2/10/2012	3:42:01 PM	Helium valve closed
2/10/2012	3:42:01 PM	H2 valve closed
2/10/2012	3:42:01 PM	BCl3 valve closed
2/10/2012	3:42:01 PM	PH3 valve closed
2/10/2012	3:42:01 PM	SiCl4 pre valve closed
2/10/2012	3:42:01 PM	SiCl4 post valve closed
2/10/2012	3:42:01 PM	Bypass valve closed
2/10/2012	3:42:01 PM	Bubbler valve closed
2/10/2012	3:42:01 PM	Main Vac valve opened
2/10/2012	3:42:01 PM	Helium MFC set to  0.000000
2/10/2012	3:42:01 PM	H2 MFC set to  0.000000
2/10/2012	3:42:01 PM	BCl3 MFC set to  0.000000
2/10/2012	3:42:01 PM	PH3 MFC set to  0.000000
2/10/2012	3:42:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:42:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:42:02 PM	Tube furnace set to 200
2/10/2012	3:42:32 PM	H2 valve closed
2/10/2012	3:42:32 PM	BCl3 valve closed
2/10/2012	3:42:32 PM	PH3 valve closed
2/10/2012	3:42:32 PM	SiCl4 pre valve closed
2/10/2012	3:42:32 PM	SiCl4 post valve closed
2/10/2012	3:42:32 PM	Bypass valve closed
2/10/2012	3:42:32 PM	Bubbler valve closed
2/10/2012	3:42:32 PM	Helium valve opened
2/10/2012	3:42:32 PM	Main Vac valve opened
2/10/2012	3:42:32 PM	Helium MFC set to  20.000000
2/10/2012	3:42:32 PM	H2 MFC set to  0.000000
2/10/2012	3:42:32 PM	BCl3 MFC set to  0.000000
2/10/2012	3:42:32 PM	PH3 MFC set to  0.000000
2/10/2012	3:42:32 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:42:32 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:42:32 PM	Tube furnace set to 200
2/10/2012	3:43:02 PM	Helium valve closed
2/10/2012	3:43:02 PM	H2 valve closed
2/10/2012	3:43:02 PM	BCl3 valve closed
2/10/2012	3:43:02 PM	PH3 valve closed
2/10/2012	3:43:02 PM	SiCl4 pre valve closed
2/10/2012	3:43:02 PM	SiCl4 post valve closed
2/10/2012	3:43:02 PM	Bypass valve closed
2/10/2012	3:43:02 PM	Bubbler valve closed
2/10/2012	3:43:02 PM	Main Vac valve opened
2/10/2012	3:43:02 PM	Helium MFC set to  0.000000
2/10/2012	3:43:02 PM	H2 MFC set to  0.000000
2/10/2012	3:43:02 PM	BCl3 MFC set to  0.000000
2/10/2012	3:43:02 PM	PH3 MFC set to  0.000000
2/10/2012	3:43:02 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:43:02 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:43:02 PM	Tube furnace set to 200
2/10/2012	3:43:32 PM	H2 valve closed
2/10/2012	3:43:32 PM	BCl3 valve closed
2/10/2012	3:43:32 PM	PH3 valve closed
2/10/2012	3:43:32 PM	SiCl4 pre valve closed
2/10/2012	3:43:32 PM	SiCl4 post valve closed
2/10/2012	3:43:32 PM	Bypass valve closed
2/10/2012	3:43:32 PM	Bubbler valve closed
2/10/2012	3:43:32 PM	Helium valve opened
2/10/2012	3:43:32 PM	Main Vac valve opened
2/10/2012	3:43:32 PM	Helium MFC set to  20.000000
2/10/2012	3:43:32 PM	H2 MFC set to  0.000000
2/10/2012	3:43:32 PM	BCl3 MFC set to  0.000000
2/10/2012	3:43:32 PM	PH3 MFC set to  0.000000
2/10/2012	3:43:32 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:43:32 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:43:32 PM	Tube furnace set to 200
2/10/2012	3:44:02 PM	Helium valve closed
2/10/2012	3:44:02 PM	H2 valve closed
2/10/2012	3:44:02 PM	BCl3 valve closed
2/10/2012	3:44:02 PM	PH3 valve closed
2/10/2012	3:44:02 PM	SiCl4 pre valve closed
2/10/2012	3:44:02 PM	SiCl4 post valve closed
2/10/2012	3:44:02 PM	Bypass valve closed
2/10/2012	3:44:02 PM	Bubbler valve closed
2/10/2012	3:44:02 PM	Main Vac valve opened
2/10/2012	3:44:02 PM	Helium MFC set to  0.000000
2/10/2012	3:44:02 PM	H2 MFC set to  0.000000
2/10/2012	3:44:02 PM	BCl3 MFC set to  0.000000
2/10/2012	3:44:02 PM	PH3 MFC set to  0.000000
2/10/2012	3:44:02 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:44:02 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:44:02 PM	Tube furnace set to 200
2/10/2012	3:44:32 PM	H2 valve closed
2/10/2012	3:44:32 PM	BCl3 valve closed
2/10/2012	3:44:32 PM	PH3 valve closed
2/10/2012	3:44:32 PM	SiCl4 pre valve closed
2/10/2012	3:44:32 PM	SiCl4 post valve closed
2/10/2012	3:44:32 PM	Bypass valve closed
2/10/2012	3:44:32 PM	Bubbler valve closed
2/10/2012	3:44:32 PM	Helium valve opened
2/10/2012	3:44:32 PM	Main Vac valve opened
2/10/2012	3:44:32 PM	Helium MFC set to  20.000000
2/10/2012	3:44:32 PM	H2 MFC set to  0.000000
2/10/2012	3:44:32 PM	BCl3 MFC set to  0.000000
2/10/2012	3:44:32 PM	PH3 MFC set to  0.000000
2/10/2012	3:44:32 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:44:32 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:44:33 PM	Tube furnace set to 200
2/10/2012	3:45:03 PM	Helium valve closed
2/10/2012	3:45:03 PM	H2 valve closed
2/10/2012	3:45:03 PM	BCl3 valve closed
2/10/2012	3:45:03 PM	PH3 valve closed
2/10/2012	3:45:03 PM	SiCl4 pre valve closed
2/10/2012	3:45:03 PM	SiCl4 post valve closed
2/10/2012	3:45:03 PM	Bypass valve closed
2/10/2012	3:45:03 PM	Bubbler valve closed
2/10/2012	3:45:03 PM	Main Vac valve opened
2/10/2012	3:45:03 PM	Helium MFC set to  0.000000
2/10/2012	3:45:03 PM	H2 MFC set to  0.000000
2/10/2012	3:45:03 PM	BCl3 MFC set to  0.000000
2/10/2012	3:45:03 PM	PH3 MFC set to  0.000000
2/10/2012	3:45:03 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:45:03 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:45:03 PM	Tube furnace set to 200
2/10/2012	3:45:33 PM	H2 valve closed
2/10/2012	3:45:33 PM	BCl3 valve closed
2/10/2012	3:45:33 PM	PH3 valve closed
2/10/2012	3:45:33 PM	SiCl4 pre valve closed
2/10/2012	3:45:33 PM	SiCl4 post valve closed
2/10/2012	3:45:33 PM	Bypass valve closed
2/10/2012	3:45:33 PM	Bubbler valve closed
2/10/2012	3:45:33 PM	Helium valve opened
2/10/2012	3:45:33 PM	Main Vac valve opened
2/10/2012	3:45:33 PM	Helium MFC set to  20.000000
2/10/2012	3:45:33 PM	H2 MFC set to  0.000000
2/10/2012	3:45:33 PM	BCl3 MFC set to  0.000000
2/10/2012	3:45:33 PM	PH3 MFC set to  0.000000
2/10/2012	3:45:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:45:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:45:33 PM	Tube furnace set to 200
2/10/2012	3:46:03 PM	Helium valve closed
2/10/2012	3:46:03 PM	H2 valve closed
2/10/2012	3:46:03 PM	BCl3 valve closed
2/10/2012	3:46:03 PM	PH3 valve closed
2/10/2012	3:46:03 PM	SiCl4 pre valve closed
2/10/2012	3:46:03 PM	SiCl4 post valve closed
2/10/2012	3:46:03 PM	Bypass valve closed
2/10/2012	3:46:03 PM	Bubbler valve closed
2/10/2012	3:46:03 PM	Main Vac valve opened
2/10/2012	3:46:03 PM	Helium MFC set to  0.000000
2/10/2012	3:46:03 PM	H2 MFC set to  0.000000
2/10/2012	3:46:03 PM	BCl3 MFC set to  0.000000
2/10/2012	3:46:03 PM	PH3 MFC set to  0.000000
2/10/2012	3:46:03 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:46:03 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:46:03 PM	Tube furnace set to 200
2/10/2012	3:46:33 PM	H2 valve closed
2/10/2012	3:46:33 PM	BCl3 valve closed
2/10/2012	3:46:33 PM	PH3 valve closed
2/10/2012	3:46:33 PM	SiCl4 pre valve closed
2/10/2012	3:46:33 PM	SiCl4 post valve closed
2/10/2012	3:46:33 PM	Bypass valve closed
2/10/2012	3:46:33 PM	Bubbler valve closed
2/10/2012	3:46:33 PM	Helium valve opened
2/10/2012	3:46:33 PM	Main Vac valve opened
2/10/2012	3:46:33 PM	Helium MFC set to  20.000000
2/10/2012	3:46:33 PM	H2 MFC set to  0.000000
2/10/2012	3:46:33 PM	BCl3 MFC set to  0.000000
2/10/2012	3:46:33 PM	PH3 MFC set to  0.000000
2/10/2012	3:46:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:46:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:46:33 PM	Tube furnace set to 200
2/10/2012	3:47:03 PM	Helium valve closed
2/10/2012	3:47:03 PM	H2 valve closed
2/10/2012	3:47:03 PM	BCl3 valve closed
2/10/2012	3:47:03 PM	PH3 valve closed
2/10/2012	3:47:03 PM	SiCl4 pre valve closed
2/10/2012	3:47:03 PM	SiCl4 post valve closed
2/10/2012	3:47:03 PM	Bypass valve closed
2/10/2012	3:47:03 PM	Bubbler valve closed
2/10/2012	3:47:03 PM	Main Vac valve opened
2/10/2012	3:47:03 PM	Helium MFC set to  0.000000
2/10/2012	3:47:03 PM	H2 MFC set to  0.000000
2/10/2012	3:47:03 PM	BCl3 MFC set to  0.000000
2/10/2012	3:47:03 PM	PH3 MFC set to  0.000000
2/10/2012	3:47:03 PM	SiCl4 MFC set to  0.000000
2/10/2012	3:47:03 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	3:47:04 PM	Tube furnace set to 0
2/10/2012	3:47:05 PM	Run finished at 3:47 PM
2/10/2012	3:54:57 PM	Main Vac valve closed
2/10/2012	3:55:05 PM	Main Vac valve opened
2/10/2012	4:11:43 PM	Recipe started at 4:11 PM
2/10/2012	4:11:43 PM	Helium valve closed
2/10/2012	4:11:43 PM	H2 valve closed
2/10/2012	4:11:43 PM	BCl3 valve closed
2/10/2012	4:11:43 PM	PH3 valve closed
2/10/2012	4:11:43 PM	SiCl4 pre valve closed
2/10/2012	4:11:43 PM	SiCl4 post valve closed
2/10/2012	4:11:43 PM	Bypass valve closed
2/10/2012	4:11:43 PM	Bubbler valve closed
2/10/2012	4:11:43 PM	Main Vac valve opened
2/10/2012	4:11:43 PM	Helium MFC set to  0.000000
2/10/2012	4:11:43 PM	H2 MFC set to  0.000000
2/10/2012	4:11:43 PM	BCl3 MFC set to  0.000000
2/10/2012	4:11:43 PM	PH3 MFC set to  0.000000
2/10/2012	4:11:43 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:11:43 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:11:43 PM	Tube furnace set to 0
2/10/2012	4:12:13 PM	H2 valve closed
2/10/2012	4:12:13 PM	BCl3 valve closed
2/10/2012	4:12:13 PM	PH3 valve closed
2/10/2012	4:12:13 PM	SiCl4 pre valve closed
2/10/2012	4:12:13 PM	SiCl4 post valve closed
2/10/2012	4:12:13 PM	Bypass valve closed
2/10/2012	4:12:13 PM	Bubbler valve closed
2/10/2012	4:12:13 PM	Helium valve opened
2/10/2012	4:12:13 PM	Main Vac valve opened
2/10/2012	4:12:13 PM	Helium MFC set to  20.000000
2/10/2012	4:12:13 PM	H2 MFC set to  0.000000
2/10/2012	4:12:13 PM	BCl3 MFC set to  0.000000
2/10/2012	4:12:13 PM	PH3 MFC set to  0.000000
2/10/2012	4:12:13 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:12:13 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:12:13 PM	Tube furnace set to 0
2/10/2012	4:12:43 PM	Helium valve closed
2/10/2012	4:12:43 PM	H2 valve closed
2/10/2012	4:12:43 PM	BCl3 valve closed
2/10/2012	4:12:43 PM	PH3 valve closed
2/10/2012	4:12:43 PM	SiCl4 pre valve closed
2/10/2012	4:12:43 PM	SiCl4 post valve closed
2/10/2012	4:12:43 PM	Bypass valve closed
2/10/2012	4:12:43 PM	Bubbler valve closed
2/10/2012	4:12:43 PM	Main Vac valve opened
2/10/2012	4:12:43 PM	Helium MFC set to  0.000000
2/10/2012	4:12:43 PM	H2 MFC set to  0.000000
2/10/2012	4:12:43 PM	BCl3 MFC set to  0.000000
2/10/2012	4:12:43 PM	PH3 MFC set to  0.000000
2/10/2012	4:12:43 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:12:43 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:12:44 PM	Tube furnace set to 0
2/10/2012	4:13:14 PM	H2 valve closed
2/10/2012	4:13:14 PM	BCl3 valve closed
2/10/2012	4:13:14 PM	PH3 valve closed
2/10/2012	4:13:14 PM	SiCl4 pre valve closed
2/10/2012	4:13:14 PM	SiCl4 post valve closed
2/10/2012	4:13:14 PM	Bypass valve closed
2/10/2012	4:13:14 PM	Bubbler valve closed
2/10/2012	4:13:14 PM	Helium valve opened
2/10/2012	4:13:14 PM	Main Vac valve opened
2/10/2012	4:13:14 PM	Helium MFC set to  20.000000
2/10/2012	4:13:14 PM	H2 MFC set to  0.000000
2/10/2012	4:13:14 PM	BCl3 MFC set to  0.000000
2/10/2012	4:13:14 PM	PH3 MFC set to  0.000000
2/10/2012	4:13:14 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:13:14 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:13:14 PM	Tube furnace set to 0
2/10/2012	4:13:39 PM	Helium valve closed
2/10/2012	4:13:39 PM	H2 valve closed
2/10/2012	4:13:39 PM	BCl3 valve closed
2/10/2012	4:13:39 PM	PH3 valve closed
2/10/2012	4:13:39 PM	SiCl4 pre valve closed
2/10/2012	4:13:39 PM	SiCl4 post valve closed
2/10/2012	4:13:39 PM	Bypass valve closed
2/10/2012	4:13:39 PM	Bubbler valve closed
2/10/2012	4:13:39 PM	Main Vac valve opened
2/10/2012	4:13:39 PM	Helium MFC set to  0.000000
2/10/2012	4:13:39 PM	H2 MFC set to  0.000000
2/10/2012	4:13:39 PM	BCl3 MFC set to  0.000000
2/10/2012	4:13:39 PM	PH3 MFC set to  0.000000
2/10/2012	4:13:39 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:13:39 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:13:39 PM	Tube furnace set to 0
2/10/2012	4:13:39 PM	H2 valve closed
2/10/2012	4:13:39 PM	BCl3 valve closed
2/10/2012	4:13:39 PM	PH3 valve closed
2/10/2012	4:13:39 PM	SiCl4 pre valve closed
2/10/2012	4:13:39 PM	SiCl4 post valve closed
2/10/2012	4:13:39 PM	Bypass valve closed
2/10/2012	4:13:39 PM	Bubbler valve closed
2/10/2012	4:13:39 PM	Helium valve opened
2/10/2012	4:13:39 PM	Main Vac valve opened
2/10/2012	4:13:39 PM	Helium MFC set to  20.000000
2/10/2012	4:13:39 PM	H2 MFC set to  0.000000
2/10/2012	4:13:39 PM	BCl3 MFC set to  0.000000
2/10/2012	4:13:40 PM	PH3 MFC set to  0.000000
2/10/2012	4:13:40 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:13:40 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:13:40 PM	Tube furnace set to 0
2/10/2012	4:13:41 PM	Helium valve closed
2/10/2012	4:13:41 PM	H2 valve closed
2/10/2012	4:13:41 PM	BCl3 valve closed
2/10/2012	4:13:41 PM	PH3 valve closed
2/10/2012	4:13:41 PM	SiCl4 pre valve closed
2/10/2012	4:13:41 PM	SiCl4 post valve closed
2/10/2012	4:13:41 PM	Bypass valve closed
2/10/2012	4:13:41 PM	Bubbler valve closed
2/10/2012	4:13:41 PM	Main Vac valve opened
2/10/2012	4:13:41 PM	Helium MFC set to  0.000000
2/10/2012	4:13:41 PM	H2 MFC set to  0.000000
2/10/2012	4:13:41 PM	BCl3 MFC set to  0.000000
2/10/2012	4:13:41 PM	PH3 MFC set to  0.000000
2/10/2012	4:13:41 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:13:41 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:13:41 PM	Tube furnace set to 0
2/10/2012	4:13:42 PM	H2 valve closed
2/10/2012	4:13:42 PM	BCl3 valve closed
2/10/2012	4:13:42 PM	PH3 valve closed
2/10/2012	4:13:42 PM	SiCl4 pre valve closed
2/10/2012	4:13:42 PM	SiCl4 post valve closed
2/10/2012	4:13:42 PM	Bypass valve closed
2/10/2012	4:13:42 PM	Bubbler valve closed
2/10/2012	4:13:42 PM	Helium valve opened
2/10/2012	4:13:42 PM	Main Vac valve opened
2/10/2012	4:13:42 PM	Helium MFC set to  20.000000
2/10/2012	4:13:42 PM	H2 MFC set to  0.000000
2/10/2012	4:13:42 PM	BCl3 MFC set to  0.000000
2/10/2012	4:13:42 PM	PH3 MFC set to  0.000000
2/10/2012	4:13:42 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:13:42 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:13:42 PM	Tube furnace set to 0
2/10/2012	4:13:43 PM	Helium valve closed
2/10/2012	4:13:43 PM	H2 valve closed
2/10/2012	4:13:43 PM	BCl3 valve closed
2/10/2012	4:13:43 PM	PH3 valve closed
2/10/2012	4:13:43 PM	SiCl4 pre valve closed
2/10/2012	4:13:43 PM	SiCl4 post valve closed
2/10/2012	4:13:43 PM	Bypass valve closed
2/10/2012	4:13:43 PM	Bubbler valve closed
2/10/2012	4:13:43 PM	Main Vac valve opened
2/10/2012	4:13:43 PM	Helium MFC set to  0.000000
2/10/2012	4:13:43 PM	H2 MFC set to  0.000000
2/10/2012	4:13:43 PM	BCl3 MFC set to  0.000000
2/10/2012	4:13:43 PM	PH3 MFC set to  0.000000
2/10/2012	4:13:43 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:13:43 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:13:43 PM	Tube furnace set to 0
2/10/2012	4:13:44 PM	H2 valve closed
2/10/2012	4:13:44 PM	BCl3 valve closed
2/10/2012	4:13:44 PM	PH3 valve closed
2/10/2012	4:13:44 PM	SiCl4 pre valve closed
2/10/2012	4:13:44 PM	SiCl4 post valve closed
2/10/2012	4:13:44 PM	Bypass valve closed
2/10/2012	4:13:44 PM	Bubbler valve closed
2/10/2012	4:13:44 PM	Helium valve opened
2/10/2012	4:13:44 PM	Main Vac valve opened
2/10/2012	4:13:44 PM	Helium MFC set to  20.000000
2/10/2012	4:13:44 PM	H2 MFC set to  0.000000
2/10/2012	4:13:44 PM	BCl3 MFC set to  0.000000
2/10/2012	4:13:44 PM	PH3 MFC set to  0.000000
2/10/2012	4:13:44 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:13:44 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:13:44 PM	Tube furnace set to 0
2/10/2012	4:13:45 PM	Helium valve closed
2/10/2012	4:13:45 PM	H2 valve closed
2/10/2012	4:13:45 PM	BCl3 valve closed
2/10/2012	4:13:45 PM	PH3 valve closed
2/10/2012	4:13:45 PM	SiCl4 pre valve closed
2/10/2012	4:13:45 PM	SiCl4 post valve closed
2/10/2012	4:13:45 PM	Bypass valve closed
2/10/2012	4:13:45 PM	Bubbler valve closed
2/10/2012	4:13:45 PM	Main Vac valve opened
2/10/2012	4:13:45 PM	Helium MFC set to  0.000000
2/10/2012	4:13:45 PM	H2 MFC set to  0.000000
2/10/2012	4:13:45 PM	BCl3 MFC set to  0.000000
2/10/2012	4:13:45 PM	PH3 MFC set to  0.000000
2/10/2012	4:13:45 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:13:45 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:13:45 PM	Tube furnace set to 0
2/10/2012	4:14:15 PM	H2 valve closed
2/10/2012	4:14:15 PM	BCl3 valve closed
2/10/2012	4:14:15 PM	PH3 valve closed
2/10/2012	4:14:15 PM	SiCl4 pre valve closed
2/10/2012	4:14:15 PM	SiCl4 post valve closed
2/10/2012	4:14:15 PM	Bypass valve closed
2/10/2012	4:14:15 PM	Bubbler valve closed
2/10/2012	4:14:15 PM	Helium valve opened
2/10/2012	4:14:15 PM	Main Vac valve opened
2/10/2012	4:14:15 PM	Helium MFC set to  20.000000
2/10/2012	4:14:15 PM	H2 MFC set to  0.000000
2/10/2012	4:14:15 PM	BCl3 MFC set to  0.000000
2/10/2012	4:14:15 PM	PH3 MFC set to  0.000000
2/10/2012	4:14:15 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:14:15 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:14:15 PM	Tube furnace set to 0
2/10/2012	4:14:45 PM	Helium valve closed
2/10/2012	4:14:45 PM	H2 valve closed
2/10/2012	4:14:45 PM	BCl3 valve closed
2/10/2012	4:14:45 PM	PH3 valve closed
2/10/2012	4:14:45 PM	SiCl4 pre valve closed
2/10/2012	4:14:45 PM	SiCl4 post valve closed
2/10/2012	4:14:45 PM	Bypass valve closed
2/10/2012	4:14:45 PM	Bubbler valve closed
2/10/2012	4:14:45 PM	Main Vac valve opened
2/10/2012	4:14:45 PM	Helium MFC set to  0.000000
2/10/2012	4:14:45 PM	H2 MFC set to  0.000000
2/10/2012	4:14:45 PM	BCl3 MFC set to  0.000000
2/10/2012	4:14:45 PM	PH3 MFC set to  0.000000
2/10/2012	4:14:45 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:14:45 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:14:45 PM	Tube furnace set to 0
2/10/2012	4:15:15 PM	H2 valve closed
2/10/2012	4:15:15 PM	BCl3 valve closed
2/10/2012	4:15:15 PM	PH3 valve closed
2/10/2012	4:15:15 PM	SiCl4 pre valve closed
2/10/2012	4:15:15 PM	SiCl4 post valve closed
2/10/2012	4:15:15 PM	Bypass valve closed
2/10/2012	4:15:15 PM	Bubbler valve closed
2/10/2012	4:15:15 PM	Helium valve opened
2/10/2012	4:15:15 PM	Main Vac valve opened
2/10/2012	4:15:15 PM	Helium MFC set to  20.000000
2/10/2012	4:15:15 PM	H2 MFC set to  0.000000
2/10/2012	4:15:15 PM	BCl3 MFC set to  0.000000
2/10/2012	4:15:15 PM	PH3 MFC set to  0.000000
2/10/2012	4:15:15 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:15:15 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:15:16 PM	Tube furnace set to 0
2/10/2012	4:15:46 PM	Helium valve closed
2/10/2012	4:15:46 PM	H2 valve closed
2/10/2012	4:15:46 PM	BCl3 valve closed
2/10/2012	4:15:46 PM	PH3 valve closed
2/10/2012	4:15:46 PM	SiCl4 pre valve closed
2/10/2012	4:15:46 PM	SiCl4 post valve closed
2/10/2012	4:15:46 PM	Bypass valve closed
2/10/2012	4:15:46 PM	Bubbler valve closed
2/10/2012	4:15:46 PM	Main Vac valve opened
2/10/2012	4:15:46 PM	Helium MFC set to  0.000000
2/10/2012	4:15:46 PM	H2 MFC set to  0.000000
2/10/2012	4:15:46 PM	BCl3 MFC set to  0.000000
2/10/2012	4:15:46 PM	PH3 MFC set to  0.000000
2/10/2012	4:15:46 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:15:46 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:15:46 PM	Tube furnace set to 0
2/10/2012	4:16:16 PM	H2 valve closed
2/10/2012	4:16:16 PM	BCl3 valve closed
2/10/2012	4:16:16 PM	PH3 valve closed
2/10/2012	4:16:16 PM	SiCl4 pre valve closed
2/10/2012	4:16:16 PM	SiCl4 post valve closed
2/10/2012	4:16:16 PM	Bypass valve closed
2/10/2012	4:16:16 PM	Bubbler valve closed
2/10/2012	4:16:16 PM	Helium valve opened
2/10/2012	4:16:16 PM	Main Vac valve opened
2/10/2012	4:16:16 PM	Helium MFC set to  20.000000
2/10/2012	4:16:16 PM	H2 MFC set to  0.000000
2/10/2012	4:16:16 PM	BCl3 MFC set to  0.000000
2/10/2012	4:16:16 PM	PH3 MFC set to  0.000000
2/10/2012	4:16:16 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:16:16 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:16:16 PM	Tube furnace set to 0
2/10/2012	4:16:46 PM	Helium valve closed
2/10/2012	4:16:46 PM	H2 valve closed
2/10/2012	4:16:46 PM	BCl3 valve closed
2/10/2012	4:16:46 PM	PH3 valve closed
2/10/2012	4:16:46 PM	SiCl4 pre valve closed
2/10/2012	4:16:46 PM	SiCl4 post valve closed
2/10/2012	4:16:46 PM	Bypass valve closed
2/10/2012	4:16:46 PM	Bubbler valve closed
2/10/2012	4:16:46 PM	Main Vac valve opened
2/10/2012	4:16:46 PM	Helium MFC set to  0.000000
2/10/2012	4:16:46 PM	H2 MFC set to  0.000000
2/10/2012	4:16:46 PM	BCl3 MFC set to  0.000000
2/10/2012	4:16:46 PM	PH3 MFC set to  0.000000
2/10/2012	4:16:46 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:16:46 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:16:46 PM	Tube furnace set to 0
2/10/2012	4:17:16 PM	H2 valve closed
2/10/2012	4:17:16 PM	BCl3 valve closed
2/10/2012	4:17:16 PM	PH3 valve closed
2/10/2012	4:17:16 PM	SiCl4 pre valve closed
2/10/2012	4:17:16 PM	SiCl4 post valve closed
2/10/2012	4:17:16 PM	Bypass valve closed
2/10/2012	4:17:16 PM	Bubbler valve closed
2/10/2012	4:17:16 PM	Helium valve opened
2/10/2012	4:17:16 PM	Main Vac valve opened
2/10/2012	4:17:16 PM	Helium MFC set to  20.000000
2/10/2012	4:17:16 PM	H2 MFC set to  0.000000
2/10/2012	4:17:16 PM	BCl3 MFC set to  0.000000
2/10/2012	4:17:16 PM	PH3 MFC set to  0.000000
2/10/2012	4:17:16 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:17:16 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:17:16 PM	Tube furnace set to 0
2/10/2012	4:17:46 PM	Helium valve closed
2/10/2012	4:17:46 PM	H2 valve closed
2/10/2012	4:17:46 PM	BCl3 valve closed
2/10/2012	4:17:46 PM	PH3 valve closed
2/10/2012	4:17:46 PM	SiCl4 pre valve closed
2/10/2012	4:17:46 PM	SiCl4 post valve closed
2/10/2012	4:17:46 PM	Bypass valve closed
2/10/2012	4:17:46 PM	Bubbler valve closed
2/10/2012	4:17:46 PM	Main Vac valve opened
2/10/2012	4:17:46 PM	Helium MFC set to  0.000000
2/10/2012	4:17:46 PM	H2 MFC set to  0.000000
2/10/2012	4:17:46 PM	BCl3 MFC set to  0.000000
2/10/2012	4:17:46 PM	PH3 MFC set to  0.000000
2/10/2012	4:17:46 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:17:46 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:17:47 PM	Tube furnace set to 200
2/10/2012	4:18:17 PM	H2 valve closed
2/10/2012	4:18:17 PM	BCl3 valve closed
2/10/2012	4:18:17 PM	PH3 valve closed
2/10/2012	4:18:17 PM	SiCl4 pre valve closed
2/10/2012	4:18:17 PM	SiCl4 post valve closed
2/10/2012	4:18:17 PM	Bypass valve closed
2/10/2012	4:18:17 PM	Bubbler valve closed
2/10/2012	4:18:17 PM	Helium valve opened
2/10/2012	4:18:17 PM	Main Vac valve opened
2/10/2012	4:18:17 PM	Helium MFC set to  20.000000
2/10/2012	4:18:17 PM	H2 MFC set to  0.000000
2/10/2012	4:18:17 PM	BCl3 MFC set to  0.000000
2/10/2012	4:18:17 PM	PH3 MFC set to  0.000000
2/10/2012	4:18:17 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:18:17 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:18:17 PM	Tube furnace set to 200
2/10/2012	4:18:47 PM	Helium valve closed
2/10/2012	4:18:47 PM	H2 valve closed
2/10/2012	4:18:47 PM	BCl3 valve closed
2/10/2012	4:18:47 PM	PH3 valve closed
2/10/2012	4:18:47 PM	SiCl4 pre valve closed
2/10/2012	4:18:47 PM	SiCl4 post valve closed
2/10/2012	4:18:47 PM	Bypass valve closed
2/10/2012	4:18:47 PM	Bubbler valve closed
2/10/2012	4:18:47 PM	Main Vac valve opened
2/10/2012	4:18:47 PM	Helium MFC set to  0.000000
2/10/2012	4:18:47 PM	H2 MFC set to  0.000000
2/10/2012	4:18:47 PM	BCl3 MFC set to  0.000000
2/10/2012	4:18:47 PM	PH3 MFC set to  0.000000
2/10/2012	4:18:47 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:18:47 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:18:47 PM	Tube furnace set to 200
2/10/2012	4:19:17 PM	H2 valve closed
2/10/2012	4:19:17 PM	BCl3 valve closed
2/10/2012	4:19:17 PM	PH3 valve closed
2/10/2012	4:19:17 PM	SiCl4 pre valve closed
2/10/2012	4:19:17 PM	SiCl4 post valve closed
2/10/2012	4:19:17 PM	Bypass valve closed
2/10/2012	4:19:17 PM	Bubbler valve closed
2/10/2012	4:19:17 PM	Helium valve opened
2/10/2012	4:19:17 PM	Main Vac valve opened
2/10/2012	4:19:17 PM	Helium MFC set to  20.000000
2/10/2012	4:19:17 PM	H2 MFC set to  0.000000
2/10/2012	4:19:17 PM	BCl3 MFC set to  0.000000
2/10/2012	4:19:17 PM	PH3 MFC set to  0.000000
2/10/2012	4:19:17 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:19:17 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:19:17 PM	Tube furnace set to 200
2/10/2012	4:19:47 PM	Helium valve closed
2/10/2012	4:19:47 PM	H2 valve closed
2/10/2012	4:19:47 PM	BCl3 valve closed
2/10/2012	4:19:47 PM	PH3 valve closed
2/10/2012	4:19:47 PM	SiCl4 pre valve closed
2/10/2012	4:19:47 PM	SiCl4 post valve closed
2/10/2012	4:19:47 PM	Bypass valve closed
2/10/2012	4:19:47 PM	Bubbler valve closed
2/10/2012	4:19:47 PM	Main Vac valve opened
2/10/2012	4:19:47 PM	Helium MFC set to  0.000000
2/10/2012	4:19:47 PM	H2 MFC set to  0.000000
2/10/2012	4:19:47 PM	BCl3 MFC set to  0.000000
2/10/2012	4:19:47 PM	PH3 MFC set to  0.000000
2/10/2012	4:19:47 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:19:47 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:19:47 PM	Tube furnace set to 200
2/10/2012	4:20:17 PM	H2 valve closed
2/10/2012	4:20:17 PM	BCl3 valve closed
2/10/2012	4:20:17 PM	PH3 valve closed
2/10/2012	4:20:17 PM	SiCl4 pre valve closed
2/10/2012	4:20:17 PM	SiCl4 post valve closed
2/10/2012	4:20:17 PM	Bypass valve closed
2/10/2012	4:20:17 PM	Bubbler valve closed
2/10/2012	4:20:17 PM	Helium valve opened
2/10/2012	4:20:17 PM	Main Vac valve opened
2/10/2012	4:20:17 PM	Helium MFC set to  20.000000
2/10/2012	4:20:17 PM	H2 MFC set to  0.000000
2/10/2012	4:20:17 PM	BCl3 MFC set to  0.000000
2/10/2012	4:20:17 PM	PH3 MFC set to  0.000000
2/10/2012	4:20:17 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:20:17 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:20:18 PM	Tube furnace set to 200
2/10/2012	4:20:48 PM	Helium valve closed
2/10/2012	4:20:48 PM	H2 valve closed
2/10/2012	4:20:48 PM	BCl3 valve closed
2/10/2012	4:20:48 PM	PH3 valve closed
2/10/2012	4:20:48 PM	SiCl4 pre valve closed
2/10/2012	4:20:48 PM	SiCl4 post valve closed
2/10/2012	4:20:48 PM	Bypass valve closed
2/10/2012	4:20:48 PM	Bubbler valve closed
2/10/2012	4:20:48 PM	Main Vac valve opened
2/10/2012	4:20:48 PM	Helium MFC set to  0.000000
2/10/2012	4:20:48 PM	H2 MFC set to  0.000000
2/10/2012	4:20:48 PM	BCl3 MFC set to  0.000000
2/10/2012	4:20:48 PM	PH3 MFC set to  0.000000
2/10/2012	4:20:48 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:20:48 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:20:48 PM	Tube furnace set to 200
2/10/2012	4:21:18 PM	H2 valve closed
2/10/2012	4:21:18 PM	BCl3 valve closed
2/10/2012	4:21:18 PM	PH3 valve closed
2/10/2012	4:21:18 PM	SiCl4 pre valve closed
2/10/2012	4:21:18 PM	SiCl4 post valve closed
2/10/2012	4:21:18 PM	Bypass valve closed
2/10/2012	4:21:18 PM	Bubbler valve closed
2/10/2012	4:21:18 PM	Helium valve opened
2/10/2012	4:21:18 PM	Main Vac valve opened
2/10/2012	4:21:18 PM	Helium MFC set to  20.000000
2/10/2012	4:21:18 PM	H2 MFC set to  0.000000
2/10/2012	4:21:18 PM	BCl3 MFC set to  0.000000
2/10/2012	4:21:18 PM	PH3 MFC set to  0.000000
2/10/2012	4:21:18 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:21:18 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:21:18 PM	Tube furnace set to 200
2/10/2012	4:21:48 PM	Helium valve closed
2/10/2012	4:21:48 PM	H2 valve closed
2/10/2012	4:21:48 PM	BCl3 valve closed
2/10/2012	4:21:48 PM	PH3 valve closed
2/10/2012	4:21:48 PM	SiCl4 pre valve closed
2/10/2012	4:21:48 PM	SiCl4 post valve closed
2/10/2012	4:21:48 PM	Bypass valve closed
2/10/2012	4:21:48 PM	Bubbler valve closed
2/10/2012	4:21:48 PM	Main Vac valve opened
2/10/2012	4:21:48 PM	Helium MFC set to  0.000000
2/10/2012	4:21:48 PM	H2 MFC set to  0.000000
2/10/2012	4:21:48 PM	BCl3 MFC set to  0.000000
2/10/2012	4:21:48 PM	PH3 MFC set to  0.000000
2/10/2012	4:21:48 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:21:48 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:21:48 PM	Tube furnace set to 200
2/10/2012	4:22:18 PM	H2 valve closed
2/10/2012	4:22:18 PM	BCl3 valve closed
2/10/2012	4:22:18 PM	PH3 valve closed
2/10/2012	4:22:18 PM	SiCl4 pre valve closed
2/10/2012	4:22:18 PM	SiCl4 post valve closed
2/10/2012	4:22:18 PM	Bypass valve closed
2/10/2012	4:22:18 PM	Bubbler valve closed
2/10/2012	4:22:18 PM	Helium valve opened
2/10/2012	4:22:18 PM	Main Vac valve opened
2/10/2012	4:22:18 PM	Helium MFC set to  20.000000
2/10/2012	4:22:18 PM	H2 MFC set to  0.000000
2/10/2012	4:22:18 PM	BCl3 MFC set to  0.000000
2/10/2012	4:22:18 PM	PH3 MFC set to  0.000000
2/10/2012	4:22:18 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:22:18 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:22:18 PM	Tube furnace set to 200
2/10/2012	4:22:48 PM	Helium valve closed
2/10/2012	4:22:48 PM	H2 valve closed
2/10/2012	4:22:48 PM	BCl3 valve closed
2/10/2012	4:22:48 PM	PH3 valve closed
2/10/2012	4:22:48 PM	SiCl4 pre valve closed
2/10/2012	4:22:48 PM	SiCl4 post valve closed
2/10/2012	4:22:48 PM	Bypass valve closed
2/10/2012	4:22:48 PM	Bubbler valve closed
2/10/2012	4:22:49 PM	Main Vac valve opened
2/10/2012	4:22:49 PM	Helium MFC set to  0.000000
2/10/2012	4:22:49 PM	H2 MFC set to  0.000000
2/10/2012	4:22:49 PM	BCl3 MFC set to  0.000000
2/10/2012	4:22:49 PM	PH3 MFC set to  0.000000
2/10/2012	4:22:49 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:22:49 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:22:49 PM	Tube furnace set to 200
2/10/2012	4:23:19 PM	H2 valve closed
2/10/2012	4:23:19 PM	BCl3 valve closed
2/10/2012	4:23:19 PM	PH3 valve closed
2/10/2012	4:23:19 PM	SiCl4 pre valve closed
2/10/2012	4:23:19 PM	SiCl4 post valve closed
2/10/2012	4:23:19 PM	Bypass valve closed
2/10/2012	4:23:19 PM	Bubbler valve closed
2/10/2012	4:23:19 PM	Helium valve opened
2/10/2012	4:23:19 PM	Main Vac valve opened
2/10/2012	4:23:19 PM	Helium MFC set to  20.000000
2/10/2012	4:23:19 PM	H2 MFC set to  0.000000
2/10/2012	4:23:19 PM	BCl3 MFC set to  0.000000
2/10/2012	4:23:19 PM	PH3 MFC set to  0.000000
2/10/2012	4:23:19 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:23:19 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:23:19 PM	Tube furnace set to 200
2/10/2012	4:23:49 PM	Helium valve closed
2/10/2012	4:23:49 PM	H2 valve closed
2/10/2012	4:23:49 PM	BCl3 valve closed
2/10/2012	4:23:49 PM	PH3 valve closed
2/10/2012	4:23:49 PM	SiCl4 pre valve closed
2/10/2012	4:23:49 PM	SiCl4 post valve closed
2/10/2012	4:23:49 PM	Bypass valve closed
2/10/2012	4:23:49 PM	Bubbler valve closed
2/10/2012	4:23:49 PM	Main Vac valve opened
2/10/2012	4:23:49 PM	Helium MFC set to  0.000000
2/10/2012	4:23:49 PM	H2 MFC set to  0.000000
2/10/2012	4:23:49 PM	BCl3 MFC set to  0.000000
2/10/2012	4:23:49 PM	PH3 MFC set to  0.000000
2/10/2012	4:23:49 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:23:49 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:23:49 PM	Tube furnace set to 0
2/10/2012	4:23:50 PM	Run finished at 4:23 PM
2/10/2012	4:29:48 PM	Main Vac valve closed
2/10/2012	4:30:07 PM	Main Vac valve opened
2/10/2012	4:32:22 PM	Recipe started at 4:32 PM
2/10/2012	4:32:22 PM	Helium valve closed
2/10/2012	4:32:22 PM	H2 valve closed
2/10/2012	4:32:22 PM	BCl3 valve closed
2/10/2012	4:32:22 PM	PH3 valve closed
2/10/2012	4:32:22 PM	SiCl4 pre valve closed
2/10/2012	4:32:22 PM	SiCl4 post valve closed
2/10/2012	4:32:22 PM	Main Vac valve closed
2/10/2012	4:32:22 PM	Bypass valve closed
2/10/2012	4:32:22 PM	Bubbler valve closed
2/10/2012	4:32:22 PM	Helium MFC set to  0.000000
2/10/2012	4:32:22 PM	H2 MFC set to  0.000000
2/10/2012	4:32:22 PM	BCl3 MFC set to  0.000000
2/10/2012	4:32:22 PM	PH3 MFC set to  0.000000
2/10/2012	4:32:22 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:32:22 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:32:22 PM	Tube furnace set to 0
2/10/2012	4:32:25 PM	Helium valve closed
2/10/2012	4:32:25 PM	BCl3 valve closed
2/10/2012	4:32:25 PM	PH3 valve closed
2/10/2012	4:32:25 PM	SiCl4 pre valve closed
2/10/2012	4:32:25 PM	SiCl4 post valve closed
2/10/2012	4:32:25 PM	Main Vac valve closed
2/10/2012	4:32:25 PM	Bypass valve closed
2/10/2012	4:32:25 PM	Bubbler valve closed
2/10/2012	4:32:25 PM	H2 valve opened
2/10/2012	4:32:25 PM	Helium MFC set to  0.000000
2/10/2012	4:32:25 PM	H2 MFC set to  500.000000
2/10/2012	4:32:25 PM	BCl3 MFC set to  0.000000
2/10/2012	4:32:25 PM	PH3 MFC set to  0.000000
2/10/2012	4:32:25 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:32:25 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:32:25 PM	Tube furnace set to 0
2/10/2012	4:33:29 PM	Helium valve closed
2/10/2012	4:33:29 PM	BCl3 valve closed
2/10/2012	4:33:29 PM	PH3 valve closed
2/10/2012	4:33:29 PM	SiCl4 pre valve closed
2/10/2012	4:33:29 PM	SiCl4 post valve closed
2/10/2012	4:33:29 PM	Main Vac valve closed
2/10/2012	4:33:29 PM	Bypass valve closed
2/10/2012	4:33:29 PM	H2 valve opened
2/10/2012	4:33:29 PM	Bubbler valve opened
2/10/2012	4:33:29 PM	Helium MFC set to  0.000000
2/10/2012	4:33:29 PM	H2 MFC set to  500.000000
2/10/2012	4:33:29 PM	BCl3 MFC set to  0.000000
2/10/2012	4:33:29 PM	PH3 MFC set to  0.000000
2/10/2012	4:33:29 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:33:29 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:33:29 PM	Tube furnace set to 0
2/10/2012	4:33:30 PM	Helium valve closed
2/10/2012	4:33:30 PM	BCl3 valve closed
2/10/2012	4:33:30 PM	PH3 valve closed
2/10/2012	4:33:30 PM	SiCl4 pre valve closed
2/10/2012	4:33:30 PM	SiCl4 post valve closed
2/10/2012	4:33:30 PM	Main Vac valve closed
2/10/2012	4:33:30 PM	Bypass valve closed
2/10/2012	4:33:30 PM	H2 valve opened
2/10/2012	4:33:30 PM	Bubbler valve opened
2/10/2012	4:33:30 PM	Helium MFC set to  0.000000
2/10/2012	4:33:30 PM	H2 MFC set to  500.000000
2/10/2012	4:33:30 PM	BCl3 MFC set to  0.000000
2/10/2012	4:33:30 PM	PH3 MFC set to  0.000000
2/10/2012	4:33:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	4:33:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:33:30 PM	Tube furnace set to 1000
2/10/2012	4:53:30 PM	Helium valve closed
2/10/2012	4:53:30 PM	BCl3 valve closed
2/10/2012	4:53:30 PM	PH3 valve closed
2/10/2012	4:53:30 PM	Main Vac valve closed
2/10/2012	4:53:30 PM	Bypass valve closed
2/10/2012	4:53:30 PM	H2 valve opened
2/10/2012	4:53:30 PM	SiCl4 pre valve opened
2/10/2012	4:53:30 PM	SiCl4 post valve opened
2/10/2012	4:53:30 PM	Bubbler valve opened
2/10/2012	4:53:30 PM	Helium MFC set to  0.000000
2/10/2012	4:53:30 PM	H2 MFC set to  500.000000
2/10/2012	4:53:30 PM	BCl3 MFC set to  0.000000
2/10/2012	4:53:30 PM	PH3 MFC set to  0.000000
2/10/2012	4:53:30 PM	SiCl4 MFC set to  25.000000
2/10/2012	4:53:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	4:53:30 PM	Tube furnace set to 1000
2/10/2012	5:18:30 PM	Helium valve closed
2/10/2012	5:18:30 PM	BCl3 valve closed
2/10/2012	5:18:30 PM	PH3 valve closed
2/10/2012	5:18:30 PM	SiCl4 pre valve closed
2/10/2012	5:18:30 PM	SiCl4 post valve closed
2/10/2012	5:18:30 PM	Main Vac valve closed
2/10/2012	5:18:30 PM	Bypass valve closed
2/10/2012	5:18:30 PM	H2 valve opened
2/10/2012	5:18:30 PM	Bubbler valve opened
2/10/2012	5:18:30 PM	Helium MFC set to  0.000000
2/10/2012	5:18:30 PM	H2 MFC set to  500.000000
2/10/2012	5:18:30 PM	BCl3 MFC set to  0.000000
2/10/2012	5:18:30 PM	PH3 MFC set to  0.000000
2/10/2012	5:18:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:18:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:18:30 PM	Tube furnace set to 950
2/10/2012	5:20:30 PM	Helium valve closed
2/10/2012	5:20:30 PM	BCl3 valve closed
2/10/2012	5:20:30 PM	PH3 valve closed
2/10/2012	5:20:30 PM	SiCl4 pre valve closed
2/10/2012	5:20:30 PM	SiCl4 post valve closed
2/10/2012	5:20:30 PM	Main Vac valve closed
2/10/2012	5:20:30 PM	Bypass valve closed
2/10/2012	5:20:30 PM	H2 valve opened
2/10/2012	5:20:30 PM	Bubbler valve opened
2/10/2012	5:20:30 PM	Helium MFC set to  0.000000
2/10/2012	5:20:30 PM	H2 MFC set to  500.000000
2/10/2012	5:20:30 PM	BCl3 MFC set to  0.000000
2/10/2012	5:20:30 PM	PH3 MFC set to  0.000000
2/10/2012	5:20:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:20:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:20:31 PM	Tube furnace set to 900
2/10/2012	5:22:31 PM	Helium valve closed
2/10/2012	5:22:31 PM	BCl3 valve closed
2/10/2012	5:22:31 PM	PH3 valve closed
2/10/2012	5:22:31 PM	SiCl4 pre valve closed
2/10/2012	5:22:31 PM	SiCl4 post valve closed
2/10/2012	5:22:31 PM	Main Vac valve closed
2/10/2012	5:22:31 PM	Bypass valve closed
2/10/2012	5:22:31 PM	H2 valve opened
2/10/2012	5:22:31 PM	Bubbler valve opened
2/10/2012	5:22:31 PM	Helium MFC set to  0.000000
2/10/2012	5:22:31 PM	H2 MFC set to  500.000000
2/10/2012	5:22:31 PM	BCl3 MFC set to  0.000000
2/10/2012	5:22:31 PM	PH3 MFC set to  0.000000
2/10/2012	5:22:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:22:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:22:31 PM	Tube furnace set to 850
2/10/2012	5:24:31 PM	H2 valve closed
2/10/2012	5:24:31 PM	BCl3 valve closed
2/10/2012	5:24:31 PM	PH3 valve closed
2/10/2012	5:24:31 PM	SiCl4 pre valve closed
2/10/2012	5:24:31 PM	SiCl4 post valve closed
2/10/2012	5:24:31 PM	Main Vac valve closed
2/10/2012	5:24:31 PM	Bypass valve closed
2/10/2012	5:24:31 PM	Helium valve opened
2/10/2012	5:24:31 PM	Bubbler valve opened
2/10/2012	5:24:31 PM	Helium MFC set to  500.000000
2/10/2012	5:24:31 PM	H2 MFC set to  0.000000
2/10/2012	5:24:31 PM	BCl3 MFC set to  0.000000
2/10/2012	5:24:31 PM	PH3 MFC set to  0.000000
2/10/2012	5:24:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:24:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:24:31 PM	Tube furnace set to 800
2/10/2012	5:26:31 PM	H2 valve closed
2/10/2012	5:26:31 PM	BCl3 valve closed
2/10/2012	5:26:31 PM	PH3 valve closed
2/10/2012	5:26:31 PM	SiCl4 pre valve closed
2/10/2012	5:26:31 PM	SiCl4 post valve closed
2/10/2012	5:26:31 PM	Main Vac valve closed
2/10/2012	5:26:31 PM	Bypass valve closed
2/10/2012	5:26:31 PM	Helium valve opened
2/10/2012	5:26:31 PM	Bubbler valve opened
2/10/2012	5:26:31 PM	Helium MFC set to  500.000000
2/10/2012	5:26:31 PM	H2 MFC set to  0.000000
2/10/2012	5:26:31 PM	BCl3 MFC set to  0.000000
2/10/2012	5:26:31 PM	PH3 MFC set to  0.000000
2/10/2012	5:26:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:26:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:26:31 PM	Tube furnace set to 750
2/10/2012	5:28:31 PM	H2 valve closed
2/10/2012	5:28:31 PM	BCl3 valve closed
2/10/2012	5:28:31 PM	PH3 valve closed
2/10/2012	5:28:31 PM	SiCl4 pre valve closed
2/10/2012	5:28:31 PM	SiCl4 post valve closed
2/10/2012	5:28:31 PM	Main Vac valve closed
2/10/2012	5:28:31 PM	Bypass valve closed
2/10/2012	5:28:31 PM	Helium valve opened
2/10/2012	5:28:31 PM	Bubbler valve opened
2/10/2012	5:28:31 PM	Helium MFC set to  500.000000
2/10/2012	5:28:31 PM	H2 MFC set to  0.000000
2/10/2012	5:28:31 PM	BCl3 MFC set to  0.000000
2/10/2012	5:28:31 PM	PH3 MFC set to  0.000000
2/10/2012	5:28:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:28:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:28:31 PM	Tube furnace set to 0
2/10/2012	5:48:31 PM	Helium valve closed
2/10/2012	5:48:31 PM	H2 valve closed
2/10/2012	5:48:31 PM	BCl3 valve closed
2/10/2012	5:48:31 PM	PH3 valve closed
2/10/2012	5:48:31 PM	SiCl4 pre valve closed
2/10/2012	5:48:31 PM	SiCl4 post valve closed
2/10/2012	5:48:31 PM	Main Vac valve closed
2/10/2012	5:48:31 PM	Bypass valve closed
2/10/2012	5:48:31 PM	Bubbler valve closed
2/10/2012	5:48:31 PM	Helium MFC set to  0.000000
2/10/2012	5:48:31 PM	H2 MFC set to  0.000000
2/10/2012	5:48:31 PM	BCl3 MFC set to  0.000000
2/10/2012	5:48:31 PM	PH3 MFC set to  0.000000
2/10/2012	5:48:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:48:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:48:32 PM	Tube furnace set to 0
2/10/2012	5:48:33 PM	Run finished at 5:48 PM
2/10/2012	5:55:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2012	5:55:19 PM	Recipe started at 5:55 PM
2/10/2012	5:55:19 PM	Helium valve closed
2/10/2012	5:55:19 PM	H2 valve closed
2/10/2012	5:55:19 PM	BCl3 valve closed
2/10/2012	5:55:19 PM	PH3 valve closed
2/10/2012	5:55:19 PM	SiCl4 pre valve closed
2/10/2012	5:55:19 PM	SiCl4 post valve closed
2/10/2012	5:55:19 PM	Main Vac valve closed
2/10/2012	5:55:19 PM	Bypass valve closed
2/10/2012	5:55:19 PM	Bubbler valve closed
2/10/2012	5:55:19 PM	Helium MFC set to  0.000000
2/10/2012	5:55:19 PM	H2 MFC set to  0.000000
2/10/2012	5:55:19 PM	BCl3 MFC set to  0.000000
2/10/2012	5:55:19 PM	PH3 MFC set to  0.000000
2/10/2012	5:55:19 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:55:19 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:55:19 PM	Tube furnace set to 0
2/10/2012	5:55:22 PM	H2 valve closed
2/10/2012	5:55:22 PM	BCl3 valve closed
2/10/2012	5:55:22 PM	PH3 valve closed
2/10/2012	5:55:22 PM	SiCl4 pre valve closed
2/10/2012	5:55:22 PM	SiCl4 post valve closed
2/10/2012	5:55:22 PM	Main Vac valve closed
2/10/2012	5:55:22 PM	Bypass valve closed
2/10/2012	5:55:22 PM	Bubbler valve closed
2/10/2012	5:55:22 PM	Helium valve opened
2/10/2012	5:55:22 PM	Helium MFC set to  500.000000
2/10/2012	5:55:22 PM	H2 MFC set to  0.000000
2/10/2012	5:55:22 PM	BCl3 MFC set to  0.000000
2/10/2012	5:55:22 PM	PH3 MFC set to  0.000000
2/10/2012	5:55:22 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:55:22 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:55:22 PM	Tube furnace set to 0
2/10/2012	5:55:24 PM	Helium valve closed
2/10/2012	5:55:24 PM	H2 valve closed
2/10/2012	5:55:24 PM	BCl3 valve closed
2/10/2012	5:55:24 PM	PH3 valve closed
2/10/2012	5:55:24 PM	SiCl4 pre valve closed
2/10/2012	5:55:24 PM	SiCl4 post valve closed
2/10/2012	5:55:24 PM	Main Vac valve closed
2/10/2012	5:55:24 PM	Bypass valve closed
2/10/2012	5:55:24 PM	Bubbler valve closed
2/10/2012	5:55:24 PM	Helium MFC set to  0.000000
2/10/2012	5:55:24 PM	H2 MFC set to  0.000000
2/10/2012	5:55:24 PM	BCl3 MFC set to  0.000000
2/10/2012	5:55:24 PM	PH3 MFC set to  0.000000
2/10/2012	5:55:24 PM	SiCl4 MFC set to  0.000000
2/10/2012	5:55:24 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	5:55:24 PM	Tube furnace set to 0
2/10/2012	5:55:25 PM	Run finished at 5:55 PM
2/10/2012	5:55:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2012	6:16:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	6:16:48 PM	Recipe started at 6:16 PM
2/10/2012	6:16:48 PM	Helium valve closed
2/10/2012	6:16:48 PM	H2 valve closed
2/10/2012	6:16:48 PM	BCl3 valve closed
2/10/2012	6:16:48 PM	PH3 valve closed
2/10/2012	6:16:48 PM	SiCl4 pre valve closed
2/10/2012	6:16:48 PM	SiCl4 post valve closed
2/10/2012	6:16:48 PM	Main Vac valve closed
2/10/2012	6:16:48 PM	Bubbler valve closed
2/10/2012	6:16:48 PM	Bypass valve opened
2/10/2012	6:16:48 PM	Helium MFC set to  0.000000
2/10/2012	6:16:48 PM	H2 MFC set to  0.000000
2/10/2012	6:16:48 PM	BCl3 MFC set to  0.000000
2/10/2012	6:16:48 PM	PH3 MFC set to  0.000000
2/10/2012	6:16:48 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:16:48 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:16:48 PM	Tube furnace set to 0
2/10/2012	6:17:53 PM	Helium valve closed
2/10/2012	6:17:53 PM	H2 valve closed
2/10/2012	6:17:53 PM	BCl3 valve closed
2/10/2012	6:17:53 PM	PH3 valve closed
2/10/2012	6:17:53 PM	SiCl4 pre valve closed
2/10/2012	6:17:53 PM	SiCl4 post valve closed
2/10/2012	6:17:53 PM	Main Vac valve closed
2/10/2012	6:17:53 PM	Bubbler valve closed
2/10/2012	6:17:53 PM	Bypass valve opened
2/10/2012	6:17:53 PM	Helium MFC set to  0.000000
2/10/2012	6:17:53 PM	H2 MFC set to  0.000000
2/10/2012	6:17:53 PM	BCl3 MFC set to  0.000000
2/10/2012	6:17:53 PM	PH3 MFC set to  0.000000
2/10/2012	6:17:53 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:17:53 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:17:53 PM	Tube furnace set to 0
2/10/2012	6:18:53 PM	Helium valve closed
2/10/2012	6:18:53 PM	H2 valve closed
2/10/2012	6:18:53 PM	BCl3 valve closed
2/10/2012	6:18:53 PM	PH3 valve closed
2/10/2012	6:18:53 PM	SiCl4 pre valve closed
2/10/2012	6:18:53 PM	SiCl4 post valve closed
2/10/2012	6:18:53 PM	Bypass valve closed
2/10/2012	6:18:53 PM	Bubbler valve closed
2/10/2012	6:18:53 PM	Main Vac valve opened
2/10/2012	6:18:53 PM	Helium MFC set to  0.000000
2/10/2012	6:18:53 PM	H2 MFC set to  0.000000
2/10/2012	6:18:53 PM	BCl3 MFC set to  0.000000
2/10/2012	6:18:53 PM	PH3 MFC set to  0.000000
2/10/2012	6:18:53 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:18:53 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:18:53 PM	Tube furnace set to 0
2/10/2012	6:18:54 PM	Run finished at 6:18 PM
2/10/2012	6:18:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	6:26:51 PM	Main Vac valve closed
2/10/2012	6:26:56 PM	Main Vac valve opened
2/10/2012	6:27:28 PM	Recipe started at 6:27 PM
2/10/2012	6:27:28 PM	Helium valve closed
2/10/2012	6:27:28 PM	H2 valve closed
2/10/2012	6:27:28 PM	BCl3 valve closed
2/10/2012	6:27:28 PM	PH3 valve closed
2/10/2012	6:27:28 PM	SiCl4 pre valve closed
2/10/2012	6:27:28 PM	SiCl4 post valve closed
2/10/2012	6:27:28 PM	Bypass valve closed
2/10/2012	6:27:28 PM	Bubbler valve closed
2/10/2012	6:27:28 PM	Main Vac valve opened
2/10/2012	6:27:28 PM	Helium MFC set to  0.000000
2/10/2012	6:27:28 PM	H2 MFC set to  0.000000
2/10/2012	6:27:28 PM	BCl3 MFC set to  0.000000
2/10/2012	6:27:28 PM	PH3 MFC set to  0.000000
2/10/2012	6:27:28 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:27:28 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:27:28 PM	Tube furnace set to 0
2/10/2012	6:27:58 PM	H2 valve closed
2/10/2012	6:27:58 PM	BCl3 valve closed
2/10/2012	6:27:58 PM	PH3 valve closed
2/10/2012	6:27:58 PM	SiCl4 pre valve closed
2/10/2012	6:27:58 PM	SiCl4 post valve closed
2/10/2012	6:27:58 PM	Bypass valve closed
2/10/2012	6:27:58 PM	Bubbler valve closed
2/10/2012	6:27:58 PM	Helium valve opened
2/10/2012	6:27:58 PM	Main Vac valve opened
2/10/2012	6:27:58 PM	Helium MFC set to  20.000000
2/10/2012	6:27:58 PM	H2 MFC set to  0.000000
2/10/2012	6:27:58 PM	BCl3 MFC set to  0.000000
2/10/2012	6:27:58 PM	PH3 MFC set to  0.000000
2/10/2012	6:27:58 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:27:58 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:27:58 PM	Tube furnace set to 0
2/10/2012	6:28:28 PM	Helium valve closed
2/10/2012	6:28:28 PM	H2 valve closed
2/10/2012	6:28:28 PM	BCl3 valve closed
2/10/2012	6:28:28 PM	PH3 valve closed
2/10/2012	6:28:28 PM	SiCl4 pre valve closed
2/10/2012	6:28:28 PM	SiCl4 post valve closed
2/10/2012	6:28:28 PM	Bypass valve closed
2/10/2012	6:28:28 PM	Bubbler valve closed
2/10/2012	6:28:28 PM	Main Vac valve opened
2/10/2012	6:28:28 PM	Helium MFC set to  0.000000
2/10/2012	6:28:28 PM	H2 MFC set to  0.000000
2/10/2012	6:28:28 PM	BCl3 MFC set to  0.000000
2/10/2012	6:28:28 PM	PH3 MFC set to  0.000000
2/10/2012	6:28:28 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:28:28 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:28:28 PM	Tube furnace set to 0
2/10/2012	6:28:58 PM	H2 valve closed
2/10/2012	6:28:58 PM	BCl3 valve closed
2/10/2012	6:28:58 PM	PH3 valve closed
2/10/2012	6:28:58 PM	SiCl4 pre valve closed
2/10/2012	6:28:59 PM	SiCl4 post valve closed
2/10/2012	6:28:59 PM	Bypass valve closed
2/10/2012	6:28:59 PM	Bubbler valve closed
2/10/2012	6:28:59 PM	Helium valve opened
2/10/2012	6:28:59 PM	Main Vac valve opened
2/10/2012	6:28:59 PM	Helium MFC set to  20.000000
2/10/2012	6:28:59 PM	H2 MFC set to  0.000000
2/10/2012	6:28:59 PM	BCl3 MFC set to  0.000000
2/10/2012	6:28:59 PM	PH3 MFC set to  0.000000
2/10/2012	6:28:59 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:28:59 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:28:59 PM	Tube furnace set to 0
2/10/2012	6:29:29 PM	Helium valve closed
2/10/2012	6:29:29 PM	H2 valve closed
2/10/2012	6:29:29 PM	BCl3 valve closed
2/10/2012	6:29:29 PM	PH3 valve closed
2/10/2012	6:29:29 PM	SiCl4 pre valve closed
2/10/2012	6:29:29 PM	SiCl4 post valve closed
2/10/2012	6:29:29 PM	Bypass valve closed
2/10/2012	6:29:29 PM	Bubbler valve closed
2/10/2012	6:29:29 PM	Main Vac valve opened
2/10/2012	6:29:29 PM	Helium MFC set to  0.000000
2/10/2012	6:29:29 PM	H2 MFC set to  0.000000
2/10/2012	6:29:29 PM	BCl3 MFC set to  0.000000
2/10/2012	6:29:29 PM	PH3 MFC set to  0.000000
2/10/2012	6:29:29 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:29:29 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:29:29 PM	Tube furnace set to 0
2/10/2012	6:29:59 PM	H2 valve closed
2/10/2012	6:29:59 PM	BCl3 valve closed
2/10/2012	6:29:59 PM	PH3 valve closed
2/10/2012	6:29:59 PM	SiCl4 pre valve closed
2/10/2012	6:29:59 PM	SiCl4 post valve closed
2/10/2012	6:29:59 PM	Bypass valve closed
2/10/2012	6:29:59 PM	Bubbler valve closed
2/10/2012	6:29:59 PM	Helium valve opened
2/10/2012	6:29:59 PM	Main Vac valve opened
2/10/2012	6:29:59 PM	Helium MFC set to  20.000000
2/10/2012	6:29:59 PM	H2 MFC set to  0.000000
2/10/2012	6:29:59 PM	BCl3 MFC set to  0.000000
2/10/2012	6:29:59 PM	PH3 MFC set to  0.000000
2/10/2012	6:29:59 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:29:59 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:29:59 PM	Tube furnace set to 0
2/10/2012	6:30:29 PM	Helium valve closed
2/10/2012	6:30:29 PM	H2 valve closed
2/10/2012	6:30:29 PM	BCl3 valve closed
2/10/2012	6:30:29 PM	PH3 valve closed
2/10/2012	6:30:29 PM	SiCl4 pre valve closed
2/10/2012	6:30:29 PM	SiCl4 post valve closed
2/10/2012	6:30:29 PM	Bypass valve closed
2/10/2012	6:30:29 PM	Bubbler valve closed
2/10/2012	6:30:29 PM	Main Vac valve opened
2/10/2012	6:30:29 PM	Helium MFC set to  0.000000
2/10/2012	6:30:29 PM	H2 MFC set to  0.000000
2/10/2012	6:30:29 PM	BCl3 MFC set to  0.000000
2/10/2012	6:30:29 PM	PH3 MFC set to  0.000000
2/10/2012	6:30:29 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:30:29 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:30:29 PM	Tube furnace set to 0
2/10/2012	6:30:59 PM	H2 valve closed
2/10/2012	6:30:59 PM	BCl3 valve closed
2/10/2012	6:30:59 PM	PH3 valve closed
2/10/2012	6:30:59 PM	SiCl4 pre valve closed
2/10/2012	6:30:59 PM	SiCl4 post valve closed
2/10/2012	6:30:59 PM	Bypass valve closed
2/10/2012	6:30:59 PM	Bubbler valve closed
2/10/2012	6:30:59 PM	Helium valve opened
2/10/2012	6:30:59 PM	Main Vac valve opened
2/10/2012	6:30:59 PM	Helium MFC set to  20.000000
2/10/2012	6:30:59 PM	H2 MFC set to  0.000000
2/10/2012	6:30:59 PM	BCl3 MFC set to  0.000000
2/10/2012	6:30:59 PM	PH3 MFC set to  0.000000
2/10/2012	6:30:59 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:30:59 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:30:59 PM	Tube furnace set to 0
2/10/2012	6:31:30 PM	Helium valve closed
2/10/2012	6:31:30 PM	H2 valve closed
2/10/2012	6:31:30 PM	BCl3 valve closed
2/10/2012	6:31:30 PM	PH3 valve closed
2/10/2012	6:31:30 PM	SiCl4 pre valve closed
2/10/2012	6:31:30 PM	SiCl4 post valve closed
2/10/2012	6:31:30 PM	Bypass valve closed
2/10/2012	6:31:30 PM	Bubbler valve closed
2/10/2012	6:31:30 PM	Main Vac valve opened
2/10/2012	6:31:30 PM	Helium MFC set to  0.000000
2/10/2012	6:31:30 PM	H2 MFC set to  0.000000
2/10/2012	6:31:30 PM	BCl3 MFC set to  0.000000
2/10/2012	6:31:30 PM	PH3 MFC set to  0.000000
2/10/2012	6:31:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:31:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:31:30 PM	Tube furnace set to 0
2/10/2012	6:32:00 PM	H2 valve closed
2/10/2012	6:32:00 PM	BCl3 valve closed
2/10/2012	6:32:00 PM	PH3 valve closed
2/10/2012	6:32:00 PM	SiCl4 pre valve closed
2/10/2012	6:32:00 PM	SiCl4 post valve closed
2/10/2012	6:32:00 PM	Bypass valve closed
2/10/2012	6:32:00 PM	Bubbler valve closed
2/10/2012	6:32:00 PM	Helium valve opened
2/10/2012	6:32:00 PM	Main Vac valve opened
2/10/2012	6:32:00 PM	Helium MFC set to  20.000000
2/10/2012	6:32:00 PM	H2 MFC set to  0.000000
2/10/2012	6:32:00 PM	BCl3 MFC set to  0.000000
2/10/2012	6:32:00 PM	PH3 MFC set to  0.000000
2/10/2012	6:32:00 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:32:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:32:00 PM	Tube furnace set to 0
2/10/2012	6:32:30 PM	Helium valve closed
2/10/2012	6:32:30 PM	H2 valve closed
2/10/2012	6:32:30 PM	BCl3 valve closed
2/10/2012	6:32:30 PM	PH3 valve closed
2/10/2012	6:32:30 PM	SiCl4 pre valve closed
2/10/2012	6:32:30 PM	SiCl4 post valve closed
2/10/2012	6:32:30 PM	Bypass valve closed
2/10/2012	6:32:30 PM	Bubbler valve closed
2/10/2012	6:32:30 PM	Main Vac valve opened
2/10/2012	6:32:30 PM	Helium MFC set to  0.000000
2/10/2012	6:32:30 PM	H2 MFC set to  0.000000
2/10/2012	6:32:30 PM	BCl3 MFC set to  0.000000
2/10/2012	6:32:30 PM	PH3 MFC set to  0.000000
2/10/2012	6:32:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:32:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:32:30 PM	Tube furnace set to 0
2/10/2012	6:33:00 PM	H2 valve closed
2/10/2012	6:33:00 PM	BCl3 valve closed
2/10/2012	6:33:00 PM	PH3 valve closed
2/10/2012	6:33:00 PM	SiCl4 pre valve closed
2/10/2012	6:33:00 PM	SiCl4 post valve closed
2/10/2012	6:33:00 PM	Bypass valve closed
2/10/2012	6:33:00 PM	Bubbler valve closed
2/10/2012	6:33:00 PM	Helium valve opened
2/10/2012	6:33:00 PM	Main Vac valve opened
2/10/2012	6:33:00 PM	Helium MFC set to  20.000000
2/10/2012	6:33:00 PM	H2 MFC set to  0.000000
2/10/2012	6:33:00 PM	BCl3 MFC set to  0.000000
2/10/2012	6:33:00 PM	PH3 MFC set to  0.000000
2/10/2012	6:33:00 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:33:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:33:00 PM	Tube furnace set to 0
2/10/2012	6:33:30 PM	Helium valve closed
2/10/2012	6:33:30 PM	H2 valve closed
2/10/2012	6:33:30 PM	BCl3 valve closed
2/10/2012	6:33:30 PM	PH3 valve closed
2/10/2012	6:33:30 PM	SiCl4 pre valve closed
2/10/2012	6:33:30 PM	SiCl4 post valve closed
2/10/2012	6:33:30 PM	Bypass valve closed
2/10/2012	6:33:30 PM	Bubbler valve closed
2/10/2012	6:33:30 PM	Main Vac valve opened
2/10/2012	6:33:30 PM	Helium MFC set to  0.000000
2/10/2012	6:33:30 PM	H2 MFC set to  0.000000
2/10/2012	6:33:30 PM	BCl3 MFC set to  0.000000
2/10/2012	6:33:30 PM	PH3 MFC set to  0.000000
2/10/2012	6:33:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:33:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:33:31 PM	Tube furnace set to 0
2/10/2012	6:34:01 PM	H2 valve closed
2/10/2012	6:34:01 PM	BCl3 valve closed
2/10/2012	6:34:01 PM	PH3 valve closed
2/10/2012	6:34:01 PM	SiCl4 pre valve closed
2/10/2012	6:34:01 PM	SiCl4 post valve closed
2/10/2012	6:34:01 PM	Bypass valve closed
2/10/2012	6:34:01 PM	Bubbler valve closed
2/10/2012	6:34:01 PM	Helium valve opened
2/10/2012	6:34:01 PM	Main Vac valve opened
2/10/2012	6:34:01 PM	Helium MFC set to  20.000000
2/10/2012	6:34:01 PM	H2 MFC set to  0.000000
2/10/2012	6:34:01 PM	BCl3 MFC set to  0.000000
2/10/2012	6:34:01 PM	PH3 MFC set to  0.000000
2/10/2012	6:34:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:34:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:34:01 PM	Tube furnace set to 0
2/10/2012	6:34:31 PM	Helium valve closed
2/10/2012	6:34:31 PM	H2 valve closed
2/10/2012	6:34:31 PM	BCl3 valve closed
2/10/2012	6:34:31 PM	PH3 valve closed
2/10/2012	6:34:31 PM	SiCl4 pre valve closed
2/10/2012	6:34:31 PM	SiCl4 post valve closed
2/10/2012	6:34:31 PM	Bypass valve closed
2/10/2012	6:34:31 PM	Bubbler valve closed
2/10/2012	6:34:31 PM	Main Vac valve opened
2/10/2012	6:34:31 PM	Helium MFC set to  0.000000
2/10/2012	6:34:31 PM	H2 MFC set to  0.000000
2/10/2012	6:34:31 PM	BCl3 MFC set to  0.000000
2/10/2012	6:34:31 PM	PH3 MFC set to  0.000000
2/10/2012	6:34:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:34:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:34:31 PM	Tube furnace set to 0
2/10/2012	6:35:01 PM	H2 valve closed
2/10/2012	6:35:01 PM	BCl3 valve closed
2/10/2012	6:35:01 PM	PH3 valve closed
2/10/2012	6:35:01 PM	SiCl4 pre valve closed
2/10/2012	6:35:01 PM	SiCl4 post valve closed
2/10/2012	6:35:01 PM	Bypass valve closed
2/10/2012	6:35:01 PM	Bubbler valve closed
2/10/2012	6:35:01 PM	Helium valve opened
2/10/2012	6:35:01 PM	Main Vac valve opened
2/10/2012	6:35:01 PM	Helium MFC set to  20.000000
2/10/2012	6:35:01 PM	H2 MFC set to  0.000000
2/10/2012	6:35:01 PM	BCl3 MFC set to  0.000000
2/10/2012	6:35:01 PM	PH3 MFC set to  0.000000
2/10/2012	6:35:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:35:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:35:01 PM	Tube furnace set to 0
2/10/2012	6:35:31 PM	Helium valve closed
2/10/2012	6:35:31 PM	H2 valve closed
2/10/2012	6:35:31 PM	BCl3 valve closed
2/10/2012	6:35:31 PM	PH3 valve closed
2/10/2012	6:35:31 PM	SiCl4 pre valve closed
2/10/2012	6:35:31 PM	SiCl4 post valve closed
2/10/2012	6:35:31 PM	Bypass valve closed
2/10/2012	6:35:31 PM	Bubbler valve closed
2/10/2012	6:35:31 PM	Main Vac valve opened
2/10/2012	6:35:31 PM	Helium MFC set to  0.000000
2/10/2012	6:35:31 PM	H2 MFC set to  0.000000
2/10/2012	6:35:31 PM	BCl3 MFC set to  0.000000
2/10/2012	6:35:31 PM	PH3 MFC set to  0.000000
2/10/2012	6:35:31 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:35:31 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:35:31 PM	Tube furnace set to 0
2/10/2012	6:36:01 PM	H2 valve closed
2/10/2012	6:36:01 PM	BCl3 valve closed
2/10/2012	6:36:01 PM	PH3 valve closed
2/10/2012	6:36:01 PM	SiCl4 pre valve closed
2/10/2012	6:36:01 PM	SiCl4 post valve closed
2/10/2012	6:36:01 PM	Bypass valve closed
2/10/2012	6:36:01 PM	Bubbler valve closed
2/10/2012	6:36:01 PM	Helium valve opened
2/10/2012	6:36:01 PM	Main Vac valve opened
2/10/2012	6:36:01 PM	Helium MFC set to  20.000000
2/10/2012	6:36:01 PM	H2 MFC set to  0.000000
2/10/2012	6:36:01 PM	BCl3 MFC set to  0.000000
2/10/2012	6:36:01 PM	PH3 MFC set to  0.000000
2/10/2012	6:36:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:36:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:36:02 PM	Tube furnace set to 0
2/10/2012	6:36:32 PM	Helium valve closed
2/10/2012	6:36:32 PM	H2 valve closed
2/10/2012	6:36:32 PM	BCl3 valve closed
2/10/2012	6:36:32 PM	PH3 valve closed
2/10/2012	6:36:32 PM	SiCl4 pre valve closed
2/10/2012	6:36:32 PM	SiCl4 post valve closed
2/10/2012	6:36:32 PM	Bypass valve closed
2/10/2012	6:36:32 PM	Bubbler valve closed
2/10/2012	6:36:32 PM	Main Vac valve opened
2/10/2012	6:36:32 PM	Helium MFC set to  0.000000
2/10/2012	6:36:32 PM	H2 MFC set to  0.000000
2/10/2012	6:36:32 PM	BCl3 MFC set to  0.000000
2/10/2012	6:36:32 PM	PH3 MFC set to  0.000000
2/10/2012	6:36:32 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:36:32 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:36:32 PM	Tube furnace set to 200
2/10/2012	6:37:02 PM	H2 valve closed
2/10/2012	6:37:02 PM	BCl3 valve closed
2/10/2012	6:37:02 PM	PH3 valve closed
2/10/2012	6:37:02 PM	SiCl4 pre valve closed
2/10/2012	6:37:02 PM	SiCl4 post valve closed
2/10/2012	6:37:02 PM	Bypass valve closed
2/10/2012	6:37:02 PM	Bubbler valve closed
2/10/2012	6:37:02 PM	Helium valve opened
2/10/2012	6:37:02 PM	Main Vac valve opened
2/10/2012	6:37:02 PM	Helium MFC set to  20.000000
2/10/2012	6:37:02 PM	H2 MFC set to  0.000000
2/10/2012	6:37:02 PM	BCl3 MFC set to  0.000000
2/10/2012	6:37:02 PM	PH3 MFC set to  0.000000
2/10/2012	6:37:02 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:37:02 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:37:02 PM	Tube furnace set to 200
2/10/2012	6:37:32 PM	Helium valve closed
2/10/2012	6:37:32 PM	H2 valve closed
2/10/2012	6:37:32 PM	BCl3 valve closed
2/10/2012	6:37:32 PM	PH3 valve closed
2/10/2012	6:37:32 PM	SiCl4 pre valve closed
2/10/2012	6:37:32 PM	SiCl4 post valve closed
2/10/2012	6:37:32 PM	Bypass valve closed
2/10/2012	6:37:32 PM	Bubbler valve closed
2/10/2012	6:37:32 PM	Main Vac valve opened
2/10/2012	6:37:32 PM	Helium MFC set to  0.000000
2/10/2012	6:37:32 PM	H2 MFC set to  0.000000
2/10/2012	6:37:32 PM	BCl3 MFC set to  0.000000
2/10/2012	6:37:32 PM	PH3 MFC set to  0.000000
2/10/2012	6:37:32 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:37:32 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:37:32 PM	Tube furnace set to 200
2/10/2012	6:38:02 PM	H2 valve closed
2/10/2012	6:38:02 PM	BCl3 valve closed
2/10/2012	6:38:02 PM	PH3 valve closed
2/10/2012	6:38:02 PM	SiCl4 pre valve closed
2/10/2012	6:38:02 PM	SiCl4 post valve closed
2/10/2012	6:38:02 PM	Bypass valve closed
2/10/2012	6:38:02 PM	Bubbler valve closed
2/10/2012	6:38:02 PM	Helium valve opened
2/10/2012	6:38:02 PM	Main Vac valve opened
2/10/2012	6:38:02 PM	Helium MFC set to  20.000000
2/10/2012	6:38:02 PM	H2 MFC set to  0.000000
2/10/2012	6:38:02 PM	BCl3 MFC set to  0.000000
2/10/2012	6:38:02 PM	PH3 MFC set to  0.000000
2/10/2012	6:38:02 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:38:02 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:38:02 PM	Tube furnace set to 200
2/10/2012	6:38:33 PM	Helium valve closed
2/10/2012	6:38:33 PM	H2 valve closed
2/10/2012	6:38:33 PM	BCl3 valve closed
2/10/2012	6:38:33 PM	PH3 valve closed
2/10/2012	6:38:33 PM	SiCl4 pre valve closed
2/10/2012	6:38:33 PM	SiCl4 post valve closed
2/10/2012	6:38:33 PM	Bypass valve closed
2/10/2012	6:38:33 PM	Bubbler valve closed
2/10/2012	6:38:33 PM	Main Vac valve opened
2/10/2012	6:38:33 PM	Helium MFC set to  0.000000
2/10/2012	6:38:33 PM	H2 MFC set to  0.000000
2/10/2012	6:38:33 PM	BCl3 MFC set to  0.000000
2/10/2012	6:38:33 PM	PH3 MFC set to  0.000000
2/10/2012	6:38:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:38:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:38:33 PM	Tube furnace set to 200
2/10/2012	6:39:03 PM	H2 valve closed
2/10/2012	6:39:03 PM	BCl3 valve closed
2/10/2012	6:39:03 PM	PH3 valve closed
2/10/2012	6:39:03 PM	SiCl4 pre valve closed
2/10/2012	6:39:03 PM	SiCl4 post valve closed
2/10/2012	6:39:03 PM	Bypass valve closed
2/10/2012	6:39:03 PM	Bubbler valve closed
2/10/2012	6:39:03 PM	Helium valve opened
2/10/2012	6:39:03 PM	Main Vac valve opened
2/10/2012	6:39:03 PM	Helium MFC set to  20.000000
2/10/2012	6:39:03 PM	H2 MFC set to  0.000000
2/10/2012	6:39:03 PM	BCl3 MFC set to  0.000000
2/10/2012	6:39:03 PM	PH3 MFC set to  0.000000
2/10/2012	6:39:03 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:39:03 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:39:03 PM	Tube furnace set to 200
2/10/2012	6:39:33 PM	Helium valve closed
2/10/2012	6:39:33 PM	H2 valve closed
2/10/2012	6:39:33 PM	BCl3 valve closed
2/10/2012	6:39:33 PM	PH3 valve closed
2/10/2012	6:39:33 PM	SiCl4 pre valve closed
2/10/2012	6:39:33 PM	SiCl4 post valve closed
2/10/2012	6:39:33 PM	Bypass valve closed
2/10/2012	6:39:33 PM	Bubbler valve closed
2/10/2012	6:39:33 PM	Main Vac valve opened
2/10/2012	6:39:33 PM	Helium MFC set to  0.000000
2/10/2012	6:39:33 PM	H2 MFC set to  0.000000
2/10/2012	6:39:33 PM	BCl3 MFC set to  0.000000
2/10/2012	6:39:33 PM	PH3 MFC set to  0.000000
2/10/2012	6:39:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:39:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:39:33 PM	Tube furnace set to 200
2/10/2012	6:40:03 PM	H2 valve closed
2/10/2012	6:40:03 PM	BCl3 valve closed
2/10/2012	6:40:03 PM	PH3 valve closed
2/10/2012	6:40:03 PM	SiCl4 pre valve closed
2/10/2012	6:40:03 PM	SiCl4 post valve closed
2/10/2012	6:40:03 PM	Bypass valve closed
2/10/2012	6:40:03 PM	Bubbler valve closed
2/10/2012	6:40:03 PM	Helium valve opened
2/10/2012	6:40:03 PM	Main Vac valve opened
2/10/2012	6:40:03 PM	Helium MFC set to  20.000000
2/10/2012	6:40:03 PM	H2 MFC set to  0.000000
2/10/2012	6:40:03 PM	BCl3 MFC set to  0.000000
2/10/2012	6:40:03 PM	PH3 MFC set to  0.000000
2/10/2012	6:40:03 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:40:03 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:40:03 PM	Tube furnace set to 200
2/10/2012	6:40:33 PM	Helium valve closed
2/10/2012	6:40:33 PM	H2 valve closed
2/10/2012	6:40:33 PM	BCl3 valve closed
2/10/2012	6:40:33 PM	PH3 valve closed
2/10/2012	6:40:33 PM	SiCl4 pre valve closed
2/10/2012	6:40:33 PM	SiCl4 post valve closed
2/10/2012	6:40:33 PM	Bypass valve closed
2/10/2012	6:40:33 PM	Bubbler valve closed
2/10/2012	6:40:33 PM	Main Vac valve opened
2/10/2012	6:40:33 PM	Helium MFC set to  0.000000
2/10/2012	6:40:33 PM	H2 MFC set to  0.000000
2/10/2012	6:40:33 PM	BCl3 MFC set to  0.000000
2/10/2012	6:40:33 PM	PH3 MFC set to  0.000000
2/10/2012	6:40:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:40:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:40:34 PM	Tube furnace set to 200
2/10/2012	6:41:04 PM	H2 valve closed
2/10/2012	6:41:04 PM	BCl3 valve closed
2/10/2012	6:41:04 PM	PH3 valve closed
2/10/2012	6:41:04 PM	SiCl4 pre valve closed
2/10/2012	6:41:04 PM	SiCl4 post valve closed
2/10/2012	6:41:04 PM	Bypass valve closed
2/10/2012	6:41:04 PM	Bubbler valve closed
2/10/2012	6:41:04 PM	Helium valve opened
2/10/2012	6:41:04 PM	Main Vac valve opened
2/10/2012	6:41:04 PM	Helium MFC set to  20.000000
2/10/2012	6:41:04 PM	H2 MFC set to  0.000000
2/10/2012	6:41:04 PM	BCl3 MFC set to  0.000000
2/10/2012	6:41:04 PM	PH3 MFC set to  0.000000
2/10/2012	6:41:04 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:41:04 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:41:04 PM	Tube furnace set to 200
2/10/2012	6:41:34 PM	Helium valve closed
2/10/2012	6:41:34 PM	H2 valve closed
2/10/2012	6:41:34 PM	BCl3 valve closed
2/10/2012	6:41:34 PM	PH3 valve closed
2/10/2012	6:41:34 PM	SiCl4 pre valve closed
2/10/2012	6:41:34 PM	SiCl4 post valve closed
2/10/2012	6:41:34 PM	Bypass valve closed
2/10/2012	6:41:34 PM	Bubbler valve closed
2/10/2012	6:41:34 PM	Main Vac valve opened
2/10/2012	6:41:34 PM	Helium MFC set to  0.000000
2/10/2012	6:41:34 PM	H2 MFC set to  0.000000
2/10/2012	6:41:34 PM	BCl3 MFC set to  0.000000
2/10/2012	6:41:34 PM	PH3 MFC set to  0.000000
2/10/2012	6:41:34 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:41:34 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:41:34 PM	Tube furnace set to 200
2/10/2012	6:42:04 PM	H2 valve closed
2/10/2012	6:42:04 PM	BCl3 valve closed
2/10/2012	6:42:04 PM	PH3 valve closed
2/10/2012	6:42:04 PM	SiCl4 pre valve closed
2/10/2012	6:42:04 PM	SiCl4 post valve closed
2/10/2012	6:42:04 PM	Bypass valve closed
2/10/2012	6:42:04 PM	Bubbler valve closed
2/10/2012	6:42:04 PM	Helium valve opened
2/10/2012	6:42:04 PM	Main Vac valve opened
2/10/2012	6:42:04 PM	Helium MFC set to  20.000000
2/10/2012	6:42:04 PM	H2 MFC set to  0.000000
2/10/2012	6:42:04 PM	BCl3 MFC set to  0.000000
2/10/2012	6:42:04 PM	PH3 MFC set to  0.000000
2/10/2012	6:42:04 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:42:04 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:42:04 PM	Tube furnace set to 200
2/10/2012	6:42:34 PM	Helium valve closed
2/10/2012	6:42:34 PM	H2 valve closed
2/10/2012	6:42:34 PM	BCl3 valve closed
2/10/2012	6:42:34 PM	PH3 valve closed
2/10/2012	6:42:34 PM	SiCl4 pre valve closed
2/10/2012	6:42:34 PM	SiCl4 post valve closed
2/10/2012	6:42:34 PM	Bypass valve closed
2/10/2012	6:42:34 PM	Bubbler valve closed
2/10/2012	6:42:34 PM	Main Vac valve opened
2/10/2012	6:42:34 PM	Helium MFC set to  0.000000
2/10/2012	6:42:34 PM	H2 MFC set to  0.000000
2/10/2012	6:42:34 PM	BCl3 MFC set to  0.000000
2/10/2012	6:42:34 PM	PH3 MFC set to  0.000000
2/10/2012	6:42:34 PM	SiCl4 MFC set to  0.000000
2/10/2012	6:42:34 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	6:42:34 PM	Tube furnace set to 0
2/10/2012	6:42:35 PM	Run finished at 6:42 PM
2/10/2012	7:03:44 PM	Main Vac valve closed
2/10/2012	7:03:55 PM	Main Vac valve opened
2/10/2012	7:04:29 PM	Recipe started at 7:04 PM
2/10/2012	7:04:29 PM	Helium valve closed
2/10/2012	7:04:29 PM	H2 valve closed
2/10/2012	7:04:29 PM	BCl3 valve closed
2/10/2012	7:04:29 PM	PH3 valve closed
2/10/2012	7:04:29 PM	SiCl4 pre valve closed
2/10/2012	7:04:29 PM	SiCl4 post valve closed
2/10/2012	7:04:29 PM	Bypass valve closed
2/10/2012	7:04:29 PM	Bubbler valve closed
2/10/2012	7:04:29 PM	Main Vac valve opened
2/10/2012	7:04:29 PM	Helium MFC set to  0.000000
2/10/2012	7:04:29 PM	H2 MFC set to  0.000000
2/10/2012	7:04:29 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:29 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:29 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:29 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:29 PM	Tube furnace set to 0
2/10/2012	7:04:32 PM	H2 valve closed
2/10/2012	7:04:32 PM	BCl3 valve closed
2/10/2012	7:04:32 PM	PH3 valve closed
2/10/2012	7:04:32 PM	SiCl4 pre valve closed
2/10/2012	7:04:32 PM	SiCl4 post valve closed
2/10/2012	7:04:32 PM	Bypass valve closed
2/10/2012	7:04:32 PM	Bubbler valve closed
2/10/2012	7:04:32 PM	Helium valve opened
2/10/2012	7:04:32 PM	Main Vac valve opened
2/10/2012	7:04:32 PM	Helium MFC set to  20.000000
2/10/2012	7:04:32 PM	H2 MFC set to  0.000000
2/10/2012	7:04:32 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:32 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:32 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:32 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:32 PM	Tube furnace set to 0
2/10/2012	7:04:32 PM	Helium valve closed
2/10/2012	7:04:33 PM	H2 valve closed
2/10/2012	7:04:33 PM	BCl3 valve closed
2/10/2012	7:04:33 PM	PH3 valve closed
2/10/2012	7:04:33 PM	SiCl4 pre valve closed
2/10/2012	7:04:33 PM	SiCl4 post valve closed
2/10/2012	7:04:33 PM	Bypass valve closed
2/10/2012	7:04:33 PM	Bubbler valve closed
2/10/2012	7:04:33 PM	Main Vac valve opened
2/10/2012	7:04:33 PM	Helium MFC set to  0.000000
2/10/2012	7:04:33 PM	H2 MFC set to  0.000000
2/10/2012	7:04:33 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:33 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:33 PM	Tube furnace set to 0
2/10/2012	7:04:33 PM	H2 valve closed
2/10/2012	7:04:33 PM	BCl3 valve closed
2/10/2012	7:04:33 PM	PH3 valve closed
2/10/2012	7:04:33 PM	SiCl4 pre valve closed
2/10/2012	7:04:33 PM	SiCl4 post valve closed
2/10/2012	7:04:33 PM	Bypass valve closed
2/10/2012	7:04:33 PM	Bubbler valve closed
2/10/2012	7:04:33 PM	Helium valve opened
2/10/2012	7:04:33 PM	Main Vac valve opened
2/10/2012	7:04:33 PM	Helium MFC set to  20.000000
2/10/2012	7:04:33 PM	H2 MFC set to  0.000000
2/10/2012	7:04:33 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:33 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:33 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:33 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:33 PM	Tube furnace set to 0
2/10/2012	7:04:34 PM	Helium valve closed
2/10/2012	7:04:34 PM	H2 valve closed
2/10/2012	7:04:34 PM	BCl3 valve closed
2/10/2012	7:04:34 PM	PH3 valve closed
2/10/2012	7:04:34 PM	SiCl4 pre valve closed
2/10/2012	7:04:34 PM	SiCl4 post valve closed
2/10/2012	7:04:34 PM	Bypass valve closed
2/10/2012	7:04:34 PM	Bubbler valve closed
2/10/2012	7:04:34 PM	Main Vac valve opened
2/10/2012	7:04:34 PM	Helium MFC set to  0.000000
2/10/2012	7:04:34 PM	H2 MFC set to  0.000000
2/10/2012	7:04:34 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:34 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:34 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:34 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:34 PM	Tube furnace set to 0
2/10/2012	7:04:35 PM	H2 valve closed
2/10/2012	7:04:35 PM	BCl3 valve closed
2/10/2012	7:04:35 PM	PH3 valve closed
2/10/2012	7:04:35 PM	SiCl4 pre valve closed
2/10/2012	7:04:35 PM	SiCl4 post valve closed
2/10/2012	7:04:35 PM	Bypass valve closed
2/10/2012	7:04:35 PM	Bubbler valve closed
2/10/2012	7:04:35 PM	Helium valve opened
2/10/2012	7:04:35 PM	Main Vac valve opened
2/10/2012	7:04:35 PM	Helium MFC set to  20.000000
2/10/2012	7:04:35 PM	H2 MFC set to  0.000000
2/10/2012	7:04:35 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:35 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:35 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:35 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:35 PM	Tube furnace set to 0
2/10/2012	7:04:35 PM	Helium valve closed
2/10/2012	7:04:35 PM	H2 valve closed
2/10/2012	7:04:35 PM	BCl3 valve closed
2/10/2012	7:04:35 PM	PH3 valve closed
2/10/2012	7:04:35 PM	SiCl4 pre valve closed
2/10/2012	7:04:35 PM	SiCl4 post valve closed
2/10/2012	7:04:35 PM	Bypass valve closed
2/10/2012	7:04:35 PM	Bubbler valve closed
2/10/2012	7:04:35 PM	Main Vac valve opened
2/10/2012	7:04:35 PM	Helium MFC set to  0.000000
2/10/2012	7:04:35 PM	H2 MFC set to  0.000000
2/10/2012	7:04:35 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:35 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:35 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:35 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:36 PM	Tube furnace set to 0
2/10/2012	7:04:36 PM	H2 valve closed
2/10/2012	7:04:36 PM	BCl3 valve closed
2/10/2012	7:04:36 PM	PH3 valve closed
2/10/2012	7:04:36 PM	SiCl4 pre valve closed
2/10/2012	7:04:36 PM	SiCl4 post valve closed
2/10/2012	7:04:36 PM	Bypass valve closed
2/10/2012	7:04:36 PM	Bubbler valve closed
2/10/2012	7:04:36 PM	Helium valve opened
2/10/2012	7:04:36 PM	Main Vac valve opened
2/10/2012	7:04:36 PM	Helium MFC set to  20.000000
2/10/2012	7:04:36 PM	H2 MFC set to  0.000000
2/10/2012	7:04:36 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:36 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:36 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:36 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:36 PM	Tube furnace set to 0
2/10/2012	7:04:37 PM	Helium valve closed
2/10/2012	7:04:37 PM	H2 valve closed
2/10/2012	7:04:37 PM	BCl3 valve closed
2/10/2012	7:04:37 PM	PH3 valve closed
2/10/2012	7:04:37 PM	SiCl4 pre valve closed
2/10/2012	7:04:37 PM	SiCl4 post valve closed
2/10/2012	7:04:37 PM	Bypass valve closed
2/10/2012	7:04:37 PM	Bubbler valve closed
2/10/2012	7:04:37 PM	Main Vac valve opened
2/10/2012	7:04:37 PM	Helium MFC set to  0.000000
2/10/2012	7:04:37 PM	H2 MFC set to  0.000000
2/10/2012	7:04:37 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:37 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:37 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:37 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:37 PM	Tube furnace set to 0
2/10/2012	7:04:37 PM	H2 valve closed
2/10/2012	7:04:37 PM	BCl3 valve closed
2/10/2012	7:04:37 PM	PH3 valve closed
2/10/2012	7:04:37 PM	SiCl4 pre valve closed
2/10/2012	7:04:37 PM	SiCl4 post valve closed
2/10/2012	7:04:37 PM	Bypass valve closed
2/10/2012	7:04:37 PM	Bubbler valve closed
2/10/2012	7:04:37 PM	Helium valve opened
2/10/2012	7:04:37 PM	Main Vac valve opened
2/10/2012	7:04:37 PM	Helium MFC set to  20.000000
2/10/2012	7:04:37 PM	H2 MFC set to  0.000000
2/10/2012	7:04:37 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:37 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:37 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:37 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:38 PM	Tube furnace set to 0
2/10/2012	7:04:38 PM	Helium valve closed
2/10/2012	7:04:38 PM	H2 valve closed
2/10/2012	7:04:38 PM	BCl3 valve closed
2/10/2012	7:04:38 PM	PH3 valve closed
2/10/2012	7:04:38 PM	SiCl4 pre valve closed
2/10/2012	7:04:38 PM	SiCl4 post valve closed
2/10/2012	7:04:38 PM	Bypass valve closed
2/10/2012	7:04:38 PM	Bubbler valve closed
2/10/2012	7:04:38 PM	Main Vac valve opened
2/10/2012	7:04:38 PM	Helium MFC set to  0.000000
2/10/2012	7:04:38 PM	H2 MFC set to  0.000000
2/10/2012	7:04:38 PM	BCl3 MFC set to  0.000000
2/10/2012	7:04:38 PM	PH3 MFC set to  0.000000
2/10/2012	7:04:38 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:04:38 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:04:38 PM	Tube furnace set to 0
2/10/2012	7:05:08 PM	H2 valve closed
2/10/2012	7:05:08 PM	BCl3 valve closed
2/10/2012	7:05:08 PM	PH3 valve closed
2/10/2012	7:05:08 PM	SiCl4 pre valve closed
2/10/2012	7:05:08 PM	SiCl4 post valve closed
2/10/2012	7:05:08 PM	Bypass valve closed
2/10/2012	7:05:08 PM	Bubbler valve closed
2/10/2012	7:05:08 PM	Helium valve opened
2/10/2012	7:05:08 PM	Main Vac valve opened
2/10/2012	7:05:08 PM	Helium MFC set to  20.000000
2/10/2012	7:05:08 PM	H2 MFC set to  0.000000
2/10/2012	7:05:08 PM	BCl3 MFC set to  0.000000
2/10/2012	7:05:08 PM	PH3 MFC set to  0.000000
2/10/2012	7:05:08 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:05:08 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:05:09 PM	Tube furnace set to 0
2/10/2012	7:05:39 PM	Helium valve closed
2/10/2012	7:05:39 PM	H2 valve closed
2/10/2012	7:05:39 PM	BCl3 valve closed
2/10/2012	7:05:39 PM	PH3 valve closed
2/10/2012	7:05:39 PM	SiCl4 pre valve closed
2/10/2012	7:05:39 PM	SiCl4 post valve closed
2/10/2012	7:05:39 PM	Bypass valve closed
2/10/2012	7:05:39 PM	Bubbler valve closed
2/10/2012	7:05:39 PM	Main Vac valve opened
2/10/2012	7:05:39 PM	Helium MFC set to  0.000000
2/10/2012	7:05:39 PM	H2 MFC set to  0.000000
2/10/2012	7:05:39 PM	BCl3 MFC set to  0.000000
2/10/2012	7:05:39 PM	PH3 MFC set to  0.000000
2/10/2012	7:05:39 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:05:39 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:05:39 PM	Tube furnace set to 0
2/10/2012	7:06:09 PM	H2 valve closed
2/10/2012	7:06:09 PM	BCl3 valve closed
2/10/2012	7:06:09 PM	PH3 valve closed
2/10/2012	7:06:09 PM	SiCl4 pre valve closed
2/10/2012	7:06:09 PM	SiCl4 post valve closed
2/10/2012	7:06:09 PM	Bypass valve closed
2/10/2012	7:06:09 PM	Bubbler valve closed
2/10/2012	7:06:09 PM	Helium valve opened
2/10/2012	7:06:09 PM	Main Vac valve opened
2/10/2012	7:06:09 PM	Helium MFC set to  20.000000
2/10/2012	7:06:09 PM	H2 MFC set to  0.000000
2/10/2012	7:06:09 PM	BCl3 MFC set to  0.000000
2/10/2012	7:06:09 PM	PH3 MFC set to  0.000000
2/10/2012	7:06:09 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:06:09 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:06:09 PM	Tube furnace set to 0
2/10/2012	7:06:39 PM	Helium valve closed
2/10/2012	7:06:39 PM	H2 valve closed
2/10/2012	7:06:39 PM	BCl3 valve closed
2/10/2012	7:06:39 PM	PH3 valve closed
2/10/2012	7:06:39 PM	SiCl4 pre valve closed
2/10/2012	7:06:39 PM	SiCl4 post valve closed
2/10/2012	7:06:39 PM	Bypass valve closed
2/10/2012	7:06:39 PM	Bubbler valve closed
2/10/2012	7:06:39 PM	Main Vac valve opened
2/10/2012	7:06:39 PM	Helium MFC set to  0.000000
2/10/2012	7:06:39 PM	H2 MFC set to  0.000000
2/10/2012	7:06:39 PM	BCl3 MFC set to  0.000000
2/10/2012	7:06:39 PM	PH3 MFC set to  0.000000
2/10/2012	7:06:39 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:06:39 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:06:39 PM	Tube furnace set to 0
2/10/2012	7:07:09 PM	H2 valve closed
2/10/2012	7:07:09 PM	BCl3 valve closed
2/10/2012	7:07:09 PM	PH3 valve closed
2/10/2012	7:07:09 PM	SiCl4 pre valve closed
2/10/2012	7:07:09 PM	SiCl4 post valve closed
2/10/2012	7:07:09 PM	Bypass valve closed
2/10/2012	7:07:09 PM	Bubbler valve closed
2/10/2012	7:07:09 PM	Helium valve opened
2/10/2012	7:07:09 PM	Main Vac valve opened
2/10/2012	7:07:09 PM	Helium MFC set to  20.000000
2/10/2012	7:07:09 PM	H2 MFC set to  0.000000
2/10/2012	7:07:09 PM	BCl3 MFC set to  0.000000
2/10/2012	7:07:09 PM	PH3 MFC set to  0.000000
2/10/2012	7:07:09 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:07:09 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:07:09 PM	Tube furnace set to 0
2/10/2012	7:07:39 PM	Helium valve closed
2/10/2012	7:07:39 PM	H2 valve closed
2/10/2012	7:07:39 PM	BCl3 valve closed
2/10/2012	7:07:39 PM	PH3 valve closed
2/10/2012	7:07:39 PM	SiCl4 pre valve closed
2/10/2012	7:07:39 PM	SiCl4 post valve closed
2/10/2012	7:07:39 PM	Bypass valve closed
2/10/2012	7:07:39 PM	Bubbler valve closed
2/10/2012	7:07:39 PM	Main Vac valve opened
2/10/2012	7:07:39 PM	Helium MFC set to  0.000000
2/10/2012	7:07:39 PM	H2 MFC set to  0.000000
2/10/2012	7:07:39 PM	BCl3 MFC set to  0.000000
2/10/2012	7:07:39 PM	PH3 MFC set to  0.000000
2/10/2012	7:07:39 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:07:39 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:07:40 PM	Tube furnace set to 0
2/10/2012	7:08:10 PM	H2 valve closed
2/10/2012	7:08:10 PM	BCl3 valve closed
2/10/2012	7:08:10 PM	PH3 valve closed
2/10/2012	7:08:10 PM	SiCl4 pre valve closed
2/10/2012	7:08:10 PM	SiCl4 post valve closed
2/10/2012	7:08:10 PM	Bypass valve closed
2/10/2012	7:08:10 PM	Bubbler valve closed
2/10/2012	7:08:10 PM	Helium valve opened
2/10/2012	7:08:10 PM	Main Vac valve opened
2/10/2012	7:08:10 PM	Helium MFC set to  20.000000
2/10/2012	7:08:10 PM	H2 MFC set to  0.000000
2/10/2012	7:08:10 PM	BCl3 MFC set to  0.000000
2/10/2012	7:08:10 PM	PH3 MFC set to  0.000000
2/10/2012	7:08:10 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:08:10 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:08:10 PM	Tube furnace set to 0
2/10/2012	7:08:40 PM	Helium valve closed
2/10/2012	7:08:40 PM	H2 valve closed
2/10/2012	7:08:40 PM	BCl3 valve closed
2/10/2012	7:08:40 PM	PH3 valve closed
2/10/2012	7:08:40 PM	SiCl4 pre valve closed
2/10/2012	7:08:40 PM	SiCl4 post valve closed
2/10/2012	7:08:40 PM	Bypass valve closed
2/10/2012	7:08:40 PM	Bubbler valve closed
2/10/2012	7:08:40 PM	Main Vac valve opened
2/10/2012	7:08:40 PM	Helium MFC set to  0.000000
2/10/2012	7:08:40 PM	H2 MFC set to  0.000000
2/10/2012	7:08:40 PM	BCl3 MFC set to  0.000000
2/10/2012	7:08:40 PM	PH3 MFC set to  0.000000
2/10/2012	7:08:40 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:08:40 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:08:40 PM	Tube furnace set to 200
2/10/2012	7:09:10 PM	H2 valve closed
2/10/2012	7:09:10 PM	BCl3 valve closed
2/10/2012	7:09:10 PM	PH3 valve closed
2/10/2012	7:09:10 PM	SiCl4 pre valve closed
2/10/2012	7:09:10 PM	SiCl4 post valve closed
2/10/2012	7:09:10 PM	Bypass valve closed
2/10/2012	7:09:10 PM	Bubbler valve closed
2/10/2012	7:09:10 PM	Helium valve opened
2/10/2012	7:09:10 PM	Main Vac valve opened
2/10/2012	7:09:10 PM	Helium MFC set to  20.000000
2/10/2012	7:09:10 PM	H2 MFC set to  0.000000
2/10/2012	7:09:10 PM	BCl3 MFC set to  0.000000
2/10/2012	7:09:10 PM	PH3 MFC set to  0.000000
2/10/2012	7:09:10 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:09:10 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:09:10 PM	Tube furnace set to 200
2/10/2012	7:09:40 PM	Helium valve closed
2/10/2012	7:09:40 PM	H2 valve closed
2/10/2012	7:09:40 PM	BCl3 valve closed
2/10/2012	7:09:40 PM	PH3 valve closed
2/10/2012	7:09:40 PM	SiCl4 pre valve closed
2/10/2012	7:09:40 PM	SiCl4 post valve closed
2/10/2012	7:09:40 PM	Bypass valve closed
2/10/2012	7:09:40 PM	Bubbler valve closed
2/10/2012	7:09:40 PM	Main Vac valve opened
2/10/2012	7:09:40 PM	Helium MFC set to  0.000000
2/10/2012	7:09:40 PM	H2 MFC set to  0.000000
2/10/2012	7:09:40 PM	BCl3 MFC set to  0.000000
2/10/2012	7:09:40 PM	PH3 MFC set to  0.000000
2/10/2012	7:09:40 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:09:40 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:09:40 PM	Tube furnace set to 200
2/10/2012	7:10:10 PM	H2 valve closed
2/10/2012	7:10:10 PM	BCl3 valve closed
2/10/2012	7:10:10 PM	PH3 valve closed
2/10/2012	7:10:10 PM	SiCl4 pre valve closed
2/10/2012	7:10:10 PM	SiCl4 post valve closed
2/10/2012	7:10:10 PM	Bypass valve closed
2/10/2012	7:10:10 PM	Bubbler valve closed
2/10/2012	7:10:10 PM	Helium valve opened
2/10/2012	7:10:10 PM	Main Vac valve opened
2/10/2012	7:10:10 PM	Helium MFC set to  20.000000
2/10/2012	7:10:10 PM	H2 MFC set to  0.000000
2/10/2012	7:10:10 PM	BCl3 MFC set to  0.000000
2/10/2012	7:10:10 PM	PH3 MFC set to  0.000000
2/10/2012	7:10:10 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:10:10 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:10:11 PM	Tube furnace set to 200
2/10/2012	7:10:41 PM	Helium valve closed
2/10/2012	7:10:41 PM	H2 valve closed
2/10/2012	7:10:41 PM	BCl3 valve closed
2/10/2012	7:10:41 PM	PH3 valve closed
2/10/2012	7:10:41 PM	SiCl4 pre valve closed
2/10/2012	7:10:41 PM	SiCl4 post valve closed
2/10/2012	7:10:41 PM	Bypass valve closed
2/10/2012	7:10:41 PM	Bubbler valve closed
2/10/2012	7:10:41 PM	Main Vac valve opened
2/10/2012	7:10:41 PM	Helium MFC set to  0.000000
2/10/2012	7:10:41 PM	H2 MFC set to  0.000000
2/10/2012	7:10:41 PM	BCl3 MFC set to  0.000000
2/10/2012	7:10:41 PM	PH3 MFC set to  0.000000
2/10/2012	7:10:41 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:10:41 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:10:41 PM	Tube furnace set to 200
2/10/2012	7:11:11 PM	H2 valve closed
2/10/2012	7:11:11 PM	BCl3 valve closed
2/10/2012	7:11:11 PM	PH3 valve closed
2/10/2012	7:11:11 PM	SiCl4 pre valve closed
2/10/2012	7:11:11 PM	SiCl4 post valve closed
2/10/2012	7:11:11 PM	Bypass valve closed
2/10/2012	7:11:11 PM	Bubbler valve closed
2/10/2012	7:11:11 PM	Helium valve opened
2/10/2012	7:11:11 PM	Main Vac valve opened
2/10/2012	7:11:11 PM	Helium MFC set to  20.000000
2/10/2012	7:11:11 PM	H2 MFC set to  0.000000
2/10/2012	7:11:11 PM	BCl3 MFC set to  0.000000
2/10/2012	7:11:11 PM	PH3 MFC set to  0.000000
2/10/2012	7:11:11 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:11:11 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:11:11 PM	Tube furnace set to 200
2/10/2012	7:11:41 PM	Helium valve closed
2/10/2012	7:11:41 PM	H2 valve closed
2/10/2012	7:11:41 PM	BCl3 valve closed
2/10/2012	7:11:41 PM	PH3 valve closed
2/10/2012	7:11:41 PM	SiCl4 pre valve closed
2/10/2012	7:11:41 PM	SiCl4 post valve closed
2/10/2012	7:11:41 PM	Bypass valve closed
2/10/2012	7:11:41 PM	Bubbler valve closed
2/10/2012	7:11:41 PM	Main Vac valve opened
2/10/2012	7:11:41 PM	Helium MFC set to  0.000000
2/10/2012	7:11:41 PM	H2 MFC set to  0.000000
2/10/2012	7:11:41 PM	BCl3 MFC set to  0.000000
2/10/2012	7:11:41 PM	PH3 MFC set to  0.000000
2/10/2012	7:11:41 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:11:41 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:11:41 PM	Tube furnace set to 200
2/10/2012	7:12:11 PM	H2 valve closed
2/10/2012	7:12:11 PM	BCl3 valve closed
2/10/2012	7:12:11 PM	PH3 valve closed
2/10/2012	7:12:11 PM	SiCl4 pre valve closed
2/10/2012	7:12:11 PM	SiCl4 post valve closed
2/10/2012	7:12:11 PM	Bypass valve closed
2/10/2012	7:12:11 PM	Bubbler valve closed
2/10/2012	7:12:11 PM	Helium valve opened
2/10/2012	7:12:11 PM	Main Vac valve opened
2/10/2012	7:12:11 PM	Helium MFC set to  20.000000
2/10/2012	7:12:11 PM	H2 MFC set to  0.000000
2/10/2012	7:12:11 PM	BCl3 MFC set to  0.000000
2/10/2012	7:12:11 PM	PH3 MFC set to  0.000000
2/10/2012	7:12:11 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:12:11 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:12:11 PM	Tube furnace set to 200
2/10/2012	7:12:41 PM	Helium valve closed
2/10/2012	7:12:41 PM	H2 valve closed
2/10/2012	7:12:41 PM	BCl3 valve closed
2/10/2012	7:12:41 PM	PH3 valve closed
2/10/2012	7:12:41 PM	SiCl4 pre valve closed
2/10/2012	7:12:41 PM	SiCl4 post valve closed
2/10/2012	7:12:41 PM	Bypass valve closed
2/10/2012	7:12:41 PM	Bubbler valve closed
2/10/2012	7:12:41 PM	Main Vac valve opened
2/10/2012	7:12:41 PM	Helium MFC set to  0.000000
2/10/2012	7:12:41 PM	H2 MFC set to  0.000000
2/10/2012	7:12:41 PM	BCl3 MFC set to  0.000000
2/10/2012	7:12:41 PM	PH3 MFC set to  0.000000
2/10/2012	7:12:41 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:12:41 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:12:42 PM	Tube furnace set to 200
2/10/2012	7:13:12 PM	H2 valve closed
2/10/2012	7:13:12 PM	BCl3 valve closed
2/10/2012	7:13:12 PM	PH3 valve closed
2/10/2012	7:13:12 PM	SiCl4 pre valve closed
2/10/2012	7:13:12 PM	SiCl4 post valve closed
2/10/2012	7:13:12 PM	Bypass valve closed
2/10/2012	7:13:12 PM	Bubbler valve closed
2/10/2012	7:13:12 PM	Helium valve opened
2/10/2012	7:13:12 PM	Main Vac valve opened
2/10/2012	7:13:12 PM	Helium MFC set to  20.000000
2/10/2012	7:13:12 PM	H2 MFC set to  0.000000
2/10/2012	7:13:12 PM	BCl3 MFC set to  0.000000
2/10/2012	7:13:12 PM	PH3 MFC set to  0.000000
2/10/2012	7:13:12 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:13:12 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:13:12 PM	Tube furnace set to 200
2/10/2012	7:13:42 PM	Helium valve closed
2/10/2012	7:13:42 PM	H2 valve closed
2/10/2012	7:13:42 PM	BCl3 valve closed
2/10/2012	7:13:42 PM	PH3 valve closed
2/10/2012	7:13:42 PM	SiCl4 pre valve closed
2/10/2012	7:13:42 PM	SiCl4 post valve closed
2/10/2012	7:13:42 PM	Bypass valve closed
2/10/2012	7:13:42 PM	Bubbler valve closed
2/10/2012	7:13:42 PM	Main Vac valve opened
2/10/2012	7:13:42 PM	Helium MFC set to  0.000000
2/10/2012	7:13:42 PM	H2 MFC set to  0.000000
2/10/2012	7:13:42 PM	BCl3 MFC set to  0.000000
2/10/2012	7:13:42 PM	PH3 MFC set to  0.000000
2/10/2012	7:13:42 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:13:42 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:13:42 PM	Tube furnace set to 200
2/10/2012	7:14:12 PM	H2 valve closed
2/10/2012	7:14:12 PM	BCl3 valve closed
2/10/2012	7:14:12 PM	PH3 valve closed
2/10/2012	7:14:12 PM	SiCl4 pre valve closed
2/10/2012	7:14:12 PM	SiCl4 post valve closed
2/10/2012	7:14:12 PM	Bypass valve closed
2/10/2012	7:14:12 PM	Bubbler valve closed
2/10/2012	7:14:12 PM	Helium valve opened
2/10/2012	7:14:12 PM	Main Vac valve opened
2/10/2012	7:14:12 PM	Helium MFC set to  20.000000
2/10/2012	7:14:12 PM	H2 MFC set to  0.000000
2/10/2012	7:14:12 PM	BCl3 MFC set to  0.000000
2/10/2012	7:14:12 PM	PH3 MFC set to  0.000000
2/10/2012	7:14:12 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:14:12 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:14:12 PM	Tube furnace set to 200
2/10/2012	7:14:42 PM	Helium valve closed
2/10/2012	7:14:42 PM	H2 valve closed
2/10/2012	7:14:42 PM	BCl3 valve closed
2/10/2012	7:14:42 PM	PH3 valve closed
2/10/2012	7:14:42 PM	SiCl4 pre valve closed
2/10/2012	7:14:42 PM	SiCl4 post valve closed
2/10/2012	7:14:42 PM	Bypass valve closed
2/10/2012	7:14:42 PM	Bubbler valve closed
2/10/2012	7:14:42 PM	Main Vac valve opened
2/10/2012	7:14:42 PM	Helium MFC set to  0.000000
2/10/2012	7:14:42 PM	H2 MFC set to  0.000000
2/10/2012	7:14:42 PM	BCl3 MFC set to  0.000000
2/10/2012	7:14:42 PM	PH3 MFC set to  0.000000
2/10/2012	7:14:42 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:14:42 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:14:42 PM	Tube furnace set to 0
2/10/2012	7:14:43 PM	Run finished at 7:14 PM
2/10/2012	7:24:31 PM	Main Vac valve closed
2/10/2012	7:24:42 PM	Main Vac valve opened
2/10/2012	7:25:51 PM	Recipe started at 7:25 PM
2/10/2012	7:25:51 PM	Helium valve closed
2/10/2012	7:25:51 PM	H2 valve closed
2/10/2012	7:25:51 PM	BCl3 valve closed
2/10/2012	7:25:51 PM	PH3 valve closed
2/10/2012	7:25:51 PM	SiCl4 pre valve closed
2/10/2012	7:25:51 PM	SiCl4 post valve closed
2/10/2012	7:25:51 PM	Main Vac valve closed
2/10/2012	7:25:51 PM	Bypass valve closed
2/10/2012	7:25:51 PM	Bubbler valve closed
2/10/2012	7:25:51 PM	Helium MFC set to  0.000000
2/10/2012	7:25:51 PM	H2 MFC set to  0.000000
2/10/2012	7:25:51 PM	BCl3 MFC set to  0.000000
2/10/2012	7:25:51 PM	PH3 MFC set to  0.000000
2/10/2012	7:25:51 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:25:51 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:25:51 PM	Tube furnace set to 0
2/10/2012	7:25:54 PM	Helium valve closed
2/10/2012	7:25:54 PM	BCl3 valve closed
2/10/2012	7:25:54 PM	PH3 valve closed
2/10/2012	7:25:54 PM	SiCl4 pre valve closed
2/10/2012	7:25:54 PM	SiCl4 post valve closed
2/10/2012	7:25:54 PM	Main Vac valve closed
2/10/2012	7:25:54 PM	Bypass valve closed
2/10/2012	7:25:54 PM	Bubbler valve closed
2/10/2012	7:25:55 PM	H2 valve opened
2/10/2012	7:25:55 PM	Helium MFC set to  0.000000
2/10/2012	7:25:55 PM	H2 MFC set to  500.000000
2/10/2012	7:25:55 PM	BCl3 MFC set to  0.000000
2/10/2012	7:25:55 PM	PH3 MFC set to  0.000000
2/10/2012	7:25:55 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:25:55 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:25:55 PM	Tube furnace set to 0
2/10/2012	7:26:58 PM	Helium valve closed
2/10/2012	7:26:58 PM	BCl3 valve closed
2/10/2012	7:26:58 PM	PH3 valve closed
2/10/2012	7:26:58 PM	SiCl4 pre valve closed
2/10/2012	7:26:58 PM	SiCl4 post valve closed
2/10/2012	7:26:58 PM	Main Vac valve closed
2/10/2012	7:26:58 PM	Bypass valve closed
2/10/2012	7:26:58 PM	H2 valve opened
2/10/2012	7:26:58 PM	Bubbler valve opened
2/10/2012	7:26:58 PM	Helium MFC set to  0.000000
2/10/2012	7:26:58 PM	H2 MFC set to  500.000000
2/10/2012	7:26:58 PM	BCl3 MFC set to  0.000000
2/10/2012	7:26:58 PM	PH3 MFC set to  0.000000
2/10/2012	7:26:58 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:26:58 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:26:58 PM	Tube furnace set to 0
2/10/2012	7:26:59 PM	Helium valve closed
2/10/2012	7:26:59 PM	BCl3 valve closed
2/10/2012	7:26:59 PM	PH3 valve closed
2/10/2012	7:26:59 PM	SiCl4 pre valve closed
2/10/2012	7:26:59 PM	SiCl4 post valve closed
2/10/2012	7:26:59 PM	Main Vac valve closed
2/10/2012	7:26:59 PM	Bypass valve closed
2/10/2012	7:26:59 PM	H2 valve opened
2/10/2012	7:26:59 PM	Bubbler valve opened
2/10/2012	7:26:59 PM	Helium MFC set to  0.000000
2/10/2012	7:26:59 PM	H2 MFC set to  500.000000
2/10/2012	7:26:59 PM	BCl3 MFC set to  0.000000
2/10/2012	7:26:59 PM	PH3 MFC set to  0.000000
2/10/2012	7:26:59 PM	SiCl4 MFC set to  0.000000
2/10/2012	7:26:59 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:27:00 PM	Tube furnace set to 1000
2/10/2012	7:47:00 PM	Helium valve closed
2/10/2012	7:47:00 PM	BCl3 valve closed
2/10/2012	7:47:00 PM	PH3 valve closed
2/10/2012	7:47:00 PM	Main Vac valve closed
2/10/2012	7:47:00 PM	Bypass valve closed
2/10/2012	7:47:00 PM	H2 valve opened
2/10/2012	7:47:00 PM	SiCl4 pre valve opened
2/10/2012	7:47:00 PM	SiCl4 post valve opened
2/10/2012	7:47:00 PM	Bubbler valve opened
2/10/2012	7:47:00 PM	Helium MFC set to  0.000000
2/10/2012	7:47:00 PM	H2 MFC set to  500.000000
2/10/2012	7:47:00 PM	BCl3 MFC set to  0.000000
2/10/2012	7:47:00 PM	PH3 MFC set to  0.000000
2/10/2012	7:47:00 PM	SiCl4 MFC set to  25.000000
2/10/2012	7:47:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	7:47:00 PM	Tube furnace set to 1000
2/10/2012	8:47:00 PM	Helium valve closed
2/10/2012	8:47:00 PM	BCl3 valve closed
2/10/2012	8:47:00 PM	PH3 valve closed
2/10/2012	8:47:00 PM	SiCl4 pre valve closed
2/10/2012	8:47:00 PM	SiCl4 post valve closed
2/10/2012	8:47:00 PM	Main Vac valve closed
2/10/2012	8:47:00 PM	Bypass valve closed
2/10/2012	8:47:00 PM	H2 valve opened
2/10/2012	8:47:00 PM	Bubbler valve opened
2/10/2012	8:47:00 PM	Helium MFC set to  0.000000
2/10/2012	8:47:00 PM	H2 MFC set to  500.000000
2/10/2012	8:47:00 PM	BCl3 MFC set to  0.000000
2/10/2012	8:47:00 PM	PH3 MFC set to  0.000000
2/10/2012	8:47:00 PM	SiCl4 MFC set to  0.000000
2/10/2012	8:47:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	8:47:00 PM	Tube furnace set to 950
2/10/2012	8:49:00 PM	Helium valve closed
2/10/2012	8:49:00 PM	BCl3 valve closed
2/10/2012	8:49:00 PM	PH3 valve closed
2/10/2012	8:49:00 PM	SiCl4 pre valve closed
2/10/2012	8:49:00 PM	SiCl4 post valve closed
2/10/2012	8:49:00 PM	Main Vac valve closed
2/10/2012	8:49:00 PM	Bypass valve closed
2/10/2012	8:49:00 PM	H2 valve opened
2/10/2012	8:49:00 PM	Bubbler valve opened
2/10/2012	8:49:00 PM	Helium MFC set to  0.000000
2/10/2012	8:49:00 PM	H2 MFC set to  500.000000
2/10/2012	8:49:00 PM	BCl3 MFC set to  0.000000
2/10/2012	8:49:00 PM	PH3 MFC set to  0.000000
2/10/2012	8:49:00 PM	SiCl4 MFC set to  0.000000
2/10/2012	8:49:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	8:49:00 PM	Tube furnace set to 900
2/10/2012	8:51:00 PM	Helium valve closed
2/10/2012	8:51:00 PM	BCl3 valve closed
2/10/2012	8:51:00 PM	PH3 valve closed
2/10/2012	8:51:00 PM	SiCl4 pre valve closed
2/10/2012	8:51:00 PM	SiCl4 post valve closed
2/10/2012	8:51:00 PM	Main Vac valve closed
2/10/2012	8:51:00 PM	Bypass valve closed
2/10/2012	8:51:00 PM	H2 valve opened
2/10/2012	8:51:00 PM	Bubbler valve opened
2/10/2012	8:51:00 PM	Helium MFC set to  0.000000
2/10/2012	8:51:00 PM	H2 MFC set to  500.000000
2/10/2012	8:51:00 PM	BCl3 MFC set to  0.000000
2/10/2012	8:51:00 PM	PH3 MFC set to  0.000000
2/10/2012	8:51:00 PM	SiCl4 MFC set to  0.000000
2/10/2012	8:51:00 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	8:51:01 PM	Tube furnace set to 850
2/10/2012	8:53:01 PM	H2 valve closed
2/10/2012	8:53:01 PM	BCl3 valve closed
2/10/2012	8:53:01 PM	PH3 valve closed
2/10/2012	8:53:01 PM	SiCl4 pre valve closed
2/10/2012	8:53:01 PM	SiCl4 post valve closed
2/10/2012	8:53:01 PM	Main Vac valve closed
2/10/2012	8:53:01 PM	Bypass valve closed
2/10/2012	8:53:01 PM	Helium valve opened
2/10/2012	8:53:01 PM	Bubbler valve opened
2/10/2012	8:53:01 PM	Helium MFC set to  500.000000
2/10/2012	8:53:01 PM	H2 MFC set to  0.000000
2/10/2012	8:53:01 PM	BCl3 MFC set to  0.000000
2/10/2012	8:53:01 PM	PH3 MFC set to  0.000000
2/10/2012	8:53:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	8:53:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	8:53:01 PM	Tube furnace set to 800
2/10/2012	8:55:01 PM	H2 valve closed
2/10/2012	8:55:01 PM	BCl3 valve closed
2/10/2012	8:55:01 PM	PH3 valve closed
2/10/2012	8:55:01 PM	SiCl4 pre valve closed
2/10/2012	8:55:01 PM	SiCl4 post valve closed
2/10/2012	8:55:01 PM	Main Vac valve closed
2/10/2012	8:55:01 PM	Bypass valve closed
2/10/2012	8:55:01 PM	Helium valve opened
2/10/2012	8:55:01 PM	Bubbler valve opened
2/10/2012	8:55:01 PM	Helium MFC set to  500.000000
2/10/2012	8:55:01 PM	H2 MFC set to  0.000000
2/10/2012	8:55:01 PM	BCl3 MFC set to  0.000000
2/10/2012	8:55:01 PM	PH3 MFC set to  0.000000
2/10/2012	8:55:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	8:55:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	8:55:01 PM	Tube furnace set to 750
2/10/2012	8:57:01 PM	H2 valve closed
2/10/2012	8:57:01 PM	BCl3 valve closed
2/10/2012	8:57:01 PM	PH3 valve closed
2/10/2012	8:57:01 PM	SiCl4 pre valve closed
2/10/2012	8:57:01 PM	SiCl4 post valve closed
2/10/2012	8:57:01 PM	Main Vac valve closed
2/10/2012	8:57:01 PM	Bypass valve closed
2/10/2012	8:57:01 PM	Helium valve opened
2/10/2012	8:57:01 PM	Bubbler valve opened
2/10/2012	8:57:01 PM	Helium MFC set to  500.000000
2/10/2012	8:57:01 PM	H2 MFC set to  0.000000
2/10/2012	8:57:01 PM	BCl3 MFC set to  0.000000
2/10/2012	8:57:01 PM	PH3 MFC set to  0.000000
2/10/2012	8:57:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	8:57:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	8:57:01 PM	Tube furnace set to 0
2/10/2012	9:17:01 PM	Helium valve closed
2/10/2012	9:17:01 PM	H2 valve closed
2/10/2012	9:17:01 PM	BCl3 valve closed
2/10/2012	9:17:01 PM	PH3 valve closed
2/10/2012	9:17:01 PM	SiCl4 pre valve closed
2/10/2012	9:17:01 PM	SiCl4 post valve closed
2/10/2012	9:17:01 PM	Main Vac valve closed
2/10/2012	9:17:01 PM	Bypass valve closed
2/10/2012	9:17:01 PM	Bubbler valve closed
2/10/2012	9:17:01 PM	Helium MFC set to  0.000000
2/10/2012	9:17:01 PM	H2 MFC set to  0.000000
2/10/2012	9:17:01 PM	BCl3 MFC set to  0.000000
2/10/2012	9:17:01 PM	PH3 MFC set to  0.000000
2/10/2012	9:17:01 PM	SiCl4 MFC set to  0.000000
2/10/2012	9:17:01 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:17:02 PM	Tube furnace set to 0
2/10/2012	9:17:03 PM	Run finished at 9:17 PM
2/10/2012	9:44:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2012	9:44:45 PM	Recipe started at 9:44 PM
2/10/2012	9:44:45 PM	Helium valve closed
2/10/2012	9:44:45 PM	H2 valve closed
2/10/2012	9:44:45 PM	BCl3 valve closed
2/10/2012	9:44:45 PM	PH3 valve closed
2/10/2012	9:44:45 PM	SiCl4 pre valve closed
2/10/2012	9:44:45 PM	SiCl4 post valve closed
2/10/2012	9:44:45 PM	Main Vac valve closed
2/10/2012	9:44:45 PM	Bypass valve closed
2/10/2012	9:44:45 PM	Bubbler valve closed
2/10/2012	9:44:45 PM	Helium MFC set to  0.000000
2/10/2012	9:44:45 PM	H2 MFC set to  0.000000
2/10/2012	9:44:45 PM	BCl3 MFC set to  0.000000
2/10/2012	9:44:45 PM	PH3 MFC set to  0.000000
2/10/2012	9:44:45 PM	SiCl4 MFC set to  0.000000
2/10/2012	9:44:45 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:44:45 PM	Tube furnace set to 0
2/10/2012	9:44:48 PM	H2 valve closed
2/10/2012	9:44:48 PM	BCl3 valve closed
2/10/2012	9:44:48 PM	PH3 valve closed
2/10/2012	9:44:48 PM	SiCl4 pre valve closed
2/10/2012	9:44:48 PM	SiCl4 post valve closed
2/10/2012	9:44:48 PM	Main Vac valve closed
2/10/2012	9:44:48 PM	Bypass valve closed
2/10/2012	9:44:48 PM	Bubbler valve closed
2/10/2012	9:44:48 PM	Helium valve opened
2/10/2012	9:44:48 PM	Helium MFC set to  500.000000
2/10/2012	9:44:48 PM	H2 MFC set to  0.000000
2/10/2012	9:44:48 PM	BCl3 MFC set to  0.000000
2/10/2012	9:44:48 PM	PH3 MFC set to  0.000000
2/10/2012	9:44:48 PM	SiCl4 MFC set to  0.000000
2/10/2012	9:44:48 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:44:48 PM	Tube furnace set to 0
2/10/2012	9:44:52 PM	Helium valve closed
2/10/2012	9:44:52 PM	H2 valve closed
2/10/2012	9:44:52 PM	BCl3 valve closed
2/10/2012	9:44:52 PM	PH3 valve closed
2/10/2012	9:44:52 PM	SiCl4 pre valve closed
2/10/2012	9:44:52 PM	SiCl4 post valve closed
2/10/2012	9:44:52 PM	Main Vac valve closed
2/10/2012	9:44:52 PM	Bypass valve closed
2/10/2012	9:44:52 PM	Bubbler valve closed
2/10/2012	9:44:52 PM	Helium MFC set to  0.000000
2/10/2012	9:44:52 PM	H2 MFC set to  0.000000
2/10/2012	9:44:52 PM	BCl3 MFC set to  0.000000
2/10/2012	9:44:52 PM	PH3 MFC set to  0.000000
2/10/2012	9:44:52 PM	SiCl4 MFC set to  0.000000
2/10/2012	9:44:52 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:44:53 PM	Tube furnace set to 0
2/10/2012	9:44:54 PM	Run finished at 9:44 PM
2/10/2012	9:44:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2012	9:50:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2012	9:50:25 PM	Recipe started at 9:50 PM
2/10/2012	9:50:25 PM	Helium valve closed
2/10/2012	9:50:25 PM	H2 valve closed
2/10/2012	9:50:25 PM	BCl3 valve closed
2/10/2012	9:50:25 PM	PH3 valve closed
2/10/2012	9:50:25 PM	SiCl4 pre valve closed
2/10/2012	9:50:25 PM	SiCl4 post valve closed
2/10/2012	9:50:25 PM	Main Vac valve closed
2/10/2012	9:50:25 PM	Bubbler valve closed
2/10/2012	9:50:25 PM	Bypass valve opened
2/10/2012	9:50:25 PM	Helium MFC set to  0.000000
2/10/2012	9:50:25 PM	H2 MFC set to  0.000000
2/10/2012	9:50:25 PM	BCl3 MFC set to  0.000000
2/10/2012	9:50:25 PM	PH3 MFC set to  0.000000
2/10/2012	9:50:25 PM	SiCl4 MFC set to  0.000000
2/10/2012	9:50:25 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:50:25 PM	Tube furnace set to 0
2/10/2012	9:51:30 PM	Helium valve closed
2/10/2012	9:51:30 PM	H2 valve closed
2/10/2012	9:51:30 PM	BCl3 valve closed
2/10/2012	9:51:30 PM	PH3 valve closed
2/10/2012	9:51:30 PM	SiCl4 pre valve closed
2/10/2012	9:51:30 PM	SiCl4 post valve closed
2/10/2012	9:51:30 PM	Main Vac valve closed
2/10/2012	9:51:30 PM	Bubbler valve closed
2/10/2012	9:51:30 PM	Bypass valve opened
2/10/2012	9:51:30 PM	Helium MFC set to  0.000000
2/10/2012	9:51:30 PM	H2 MFC set to  0.000000
2/10/2012	9:51:30 PM	BCl3 MFC set to  0.000000
2/10/2012	9:51:30 PM	PH3 MFC set to  0.000000
2/10/2012	9:51:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	9:51:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:51:30 PM	Tube furnace set to 0
2/10/2012	9:52:30 PM	Helium valve closed
2/10/2012	9:52:30 PM	H2 valve closed
2/10/2012	9:52:30 PM	BCl3 valve closed
2/10/2012	9:52:30 PM	PH3 valve closed
2/10/2012	9:52:30 PM	SiCl4 pre valve closed
2/10/2012	9:52:30 PM	SiCl4 post valve closed
2/10/2012	9:52:30 PM	Bypass valve closed
2/10/2012	9:52:30 PM	Bubbler valve closed
2/10/2012	9:52:30 PM	Main Vac valve opened
2/10/2012	9:52:30 PM	Helium MFC set to  0.000000
2/10/2012	9:52:30 PM	H2 MFC set to  0.000000
2/10/2012	9:52:30 PM	BCl3 MFC set to  0.000000
2/10/2012	9:52:30 PM	PH3 MFC set to  0.000000
2/10/2012	9:52:30 PM	SiCl4 MFC set to  0.000000
2/10/2012	9:52:30 PM	Bypass solenoid MFC set to  0.000000
2/10/2012	9:52:30 PM	Tube furnace set to 0
2/10/2012	9:52:31 PM	Run finished at 9:52 PM
2/10/2012	9:52:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
